有著次微米精度的精密生產機具對先進產業與科技來說是不可或缺的。為了滿足此需求，校正這些機具的量測系統必須有著更優異的精度。觀察實際的誤差量測結果顯示，角度誤差會導致額外的平移誤差，即為阿貝誤差與布萊恩誤差。學者們針對此難題已提出多種光學式多自由度幾何誤差量測系統，其中六自由度幾何誤差量測系統通常由一組干涉儀與多組運用準直雷射的量測模組所組成。前者利用波動光學量測定位誤差，而後者則利用幾何光學量測剩餘的五自由度幾何誤差。儘管此方法已相當成熟，後者所使用的數學模型通常需要複雜的解析式推導，這使得設備供應商難以調整該系統並適用於其自有設備中。
為了解決當前困難，本論文提出一套基於歪斜光線追跡的系統化幾何光學式量測系統之數學建模方法，經由此方法可運用數值方法來推導六自由度幾何誤差的解析模型，藉此改善繁瑣的符號表示式容易造成理解不清的問題。該方法經過模擬驗證後，將會應用於本論文所開發的六自由度幾何誤差量測系統中。藉由比較該系統與市售系統同時測量的六自由度誤差，結果顯示該系統在俯仰、偏擺、水平直度、垂直直度、翻滾與定位誤差的平均精度分別為 ±0.1 角秒、±0.1 角秒、±0.2 微米、±0.2 微米、±0.6 角秒與 ±0.20 微米，而相應的重現性分別為 ±0.5 角秒、±0.4 角秒、±0.6 微米、±0.6 微米、±1.8 角秒與 ±0.55 微米。這些結果不僅驗證了該量測系統的性能，也驗證了本論文所提出的系統化數學建模方法。

Precision manufacturing machines with submicron accuracy are requisite for innovative industries and technologies. To meet this demand, the measurement systems utilized to calibrate these machines must possess superior accuracy. It has been observed that angular errors lead to additional parallel errors, known as Abbe and Bryan errors. To address this issue, researchers have proposed various multi-DOF geometric error (GE) measurement systems using optics. Among these systems, six-DOF GE measurement systems generally consist of an interferometer and multiple measurement modules utilizing a collimated laser. The former measures the positioning error using wave optics, while the latter measures the remaining five-DOF GEs using geometrical optics. Despite its maturation, the mathematical model used in the latter typically involves complex analytical derivations, making it challenging for equipment vendors to adapt this system to their own equipment.
To resolve this difficulty, this thesis proposes a systematic modeling approach for multi-DOF GE measurement systems using geometrical optics. This model enables the derivation of a model for six-DOF GE analysis using numerical methods, circumventing the need for arduous symbolic expressions that can hinder comprehension. The models are initially validated through various simulations. Subsequently, they are applied to a six-DOF GE measurement system developed in this thesis. By comparing the six-DOF GEs of a linear stage measured simultaneously by the developed and commercial systems, the mean accuracy values of the developed measurement system are ±0.1 arcsec, ±0.1 arcsec, ±0.2 μm, ±0.2 μm, ±0.6 arcsec, and ±0.20 μm for pitch, yaw, horizontal straightness, vertical straightness, roll, and positioning errors, respectively. And the corresponding repeatability values are ±0.5 arcsec, ±0.4 arcsec, ±0.6 μm, ±0.6 μm, ±1.8 arcsec, and ±0.55 μm. These results validate not only the system performance but also the proposed systematic modeling approach.

[1] G. Cheng, “Moore's Law Is Not Dead”, TSMC. https://www.tsmc.com/english/news-events/blog-article-20190814 (accessed 2024/05).
[2] C.-Y. Tung, “Taiwan and the Global Semiconductor Supply Chain,” Taipei Representative Office, Singapore, 2024.
[3] C. Chien-chung and F. Huang, “Tsmc's 2nm Wafer Fab to Install Equipment in April 2024”, Focus Taiwan. https://focustaiwan.tw/business/202312160016 (accessed 2024/05).
[4] IEEE, “More Moore,” in "INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS™," IEEE, 2022.
