本研究探討非平衡磁控濺鍍含鎢之碳氮鍍膜的磨潤性質與機械性質。首先試驗碳氮鍍膜在三種不同中介層（純鈦、氮化鈦及碳化鈦）上的性質比較；第二部份選用較佳的中介層作為基底，濺鍍含鎢元素的碳氮鍍層，其中，鎢靶電流設定在0到0.9安培之間；最後，選取前兩階段較佳的鍍層參數，於市售拋棄式車刀與微鑽針上濺鍍，並分別進行車削與鑽削實驗，分析探討各鍍層對於刀具性能及壽命的影響。實驗內容方面，鍍層表面型態利用電子顯微鏡進行觀測；鍍層化學組成及縱向成份分析利用X光繞射分析、拉曼光譜分析和輝光放電分光分析；鍍膜機械性質則利用奈米壓痕硬度機、洛氏壓痕附著性分析；鍍膜磨潤性質利用Pin-on-Disk迴轉氏磨耗試驗機分析其自潤性和磨耗壽命。
實驗結果得到一系列氮含量約30 at%的碳氮鍍膜，鎢含量則在0到9 at%之間，鍍膜硬度落在15到20GPa之間。其中，我們發現漸進中介層Ti/TiC對於碳氮鍍膜附著性相當好，而附著性等級越高的鍍膜也同時具備較強的耐磨耗性，然而鍍膜硬度並不會隨著鎢元素含量增加而提昇。鍍層皆具有相當低的摩擦係數（0.01-0.3），同時磨耗率最低可以達到1.4x10-6 mm3/Nm。最後，CN/TiC鍍膜在車刀以及微鑽針切削試驗當中可以減少41％及43%的刀腹磨耗量。

This thesis studies the mechanical and tribological properties of tungsten-doped carbon nitride coating deposited by unbalanced DC magnetron sputtering using nitrogen-argon mixture gas. We first deposited the carbon nitrite coating on three different types of interlayer—Ti, Ti/TiN, and Ti/TiC—and chose the interlayer with the best tribological properties as the basis to study the optimal coating parameters (the tungsten target current varied from 0 to 0.9 A.). For the mechanical properties, we measured the surface morphology with roughness testing and scanning electron microscopy, analyzed the chemical composition and depth profile with X-ray diffraction analysis, Raman spectroscopy, and glow discharge spectroscopy, and tested the hardness and elasticity with nano-indentation and Rockwell indentation test; for the tribological properties, we tested properties of self-lubrication and the wear life with a pin-on-disk tribometer. With the optimal parameters, we finally coated the tungsten-doped carbon nitride on commercial tuning inserts and micro-drillers and analyzed its impact on cutting performance and tool life by cutting and drilling test. The results show all the coatings are amorphous, with thickness around 1.5 µm. These coatings contain nitrogen approximately 30 at% and tungsten 0-9 at%; the hardness ranges from 15 to 20 GPa. In particular, the wear resistance correlates well with the indentation adhesion level, but the hardness correlates little with the tungsten content. Moreover, the coating deposited on Ti/TiC interlayer has greater adhesion. These coatings have low friction coefficient (0.01-0.3) and little wear coefficient (10-6 mm3/Nm): in the cutting test, the CN/TiC coating reduced 41% and 43% of flank wear of turning inserts and micro-drillers, respectively.

[1] A. Matthews, S.S. Eskildsen, “Engineering applications for diamond-like carbon”, Diamond Relat. Mater.3 (1994) 902-911
[2] J. Guettler, J. Reschke, “Metal-carbon layers for industrial application in the automotive industry”, Surf. Coat. Technol. 60 (1993) 531-535
[3] D.P. Monaghan, D.G. Teer, P.A. Logan, I. Efeoglu, R.D. Arnell, “Deposition of wear resistant coatings based on diamond like carbon by unbalanced magnetron sputtering”, Surf. Coat. Technol. 60 (1993) 525-530
[4] W.D. Sproul and M.H. Richman, “Effect of the eta layer on TiC‐coated, cemented‐carbide tool life”, J. Vac, Sci. Technol. 12 (1975) 842
[5] D. J. Cheng, W.P. Sun, M.H. Hon, “The morphology and structure of chemically vapour-deposited Ti(C,N) coatings”, Thin Solid Films 146 (1987) 45-53
[6] B.E. Jacobson, C.V. Deshandey, H.J. Doerr, A.A. Karim, R.F. Bunshah, “Microstructure and hardness of Ti(C,N) coatings on steel prepared by the activated reactive evaporation technique”, Thin Solid Films 118(1984) 285-292
[7] A.Y. Liu, M.L. Cohen, “Prediction of New Low Compressibility Solids”, Sci. 245 (1989) 841
[8] R. Waesche, M. Hartelt, U. Springborn, K. Bewilogua, M. Keunecke, “Wear of carbon nitride coatings under oscillating sliding conditions”, Wear 269 (2010) 816-825
[9] T. Hayashi, A. Matsumuro, M. Muramatsu, M. Kohzaki, K. Yamaguchi, “Wear resistance of carbon nitride thin films formed by ion beam assisted deposition”, Thin Solid Films 376 (2000) 152-158
