近年來，由於環保理念、全球面臨氣候變遷、節能與減碳的考量，這些因素挑戰下，綠色能源產業也隨之發展。全球綠能的需求持續增加，已帶動相關產業蓬勃發展， 其中太陽電池更是綠色能源產業中的主流，提高轉換效率的太陽電池技術為研發之重點，其中以雷射開孔，形成選擇性射極結構，可增加金屬電極與半導體之間的接觸面積，因而可提升載子收集率，進而使光電流上升，並且又能縮短載子到電極之移動距離，降低載子復合率，使其開路電壓與短路電流提高。本文將著重於研究單晶矽太陽能電池－雷射製程選擇性射極 PERC太陽電池。
本論文內將探討使用雷射輔助摻雜的方式，將要於金屬電極接觸之發射極板處，形成重摻雜，以降低接觸電阻。為了瞭解一個單晶矽於磷內擴散後，於正面金屬電極預定處下方經雷射製程後之磷濃度分佈等情況，我們利用532nm 的綠光雷射，並於雷射光束能量的調整上，經由雷射輸出功率、脈衝頻率及掃描的速度來變更預定金屬電極下方之發射極板處之片電阻，並藉由四點探針量測發射極電阻變化，找出轉換效率最佳化阻值，並把雷射製程選擇性射極加入PERC太陽能電池製程之中， 進而提高PERC太陽能電池之轉換效率。

Recently, green energy industry has been developed due to the consideration of environmental protection, global climate change, energy saving and carbon reduction, and the challenges brought by these factors.
The need of global green energy has increased continuously and brought thriving development of related industries. The mainstream of the green energy industries is the solar cell. The enhancement on the conversion efficiency of the solar cell technology is the focus of the current research and development. In particular, the method of opening holes by laser to form selective emitter structure can increase the contacting area between the metal electrode and the semiconductor so that the carrier collection rate can be increased, which resulted in the increase of photocurrent, and the migration distance of the carrier to the electrode can be shortened, which reduced carrier recombination rate and enhanced its Voc and Isc.
This study focuses on the investigation of single crystalline silicon solar cell solar cell: selective emitter PERC solar cell by laser process. We will discuss the method of laser-assisted doping to form heavy doping at the emitter contacting the metal electrode to reduce the contact resistance.
We used 532nm green laser and changed the sheet resistance of the emitter under the predetermined metal electrode by laser output power, pulse frequency and scanning speed with the adjustment on laser beam power to understand the conditions such as the distribution of phosphorus concentration after the single crystalline silicon has diffused in phosphorus and been through the laser process under the predetermined spot of the front side of metal electrode. Then by measuring the change in the resistance of the emitter with four-point probe, we can find the resistance for the optimal conversion efficiency and apply laser-processed selective emitter into the PERC solar cell process to enhance the conversion efficiency of PERC solar cell.

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