[5] Test Code for Machine Tools—Part 1: Geometric accuracy of machines operating under no-load or quasi-static conditions, ISO 230-1:2012, ISO International, 2012.
[6] E. Abbe, “Messapparate Für Physiker,” Zeitschrift für Instrumentenkunde, vol. 10, no. 12, pp. 446-448, 1890.
[7] Q. Xiong and Q. Zhou, “Development Trend of NC Machining Accuracy Control Technology for Aeronautical Structural Parts,” World Journal of Engineering and Technology, vol. 08, pp. 266-279, 2020.
[8] G. Zongchao, T. Zhen, and J. Xiangqian, “Review of Geometric Error Measurement and Compensation Techniques of Ultra-Precision Machine Tools,” Light: Advanced Manufacturing, vol. 2, no. 2, pp. 211-227, 2021.
[9] RENISHAW, “XM-60 and XM-600 Multi-Axis Calibrator”, https://www.renishaw.com/en/xm-60-and-xm-600-multi-axis-calibrator--39258 (accessed 2024/03).
[10] S. M. GmbH, “Calibration Laser Interferometer—SP 15000 C6 NG”, https://www.sios-precision.com/en/products/length-and-angle-measurement-systems/calibration-laser-interferometer-sp-15000-c6-ng (accessed 2024/05).
[11] Z. Zhang, F. Jiang, M. Luo et al., “Geometric Error Measuring, Modeling, and Compensation for CNC Machine Tools: A Review,” Chinese Journal of Aeronautics, vol. 37, no. 2, pp. 163-198, 2024.
[12] F. Zheng, Q. Feng, B. Zhang et al., “A High-Precision Laser Method for Directly and Quickly Measuring 21 Geometric Motion Errors of Three Linear Axes of Computer Numerical Control Machine Tools,” The International Journal of Advanced Manufacturing Technology, vol. 109, no. 5, pp. 1285-1296, 2020.
[13] L. Fei, Z. Fajia, J. Peizhi et al., “Research Status and Development Trend of Laser Multi-Degree-of-Freedom Simultaneous Measurement,” Laser & Optoelectronics Progress, vol. 60, no. 3, p. 0312012, 2023.
[14] J. C. Evans, Measurement of Angle in Engineering, H.M. Stationery Office, 1964.
[15] Y. Guo, H. Cheng, Y. Wen et al., “Small-Angle Measurement in Laser Autocollimation Based on a Common-Path Compensation Method,” Journal of Modern Optics, vol. 66, no. 18, pp. 1818-1826, 2019.
[16] T. Wen, J. Hu, Y. Zhu et al., “Multi-Axis Laser Interferometer Not Affected by Installation Errors Based on Nonlinear Computation,” Applied Sciences, vol. 13, no. 19, p. 10887, 2023.
[17] M. A. V. Chapman, R. Fergusson-Kelly, A. Holloway et al., “Interferometric Angle Measurement and the Hardware Options Available from Renishaw,” 2016.
[18] L. Yu, G. Molnar, C. Werner et al., “A Single-Beam 3DOF Homodyne Interferometer,” Measurement Science and Technology, vol. 31, no. 8, p. 084006, 2020.
[19] N. Zhuojiang, T. Wei, and Z. Hui, “Development of a Small-Size Laser Triangulation Displacement Sensor and Temperature Drift Compensation Method,” Measurement Science and Technology, vol. 32, no. 9, p. 095107, 2021.
[20] F. L. Pedrotti, L. M. Pedrotti, and L. S. Pedrotti, “Optical Interferometry,” in Introduction to Optics, 3 ed. Cambridge University Press, ch. 8, pp. 192-199, 2017.
[21] Q. Feng, B. Zhang, and C. Kuang, “A Straightness Measurement System Using a Single-Mode Fiber-Coupled Laser Module,” Optics & Laser Technology, vol. 36, no. 4, pp. 279-283, 2004.
[22] T.-T. Liao and P. D. Lin, “Analysis of Optical Elements with Flat Boundary Surfaces,” Applied Optics, vol. 42, no. 7, pp. 1191-1202, 2003.
