不同於塊狀金材料，金奈米結構可以提供許多截然不同的物化特性。當適當的光與貴金屬奈米結構的交互作用下會發生表面電漿共振，其共振特性可以透過結構的形狀、大小與組成來調控，讓共振波段調整到特定波長區間，而表面電漿共振會伴隨局域性的強電磁場，帶來光與環境物質的交互作用，近年來，此特性已經讓金奈米結構在超穎介面(metasurfaces)、折射率感測、表面增強拉曼散射(SERS)、光催化、光熱治療、生物醫學等領域被廣泛的應用。為了因應這些應用的需求，讓光學特性可以調整到更寬頻的範圍，或是可以達成設計的功能，許多研究發展出不同的製程方法，讓貴金屬奈米結構的形狀、大小、密度、材料與均勻性得到更好的控制，同時也想辦法使製程方法變得更簡單、更快、更便宜。在眾多的製程方法之中，光化學還原法可以在固化聚合物材料的同時將金離子還原成金奈米結構，能在微影的過程中同時生成金奈米結構，是一項有潛力的製程方法。在本篇論文，我們提出兩種利用光化學還原法來製作不同形貌的金奈米結構的簡單製程。
第一種製程，我們將氯金酸滴在SU-8的表面上，在紫外光的照射下可以在SU-8的表面上直接合成出單層、高密度的金奈米粒子。我們進一步利用不同聚合物表面並混合不同光起始劑濃度的光還原能力來探討還原反應的機制。利用電子顯微鏡確認金奈米粒子在SU-8薄膜中水平與垂直的分布位置。觀察初始固化時間與重複還原次數對於金奈米粒子的大小與密度的影響，同樣的光還原反應也可以用在SU-8奈米柱上，我們以SU-8奈米柱作為光還原的基底，在表面增強拉曼感測的應用上，藉由奈米柱結構高比表面積的特性來提升熱點密度，進而有效提高待測物的拉曼訊號，在Rhodamine 6G (R6G)的最低偵測濃度極限為10-10 M。此金奈米粒子/奈米柱基板也被用來檢測水產用藥，靈敏度能滿足歐盟判定漁貨殘留藥物含量之標準。
第二種製程，由於PMMA具有極低的還原活性，我們用PMMA製作遮罩在SU-8薄膜上，讓氯金酸的還原具有選擇性。我們將PMMA旋塗在PFPE模具上，接著在軟烤的同時會因為solvent dewetting現象去除殘餘層，即形成PMMA遮罩，再進行nanotransfer printing (nTP)，將PMMA遮罩轉印到SU-8薄膜上，最後將氯金酸滴在SU-8的表面上，在紫外光的照射下，金會選擇性還原在未受PMMA遮擋的區域，即形成金奈米結構。在此製程中，我們探討PMMA的濃度對於殘餘層dewetting後開口形貌的影響，也透過重複還原來調整金生長在PMMA開口中的覆蓋率與高度，並且以模擬分析探討橫向生長與縱向生長的頻譜變化，最後，我們改變模具的結構來製作出不同線寬、間距大小、週期與複雜二維圖形的金奈米結構，測試這個製程製作金奈米結構的能力。以上提出的製程皆不需要使用昂貴真空設備，且具有快速、低成本和能夠大量製作之優點，對金奈米結構來說是相當有潛力的製作方法。

Gold nanostructures could provide unique physical and chemical properties which differ from bulk gold. Localized surface plasmon resonance (LSPR) occurs when conduction electrons bound in gold nanostructures interact with electromagnetic radiation. The characteristics of LSPR could be controlled by shapes, sizes, and compositions of structures. The radiation of a specific LSPR wavelength could enhance the local strong electromagnetic fields and interact with environmental substances. In recent years, gold nanostructures were widely used in various fields such as metasurfaces, refractive index sensing, surface-enhanced Raman spectroscopy (SERS), photocatalysis, photothermal therapy, and biomedical fields. To meet the needs of these applications, there are several different types of methods to control the shape, size, density, material and uniformity of gold nanostructures. Photoreduction method can reduce gold ions to form gold nanostructures while curing polymer materials. This method has the potential to simplify the manufacturing process of gold nanostructures and reduce costs. In this thesis, we demonstrate two simple processes that use photoreduction to make different-shaped gold nanostructures
In the first section, we demonstrated a simple, fast, reproducible, and inexpensive method for growing gold nanoparticle (AuNP) monolayers uniformly directly on the surfaces of SU-8 films or nanostructures using photoreduction. Uniformly distributed AuNPs can be reduced on SU-8 by placing a drop of chloroauric acid (HAuCl4) on the surface of SU-8 followed by UV illumination, which is simply a one-step process. Photoreduction ability on different polymer surfaces with various photoinitiator concentrations was investigated. The horizontal and vertical distributions of reduced nanoparticles were examined by using a scanning electron microscope and a transmission electron microscope. The influence of SU-8 initial curing time and reduction repetition times on nanoparticle sizes and densities was investigated. The same photoreduction process is applicable to the surface of SU-8 nanostructures. In the application of surface-enhanced Raman sensing, the use of SU-8 nanopillars as a photoreduction substrate can provide a high specific surface area for improving the density of hot spots, thereby effectively improving the Raman signal of the analyte. The detection limit for Rhodamine 6G (R6G) could reach 10−10 M. The AuNPs/nanopillar substrate was applied to the detection of malachite green (aquaculture drug), and the sensitivity is enough to meet the european Union (EU) regulations for drug residues in fishery products.
In the second section, we demonstrated a simple, fast, reproducible, and inexpensive method for growing AuNPs selectively on the surfaces of SU-8 films. We use poly(methyl methacrylate) (PMMA) to produce a mask on SU-8 film to make the reduction of chloroauric acid selective because PMMA has extremely low reducing power. PMMA mask can be produced on perfluoropolyether (PFPE) mold by directly spin-coating and then removing the residual layer due to the solvent dewetting while soft baking. PMMA mask was transferred onto SU-8 film by nanotransfer printing (nTP). Selectively distributed AuNPs can be reduced on SU-8 by placing a drop of HAuCl4 on the surface of SU-8 followed by UV illumination. The morphology of open areas at the residual layer of PMMA after dewetting can be adjusted by the concentration of PMMA. The influence of reduction repetition times on coverage ratios and heights of gold in the PMMA opening was investigated. Changes in the spectrum during the growth of the gold nanostructure were discussed by rigorous coupled-wave analysis (RCWA) simulation. In order to test the ability of this process we changed the structure of the mold to produce gold nanostructures with different line widths, pitch sizes, periods and complex two-dimensional (2D) graphics. Above proposed fabrication processes are very simple, inexpensive and high throughput. Thus, these are promising candidates for fabricating gold nanostructures.

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