壓電致動器因具微米尺度位移能力與體積精巧等特性而被廣泛應用於精密機械產業的領域中。然而，就壓電式致動器目前無論於產品應用或實驗上之使用情況看來，因其天生於特性上具高度非線性遲滯行為及外界環境中微小干擾等都會對其微米尺度之控制性能造成極大之影響而導致定位精準度的大幅降低。為了消除上述元件內部行為特性與外在環境因素對壓電致動器微米定位之影響，本研究嘗試藉數理分析與非現控制器設計等設計概念，對微米定位等級的壓電致動器之運動行為進行微米控制設計。本論文結合了非線性 feedback linearization method與強健控制之方法來設計具抑制外擾及遲滯特性之壓電式致動器控制器。本研究除理論上之嚴謹分析外並結合模擬技巧進行實際驗證前之參數選取。最終，本論文將此控制理論實現並且應用於實際的壓電致動器微米定位控制上並獲致良好之定位成果。

Due to the developments of precision industrial machineries, the microscale positioning ability for the relative apparatus requires small size and high accuracy, and the piezoelectric actuator is one of means has this feature hence piezoelectric actuator plays an important role in this field for its microscale movement ability. Unfortunately, the nonlinear hysteresis phenomenon of piezoelectric materials, modeling uncertainties of piezoelectric actuators, and external disturbance of the outside environment lead to control difficulties and strongly reduce the positioning accuracy of piezoelectric actuators. Based on the above reasons, a novel control design combined with feedback linearization and robust control concepts are proposed for dealing with the micrometer (μm) positioning problem of piezoelectric actuators.
From the simulation results, it is obvious that our proposed control law yields the excellent control performance than the conventional control designs. Finally, this proposed method is practically performed for the verification of positioning performance. After the practical testing, the controlled piezoelectric actuator possesses a positioning accuracy of 1 μm

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