[23] M. A. V. Chapman, R. Fergusson-Kelly, and W. Lee, “Interferometric Straightness Measurement and Application to Moving Table Machines,” 2013.
[24] T. Jin, G. Xia, W. Hou et al., “High Resolution and Stability Roll Angle Measurement Method for Precision Linear Displacement Stages,” Review of Scientific Instruments, vol. 88, no. 2, 2017.
[25] S. Wu, X. Li, W. Li et al., “Non-Contact and Fast Measurement of Small Roll Angle Using Digital Shearography,” Optics and Lasers in Engineering, vol. 150, p. 106846, 2022.
[26] X. Liu, Y. Wang, L. Zhu et al., “High-Precision Dynamic Measurement of Roll Angle Based on Digital Holography,” Optics and Lasers in Engineering, vol. 169, p. 107711, 2023.
[27] P. Zhang, Y. Wang, C. Kuang et al., “Measuring Roll Angle Displacement Based on Ellipticity with High Resolution and Large Range,” Optics & Laser Technology, vol. 65, pp. 126-130, 2015.
[28] F. L. Pedrotti, L. M. Pedrotti, and L. S. Pedrotti, “Matrix Treatment of Polarization,” in Introduction to Optics, 3 ed. Cambridge University Press, ch. 14, pp. 333-349, 2017.
[29] Z. Yusheng, Z. Zhifeng, S. Yuling et al., “A High-Precision Roll Angle Measurement Method,” Optik, vol. 126, no. 24, pp. 4837-4840, 2015.
[30] S. Zhou, V. Le, Q. Mi et al., “Grating-Corner-Cube-Based Roll Angle Sensor,” Sensors, vol. 20, no. 19, p. 5524, 2020.
[31] W. Ren, J. Cui, and J. Tan, “Parallel Beam Generation Method for a High-Precision Roll Angle Measurement with a Long Working Distance,” Optics Express, vol. 28, no. 23, pp. 34489-34500, 2020.
[32] X. Yu, S. R. Gillmer, S. C. Woody et al., “Development of a Compact, Fiber-Coupled, Six Degree-of-Freedom Measurement System for Precision Linear Stage Metrology,” Review of Scientific Instruments, vol. 87, no. 6, 2016.
[33] C.-S. Liu, Y.-F. Pu, Y.-T. Chen et al., “Design of a Measurement System for Simultaneously Measuring Six-Degree-of-Freedom Geometric Errors of a Long Linear Stage,” Sensors, vol. 18, no. 11, p. 3875, 2018.
[34] R. Ma, J. Zhang, W. Dong et al., “Simultaneous Measurement Method of Six-Degree-of-Freedom Absolute Position and Attitude Based on Light Spots,” in Third Optics Frontier Conference (OFS 2023), vol. 12711, 2023.
[35] D. Ma, J. Li, Q. Feng et al., “Method and System for Simultaneously Measuring Six Degrees of Freedom Motion Errors of a Rotary Axis Based on a Semiconductor Laser,” Optics Express, vol. 31, no. 15, pp. 24127-24141, 2023.
[36] Y. Lou, L. Yan, B. Chen et al., “Laser Homodyne Straightness Interferometer with Simultaneous Measurement of Six Degrees of Freedom Motion Errors for Precision Linear Stage Metrology,” Optics Express, vol. 25, no. 6, pp. 6805-6821, 2017.
[37] F. Zheng, Q. Feng, B. Zhang et al., “A Method for Simultaneously Measuring 6DOF Geometric Motion Errors of Linear and Rotary Axes Using Lasers,” Sensors, vol. 19, no. 8, p. 1764, 2019.
[38] F. Zhu, J. Tan, and J. Cui, “Common-Path Design Criteria for Laser Datum Based Measurement of Small Angle Deviations and Laser Autocollimation Method in Compliance with the Criteria with High Accuracy and Stability,” Optics Express, vol. 21, no. 9, pp. 11391-11403, 2013.
[39] Z. Yusheng, Z. Zhifeng, L. Yang et al., “Experimental Study of Laser Beam Drift,” in 2015 International Conference on Optoelectronics and Microelectronics (ICOM), pp. 107-110, 2015.
