靜電致動器在微機電系統是非常重要的驅動元件，然而Pull-In現象限制了其衝程，除此之外隨著製程與結構設計越趨複雜，當致動器系統進一步微小化，系統之非線性特性及製程之不確定性導致同一批產品之微機電系統之致動特性不一致，將增加了封裝與校準的成本，故加入控制系統使靜電致動器衝程超越Pull-In之限制以及增加對系統參數之強健性有其必要性。
本文主要針對雙鉗樑(Doubly-Clamped Beam)結構靜電致動器設計強健控制器，為了避免繁雜的微機電系統研發過程，本文提出等效系統的觀念供控制器設計與測試，等效系統以電磁致動器類比靜電致動器，並以雙鉗樑作為系統結構，應用等效系統觀念，本文將磁浮系統控制技術引入微機電靜電致動器系統，應用回饋線性化控制使致動器非線性特性線性化，再以滑動模態控制抵抗致動器不確定特性及樑結構Duffing效應，並以模擬驗証控制器性能，最後以轉換因子轉換控制器到靜電致動器系統。另外對於現回饋線性化控制器，已在所建立的等效系統作實驗驗証，完成定位及追蹤能力的測試。
本文所提出的等效系統概念，使針對微機電靜電致動器系統設計控制器過程簡化，也更加有效率，籍由此觀念，我們得以應用磁浮系統控制技術於靜電致動器系統，以提昇微機電系統性能，並善用更強健的控制器，使微機電製程導致不確定性的影響減至最低。

Electrostatic actuators are important driving elements for microelectromechanical systems (MEMS). However, their working range is usually limited by pull-in instability. In addition, the uncertainties and nonlinearity from fabrication and structural characteristics also make it difficulty to achieve uniform performance and therefore, increase the cost of packaging and calibration. As a result, it is important to incorporate a robust controller to increase both the dynamical range and the robustness of electrostatic actuators.
This thesis focused on the development of feedback controller for a double-clamped beam, a common MEMS structure. In addition to the parametric uncertainty and pull-in instability, this structure also exhibits considerable Duffing nonlinearity. Therefore, increase the difficulty for control.
However, it is not flexible to develop controllers in MEMS scale due to the difficulty of extra high bandwidth requirement and sensing available schemes. As a result, based on the analogy of system dynamics, we develop a macroscale equivalent system and utilizing electromagnetic actuators as the equivalent driving elements. A novel calibration scheme utilizing pull-in phenomenon is used to calibrate eletromagnets. Both feedback linearization and sliding controllers are designed to extend the operation range of actuators. The computer simulation indicates that with proper design, electrostatic actuators can achieve stable behavior beyond the pull-in linit. However, it is also found that the feedback linearization controller can achieve this goal only under small parametric uncertainty. On the other hand, sliding control shows more robust performance.
The result of this thesis can be applied in two fields. First, it can be used as a basis of rapid prototyping of controller for MEMS. Second, the calibration and control schemes proposed in this thesis can be directly applied in marcoscale mechatronics applications such as magnetic suspension and precision positioning.

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