本研究提出一種創新的方法，利用中空滾筒的內曲面黃光微影方式，製作出具無接縫微結構之滾印模仁，用於快速和連續地滾印微結構至基材上。首先以自行開發之內滾筒氣旋塗佈系統，於中空滾筒內部塗佈上一層均勻的厚膜光阻 ( AZ P4903 )；接著以可撓性之塑膠光罩於滾筒內部進行曲面的黃光微影製程。為了達到曝光出來之圖形具無接縫，本研究採取二種曝光方式: 一種為中空滾筒以角度步階旋轉曝光；另一種則為中空滾筒連續旋轉曝光。中空滾筒經曝光完後再經過顯影硬烤，即可得到具有無接縫光阻微結構之中空滾筒母模，最後再以此母模利用灌注高分子材料PDMS或是電鑄鎳的方式於中空滾筒內部翻製出具無微結構之滾印模仁。

This thesis develops an innovative way of using inner cylindrical surface photolithography to create a seamless roller imprinting mold which can be used to fabricate micro-structure on substrates in a roll-to-roll process. Firstly, a layer of photo-resist (PR) is spin-coated on the inner cylindrical surface of hollow cylinder by an air ring PR coating system. Secondly, a flexible plastic mask in applied for transferring designed patterns to the coated PR layer. In order to achieve seamless pattern transfer, we adopt two kinds of exposure method: one is to repeatedly expose a line-shape pattern step by step by rotating the cylinder with an incremental rotation angle; and another is to expose one pattern with continuous rotating. After the UV exposing process, the hollow cylinder is then thermally baked in the oven. After developing we can obtain a master mold with seamless micro-structures on the inner cylindrical surface. Finally, the patterns and micro-structures are replicated by pouring PDMS solution into the master mold or electroforming a nickel layer. The obtained roller molds can be used in the roll-to-roll imprinting process.

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