[40] C.-C. Lo, W.-H. Hsu, and C.-S. Liu, “Six-Degree-of-Freedom Geometrical Errors Measurement System with Compensation of Laser Beam Drifts and Installation Errors for Linear Stage,” Optics and Lasers in Engineering, vol. 162, p. 107407, 2023.
[41] Y. Cai, Y. Gao, K. Yin et al., “Accuracy Improvement of a Laser Diode-Based System for Measuring the Geometric Errors of Machine Tools,” Applied Sciences, vol. 12, no. 7, p. 3479, 2022.
[42] P. Jia, B. Zhang, F. Zheng et al., “Comprehensive Measurement Model of Geometric Errors for Three Linear Axes of Computer Numerical Control Machine Tools,” Measurement Science and Technology, vol. 33, no. 1, p. 015202, 2022.
[43] F. Zheng, F. Long, Y. Zhao et al., “High-Precision Small-Angle Measurement of Laser-Fiber Autocollimation Using Common-Path Polarized Light Difference,” IEEE Sensors Journal, vol. 23, no. 9, pp. 9237-9245, 2023.
[44] G. Budzyn and J. Rzepka, “Study on Noises Influencing the Accuracy of CNC Machine Straightness Measurements Methods Based on Beam Position Detection,” Journal of Machine Engineering, vol. 20, no. 3, pp. 76-84, 2020.
[45] M. Chen, T. Gao, S. Hu et al., “Simulating Non-Kolmogorov Turbulence Phase Screens Based on Equivalent Structure Constant and Its Influence on Simulations of Beam Propagation,” Results in Physics, vol. 7, pp. 3596-3602, 2017.
[46] E. M. Johansson and D. T. Gavel, “Simulation of Stellar Speckle Imaging,” Proceedings of SPIE - The International Society for Optical Engineering, Article vol. 2200, pp. 372-383, 1994.
[47] W. Liu, C. Zhang, F. Duan et al., “A Method for Noise Attenuation of Straightness Measurement Based on Laser Collimation,” Measurement, vol. 182, p. 109643, 2021.
[48] J. B. Bryan, “The Abbé Principle Revisited: An Updated Interpretation,” Precision Engineering-journal of The International Societies for Precision Engineering and Nanotechnology, vol. 1, pp. 129-132, 1979.
[49] H. Li, S. Xiang, M. Deng et al., “Measuring and Modeling of Volumetric Errors for Vertical Machining Centers Based on Bi-Directional Laser Sequential Step Diagonal Measurement,” in ASME 2018 13th International Manufacturing Science and Engineering Conference, vol. Volume 3: Manufacturing Equipment and Systems, 2018.
[50] Y. B. Huang, K. C. Fan, Z. F. Lou et al., “A Novel Modeling of Volumetric Errors of Three-Axis Machine Tools Based on Abbe and Bryan Principles,” International Journal of Machine Tools and Manufacture, vol. 151, p. 103527, 2020.
[51] F. L. Pedrotti, L. M. Pedrotti, and L. S. Pedrotti, “Geometrical Optics,” in Introduction to Optics, 3 ed. Cambridge University Press, ch. 2, pp. 16-49, 2017.
[52] P. D. Lin, Advanced Geometrical Optics, Springer Singapore, 2017.
[53] G. Giusfredi, “Interference,” in Physical Optics: Concepts, Optical Elements, and Techniques, G. Giusfredi Ed., Springer International Publishing, pp. 363-459, 2019.
[54] R. C. Jones, “A New Calculus for the Treatment of Optical Systemsi. Description and Discussion of the Calculus,” Journal of the Optical Society of America, vol. 31, no. 7, pp. 488-493, 1941.
[55] J. Humlíček, “Polarized Light and Ellipsometry,” in Handbook of Ellipsometry, Springer, pp. 3-91, 2005.
[56] U. Mutilba, E. Gomez-Acedo, G. Kortaberria et al., “Traceability of on-Machine Tool Measurement: A Review,” Sensors, vol. 17, no. 7, p. 1605, 2017.
[57] Methods for the Calibration of Vibration and Shock Transducers—Part 11: Primary vibration calibration by laser interferometry, ISO 16063-11:1999, ISO International, 2021.