[10] P. Wang, M. Hirose, Y. Suzuki, K. Adachi, ” Carbon tribo-layer for super-low friction of amorphous carbon nitride coatings in inert gas environments”, Surf. Coat. Technol. 221 (2013) 163-172
[11] W.T. Zheng, N. Hellgren, H. Sjoestroem, J.-E. Sundgren, “Characterization of carbon nitride thin films deposited by reactive D.C. magnetron sputtering on various substrate materials”, Surf. Coat. Technol. 100-101 (1998) 287-290
[12] W. Zheng, H. Ji, W. Yu, H. Li, Z. Jin, Y. Wang, J.E. Sundgren, ”Structure and properties of carbon nitride films deposited by magnetron sputtering”, Mater. Chem. Phys. 60 (1999) 163-167
[13] J. Takadoum, J.Y. Rauch, J.M. Cattenot, N. Martin, “Comparative study of mechanical and tribological properties of CNx and DLC films deposited by PECVD technique”, Surf. Coat. Technol. 174-175 (2003) 427-433
[14] K. Kato, M. Bai, N. Umehara, Y. Miyake, “Effect of internal stress of CNx coating on its wear in sliding friction”, Surf. Coat. Technol. 113 (1999) 233-241
[15] Y.S. Park, H.S. Myung, J.G. Han, B. Hong, “Characterization of CNx thin films prepared by close field unbalanced magnetron sputtering”, Thin Solid Films 475 (2005) 298-302
[16] N.A. de Sanchez, C. Carrasco, P. Prieto, “Effect of nitrogen content on the microstructure and mechanical properties of CNx thin films”, Phys. B 337 (2003) 318-322
[17] A.G. Fitzgerald, L. Jiang, M.J. Rose, T.J. Dines, “Microstructural properties of amorphous carbon nitride films synthesized by dc magnetron sputtering”, Appl. Surf. Sci. 175-176 (2001) 525-530
[18] C. Niu, Y.Z. Lu, C.M. Lieber, “Experimental realization of the covalent solid carbon nitride”, Sci. 261 (1993) 334
[19] D.G. Liu, J.P. Tu, H. Zhang, R. Chen, C.D. Gu, “Microstructure and mechanical properties of carbon nitride multilayer films deposited by DC magnetron sputtering”, Surf. Coat. Technol. 205 (2011) 3080-3086
[20] A.K.M.S. Chowdhury, D.C. Cameron, M.S.J.Hashmi, “Adhesion of carbon nitride thin films on tool steel”, Surf. Coat. Tech. 116-119 (1999) 46-53
[21] D. Sarangi, R. Sanjines, A. Karimi, “Enhancement of the mechanical properties of the carbon nitride thin films by doping”, Carbon 42 (2004) 1107-1111
[22] A. Nossa, A. Cavaleiro, “The influence of the addition of C and N on the wear behaviour of W-S-C/N coatings”, Surf. Coat. Technol. 142-144 (2001) 984-991
[23] C.M. Cotrut, V. Braic, M. Balaceanu, I. Titorencu, M. Braic, A.C. Parau, “Corrosion resistance, mechanical properties and biocompatibility of Hf-containing ZrCN coatings”, Thin Solid Films 538 (2013) 48-55
[24] A.E. Reiter, B. Brunner, M. Ante, J. Rechberger, “Investigation of several PVD coatings for blind hole tapping in austenitic stainless steel”, Surf. Coat. Technol. 200 (2006) 5532-5541
[25] V. Derfilinger, J. Braendle, H. Zimmermann, “New hard/lubricant coating for dry machining”, Surf. Coat. Technol. 113 (1999) 286-292
[26] A.C. Ferrari, J. Robertson, “Interpretation of Raman spectra of disordered and amorphous carbon”, Phys. Rev. B 61 (2000) 14095
[27] A.C. Ferrari, “Determination of bonding in diamond-like carbon by Raman spectroscopy”, Diamond Relat. Mater. 11 (2002) 1053-1061
[28] T. Arai, H. Fujita, M. Watanabe, “Evaluation of adhesion strength of thin hard coating”, Thin Solid Films, 154 (1987) 387-401
[29] C.W. Sung, “The oxidation resistance and tribolodical performance of tungsten/ aluminum coatings”, Master thesis, National Cheng Kung University (2013) 20-24
[30] Y. Kusano, J.E. Evetts, R.E. Somekh, I.M. Hutchings, “Properties of carbon nitride films deposited by magnetron sputtering”, Thin Solid Films 332 (1998) 56
[31] S.Y. Lee, G.S. Kim, J.H. Hahn, “Effect of the Cr content on the mechanical properties of nanostructured TiN/CrN coatings”, Surf. Coat. Technol. 177-178 (2004) 426-433
[32] T.Y. Tsui, G.M. Pharr, W.C. Oliver, C.S. Bhatia, R.L. White, S. Anders, A. Anders, I.G. Brown, “Nanoindentation and nanoscratching of hard carbon coatings for magnetic dicks”, Mater. Res. Soc. 383 (1995) 447-452