環境品質與健康生活訊息為民眾所關注，透過問卷調查關切健康的面向、戶外及室內環境對健康的影響以及對環境感測器改善的期待，藉由統計分析得出紫外線光電感測器為技術開發對象，期待體積縮小、重量減輕、能隨身攜帶以及價格便宜。在紫外線光電感測元件中，以氧化鋅為材料有幾種方法摻雜鋰，由於各方法各具優缺點，本研究遴選5種常用的方法透過層級分析法（Analytic Hierarchy Process, AHP）決策分析選擇最佳開發策略。選出最佳方法為水熱法，其特色為實驗耗材費用低、主要設備價格低且使用方便。
使用氧化鋅材料之鋰摻雜：在玻璃基材上使用射頻磁控濺鍍法製備25 nm厚的氧化鋅薄膜；以水熱法在70、80和90℃的不同溫度下製備形成摻雜鋰的氧化鋅奈米棒陣列；沉積一層金（Au）交叉指狀膜為電極。經過量測在紫外線激發時開/關電流對比的光電感測器λ約為19.3，其動態響應為顯示可重現且穩定，可以作為適當的紫外線光電感測器元件。當施加5.0 V電壓，紫外線激發時開/關時，當相對濕度高時電流衰減更快，可以作為濕度感測應用。
從環境感測需求選出紫外線感測器為開發策略，針對氧化鋅材料感測元件技術評估選擇出以水熱法摻雜鋰於氧化鋅。透過實作製備其響應以確認適合作為紫外線感測元件，並深入研究此技術用可延伸作為濕度感測使用。本研究主要貢獻在於對半導體製程技術開發選用，藉由問卷之統計分析加上層級分析法的評估。確認選擇後並實際做技術開發以資證明分析與評估之有效性，為元件開發成功之實證案例。

The public pays close attention to environmental and health information, and through statistical analysis of questionnaire surveys, UV photoelectric sensors are the object of technology development. For the ultraviolet photoelectric sensing components, there are several methods for doping lithium with zinc oxide. The hydrothermal method is selected by the hierarchical analysis method, which is characterized by low cost of experimental consumables, low price of main equipment and convenient use.
Lithium doping using zinc oxide material: the zinc oxide film is hydrothermally formed to form a lithium-doped ZnO nanorod array. The photoelectric sensor λ of the on/off current contrast is about 19.3 when excited by ultraviolet light, which can be used as an appropriate UV photoelectric sensor component. Applying 5.0 V voltage when UV is excited, on/off current decays faster when the relative humidity is high, which can be used as a humidity sensing application.

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