[58] J. Watchi, S. Cooper, B. Ding et al., “Contributed Review: A Review of Compact Interferometers,” Review of Scientific Instruments, vol. 89, no. 12, 2018.
[59] R. Schödel, A. Yacoot, and A. Lewis, “The New Mise En Pratique for the Metre—a Review of Approaches for the Practical Realization of Traceable Length Metrology from 10−11 m to 1013 M,” Metrologia, vol. 58, no. 5, p. 052002, 2021.
[60] T. B. Greenslade, “All About Lissajous Figures,” Physics Teacher, vol. 31, no. 6, pp. 364-70, 1993.
[61] J. Tribolet, “A New Phase Unwrapping Algorithm,” IEEE Transactions on Acoustics, Speech, and Signal Processing, vol. 25, no. 2, pp. 170-177, 1977.
[62] J. B. Hearnshaw, “The Doppler Effect,” in The Analysis of Starlight: Two Centuries of Astronomical Spectroscopy, 2 ed. Cambridge University Press, pp. 86-126, 2014.
[63] S. J. A. G. Cosijns, “Displacement Laser Interferometry with Sub-Nanometer Uncertainty”, Technische Universiteit Eindhoven, Phd Thesis 1 (Research TU/e / Graduation TU/e), Eindhoven, 2004.
[64] C. Wang, Y. Qu, and Y. P. T. Tang, “IQ Quadrature Demodulation Algorithm Used in Heterodyne Detection,” Infrared Physics & Technology, vol. 72, pp. 191-194, 2015.
[65] K.-N. Joo, J. D. Ellis, E. S. Buice et al., “High Resolution Heterodyne Interferometer without Detectable Periodic Nonlinearity,” Optics Express, vol. 18, no. 2, pp. 1159-1165, 2010.
[66] C. Wang, Q. Huang, X. Ding et al., “Compensation Method for Polarization Mixing in the Homodyne Interferometer,” Applied Sciences, vol. 10, no. 17, p. 6060, 2020.
[67] E. TaeBong, K. JongYun, and J. Kyuwon, “The Dynamic Compensation of Nonlinearity in a Homodyne Laser Interferometer,” Measurement Science and Technology, vol. 12, no. 10, p. 1734, 2001.
[68] P. L. M. Heydemann, “Determination and Correction of Quadrature Fringe Measurement Errors in Interferometers,” Applied Optics, vol. 20, no. 19, pp. 3382-3384, 1981.
[69] R. Köning, G. Wimmer, and V. Witkovský, “Ellipse Fitting by Nonlinear Constraints to Demodulate Quadrature Homodyne Interferometer Signals and to Determine the Statistical Uncertainty of the Interferometric Phase,” Measurement Science and Technology, vol. 25, no. 11, p. 115001, 2014.
[70] F. Cheng and K.-C. Fan, “Linear Diffraction Grating Interferometer with High Alignment Tolerance and High Accuracy,” Applied Optics, vol. 50, no. 22, pp. 4550-4556, 2011.
[71] K.-C. Fan, F. Cheng, and Y. J. Chen, “Nanopositioning Control on a Commercial Linear Stage by Software Error Correction,” Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, vol. 4, pp. 1-9, 2006.
[72] C. Bao, J. Li, Q. Feng et al., “Error-Compensation Model for Simultaneous Measurement of Five Degrees of Freedom Motion Errors of a Rotary Axis,” Measurement Science and Technology, vol. 29, no. 7, p. 075004, 2018.
[73] Y. Fan, Z. Lou, Y. Huang et al., “Self-Compensation Method for Dual-Beam Roll Angle Measurement of Linear Stages,” Optics Express, vol. 29, no. 17, pp. 26340-26352, 2021.
[74] V. Witkovsky, “EllipseFit4HC”, MATLAB Central File Exchange. https://www.mathworks.com/matlabcentral/fileexchange/47420-ellipsefit4hc (accessed 2024/05).
[75] Newport Corporation, “XPS-D Features Manual”, https://www.newport.com/mam/celum/celum_assets/np/resources/EDH0407En1041_XPS-D_Features_Manual.pdf (accessed 2024/06).
[76] N. Bobroff, “Recent Advances in Displacement Measuring Interferometry,” Measurement Science and Technology, vol. 4, no. 9, p. 907, 1993.
[77] P. E. Ciddor, “Refractive Index of Air: New Equations for the Visible and near Infrared,” Applied Optics, vol. 35, no. 9, pp. 1566-1573, 1996.
[78] E. Bengt, “The Refractive Index of Air,” Metrologia, vol. 2, no. 2, p. 71, 1966.
[79] K. P. Birch and M. J. Downs, “An Updated Edlén Equation for the Refractive Index of Air,” Metrologia, vol. 30, no. 3, p. 155, 1993.
[80] K. P. Birch and M. J. Downs, “Correction to the Updated Edlén Equation for the Refractive Index of Air,” Metrologia, vol. 31, no. 4, p. 315, 1994.
[81] J. A. Stone and J. H. Zimmerman, “Index of Refraction of Air”, https://emtoolbox.nist.gov/Wavelength/Documentation.asp#IndexofRefractionofAir (accessed 2024/05).
[82] C. Cui, Q. Feng, B. Zhang et al., “System for Simultaneously Measuring 6DOF Geometric Motion Errors Using a Polarization Maintaining Fiber-Coupled Dual-Frequency Laser,” Optics Express, vol. 24, no. 6, pp. 6735-6748, 2016.
[83] Y. Zhao, B. Zhang, and Q. Feng, “Measurement System and Model for Simultaneously Measuring 6DOF Geometric Errors,” Optics Express, vol. 25, no. 18, pp. 20993-21007, 2017.
[84] J. Liu and R. M. A. Azzam, “Polarization Properties of Corner-Cube Retroreflectors: Theory and Experiment,” Applied Optics, vol. 36, no. 7, pp. 1553-1559, 1997.
[85] W. Zhao, R. Li, X. Li et al., “Analog Electronic Method for Solving Nonlinear Errors of Sinusoidal Waves in Interferometry,” IEEE Transactions on Instrumentation and Measurement, vol. 70, pp. 1-10, 2021.
[86] R. P. Alegria, “Implementation of a Michelson Interferometer for Length Metrology”, University of Lisbon RepositoryFaculty of Sciences, Master, 2022.
[87] Duma Optronics Ltd., “SpotOn Analog USB”, https://www.dumaoptronics.com/spoton-analog-usb (accessed 2024/06).
[88] Thorlabs Inc., “PDA100A(-EC) Si Switchable Gain Detector User Guide”, https://www.thorlabs.com/_sd.cfm?fileName=13055-D03.pdf&partNumber=PDA100A (accessed 2024/06).
[89] F. L. Pedrotti, L. M. Pedrotti, and L. S. Pedrotti, “Interference of Light,” in Introduction to Optics, 3 ed. Cambridge University Press, ch. 7, pp. 163-191, 2017.
[90] Necsel, “Single Longitudinal Mode Laser Series - 632.8nm”, https://www.ushio.com/files/specifications/necsel-novatru-chroma-633-slm-laser.pdf (accessed 2024/06).
[91] C. Akcay, P. Parrein, and J. P. Rolland, “Estimation of Longitudinal Resolution in Optical Coherence Imaging,” Applied Optics, vol. 41, no. 25, pp. 5256-5262, 2002.
[92] PD-LD, “The True HeNe Alternative: PD-LD’s SLM-632 Laser Diode”, https://www.youtube.com/watch?v=3OTz6106Qz0 (accessed 2024/06).
[93] F. L. Pedrotti, L. M. Pedrotti, and L. S. Pedrotti, “Characteristics of Laser Beams,” in Introduction to Optics, 3 ed. Cambridge University Press, ch. 27, pp. 582-606, 2017.
[94] Thorlabs Inc., “Fixed Focus Collimation Packages: FC/APC Connectors: Calculations”, https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=1696 (accessed 2024/06).
[95] Newport Corporation, “Motorized Linear Stage, 500 mm Travel, DC Motor, Linear Encoder, M6”, https://www.newport.com/p/M-IMS500CCHA (accessed 2024/06).
[96] National Instruments, “NI 6115/6120 Specifications”, https://docs-be.ni.com/bundle/ni-6115-6120-specs/raw/resource/enus/371397d.pdf (accessed 2024/06).
[97] R. G. Lyons, “Periodic Sampling,” in Understanding Digital Signal Processing, 3 ed. Pearson Education, ch. 2, pp. 33-58, 2010.
[98] RENISHAW, “XL Laser System User Guide”, https://www.renishaw.com/media/pdf/en/9b37e8cd91194663ba93bc5a80cbbb7b.pdf (accessed 2024/06).
[99] L. ada, “DHT11, DHT22 and AM2302 Sensors”, https://www.mouser.com/datasheet/2/737/dht-932870.pdf (accessed 2024/06).
[100] B. Sensortec, “BMP280 Digital Pressure Sensor”, https://cdn-shop.adafruit.com/datasheets/BST-BMP280-DS001-11.pdf (accessed 2024/06).
[101] T. Doiron, “20 Degrees Celsius--a Short History of the Standard Reference Temperature for Industrial Dimensional Measurements,” no. 112, 2007.
[102] Thorlabs Inc., “How to Align a Laser | Thorlabs Insights”, https://www.youtube.com/watch?v=qzxILY6nOmA (accessed 2024/06).
[103] Thorlabs Inc., “Align a Linear Polarizer's Axis to Be Vertical or Horizontal to the Table | Thorlabs Insights”, https://www.youtube.com/watch?v=W9pALZ5Z8ms (accessed 2024/06).
[104] Thorlabs Inc., “Create Circularly Polarized Light Using a Quarter-Wave Plate (QWP) | Thorlabs Insights”, https://www.youtube.com/watch?v=P0asuzX4x-Q (accessed 2024/06).
[105] Thorlabs Inc., “Align a Linear Polarizer 45° to the Plane of Incidence | Thorlabs Insights”, https://www.youtube.com/watch?v=cqLPD5dL9zY (accessed 2024/06).
[106] Hamamatsu Photonics, “Technical Note PSD (Position Sensitive Detector)”, https://www.hamamatsu.com/content/dam/hamamatsu-photonics/sites/documents/99_SALES_LIBRARY/ssd/psd_kpsd9001e.pdf (accessed 2024/06).
[107] RENISHAW, “Brochure: XL-80 Laser Measurement System”, https://www.renishaw.com/media/pdf/en/f53a3c0ff50c4b0c86c5b70cb8bbfb82.pdf (accessed 2024/06).
[108] Dostmann, “LOG200 Series Manual”, https://dostmann-electronic.de/download/674-LOG200-Series_Manual.pdf (accessed 2024/06).
[109] RENISHAW, “User Guide: XC-80 Environmental Compensator”, https://www.renishaw.com/media/pdf/en/e9f8dc6020204ad3a900c7c4175224bb.pdf (accessed 2024/06).
[110] Thorlabs Inc., “Compact USB Power Meter with Silicon Photodiode Detector”, https://www.thorlabs.com/drawings/facfedb0b0074b68-C28448EB-991F-CDCC-86AFA9601085136A/PM16-120-SpecSheet.pdf (accessed 2024/06).
[111] WYLER AG, “Manual Bluesystem”, https://www.wylerag.com/fileadmin/pdf/manuel/BlueSYSTEM_eng.pdf (accessed 2024/06).
[112] K. Cui, Y. Wang, X. Pan et al., “Real Time Phase Unwrapping Implementation Based on Unscented Kalman Filter for Interferometric Fiber Sensor Applications,” Journal of Lightwave Technology, vol. 42, pp. 970-980, 2023.
[113] W. He, G. Wu, F. Fan et al., “A Robust Real-Time Ellipse Detection Method for Robot Applications,” Drones, vol. 7, no. 3, p. 209, 2023.
[114] Newport Corporation, “Hexapod, High Accuracy, 125 mm Diameter Platform, 5 kg Load, M6”, https://www.newport.com/p/HXP50HA-MECA (accessed 2024/06).