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研究生： 蔡賢治
Tsai, Sian-jhih
論文名稱： 經高溫氧化之添加鋁元素鉻薄膜磨潤性能研究
Tribological performance of chromium films with aluminum doping after high temperature oxidation treatment
指導教授： 蘇演良
Su, Yan-liang
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2008
畢業學年度： 96
語文別： 中文
論文頁數： 80
中文關鍵詞： 鉻 、磨潤性能研究 、鉻薄膜 、高溫氧化 、鋁
外文關鍵詞： tribological, oxidation, chromium film, aluminum, high temperture oxidation treatment
相關次數： 點閱：74  下載：2 
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    • 本研究利用封閉式非平衡磁控濺鍍系統，不同鉻、鋁靶電流將Cr-Al鍍膜披覆於高速鋼、矽晶片、捨棄式車刀及微鑽針上，探討添加鋁元素之鉻鍍膜於高溫氧化前後之機械及磨潤性能。實驗主要分為：第一探討不同鉻、鋁含量比例對於Cr-Al鍍膜機械及磨潤性能之影響；第二探討600℃1小時氧化處理對Cr-Al鍍膜機械及磨潤性能之影響；第三探討不同溫度氧化處理對於Cr-Al鍍膜機械及磨潤性能之影響；最後探討鍍膜在車刀及微鑽針上的實際應用。
    實驗結果可發現，CrAl-2鍍膜(Al/Cr比為0.3)擁有較好的硬度HK25g 1274.5及最好的耐磨耗性。CrAl-2鍍膜經600℃1小時氧化處理後，在表面形成Cr2O3及Al2O3，使硬度提升至HK25g 1355，並且提升鍍膜附著性及耐磨耗性。由實際乾車削、鑽削實驗結果可得知，經高溫氧化(600℃1小時)之CrAl-2鍍膜能有效降低車刀及鑽針的磨耗量，可降低車刀刀腹磨耗(VB)71%、鑽針刀腹磨耗(Flank wear)57％，刀角磨耗(corner wear)71%及直徑磨耗(Diameter wear)81%。

    In this study, Cr-Al coatings were deposited on JIS SKH51 disks, Si (100) wafers, micro-drills and indexable inserts from one aluminum and tree chromium targets using Closed Field Unbalanced Magnetron (CFUBM) sputtering system. The main purpose of this study is to research the mechanical and tribological properties and cutting performance of the Cr-Al coatings before and after high temperature oxidation. The experiment was divided into three stages. In the first two stages, the ratio of chromium and aluminum contents (Al/Cr) and the effect of one hour oxidation treatment at 600 ℃ on the mechanical and tribological properties of the Cr-Al coatings was investigated, respectively. In the third stage, the effect of oxidation treatment at different temperature on the mechanical and tribological properties of Cr-Al coatings was investigated. Finally, the actual cutting performances of the optimal coatings were understood in the turning and micro-drilling tests.
    The results reveal that the better hardness of HK25g 1274 and the best resistance were performed by the Cr-Al (Al/Cr=0.3) coatings. The hardness of Cr-Al(Al/Cr=0.3) coatings after 600℃ and one hour oxidation treatment increased to HK25g 1355. The wear resistance and adhesion performance of the Cr-Al coatings improve apparently after oxidation. It could be attributed to the forming of Cr2O3 and Al2O3 at the surface.
    In actually turning and micro-drilling tests, the flank wear of inserts, and flank wear, corner wear, and diameter wear of the drillings on Cr-Al(Al/Cr=0.3) coated onces with 600℃ and one hour oxidation treatment can be reduced about 71 % , 53％, 71％, and 81％, respectively.

    總目錄 考試合格證明書 I 摘要 II Abstract III 誌謝 IV 總目錄 V 表目錄 VIII 圖目錄 IX 第一章 緒論 1 1-1 前言 1 1-2 研究動機 3 第二章 理論探討與文獻回顧 4 2-1薄膜成形 4 2-1-1 薄膜成形技術[X1X] 4 2-1-2 薄膜成形技術的用途 4 2-1-3 薄膜成形技術的種類 5 2-2濺鍍理論 6 2-2-1直流濺鍍原理 6 2-2-2磁控濺鍍 8 2-3 鉻系鍍膜介紹 9 第三章 實驗方法與步驟 11 3-1實驗目的 11 3-2實驗流程 11 3-3 實驗方法與規劃 12 3-3-1 濺鍍參數與鍍膜安排 12 3-3-2 實驗材料 12 3-3-3 成分分析 13 3-3-4 結構分析 14 3-3-5 硬度試驗 14 3-3-6 附著性試驗 14 3-3-7 磨耗實驗 15 3-3-8 高溫氧化實驗 15 3-3-9 車削實驗 16 3-3-10 鑽削實驗 17 3-3-11 表面、斷面和磨耗型態分析 18 3-4 實驗設備 18 第四章 Cr-Al、Cr-Al-O鍍膜實驗結果與討論 20 4-1 鉻、鋁含量的改變對Cr-Al鍍膜的影響 20 4-1-1 鍍膜基本性質 20 4-1-1-1 成分分析 20 4-1-1-2 鍍膜硬度 20 4-1-1-3 鍍膜微結構 20 4-1-1-4 鍍膜表面及斷面SEM觀察 21 4-1-2 鍍膜附著性 21 4-1-2-1 壓痕試驗 21 4-1-2-2 刮痕試驗 22 4-1-3 SRV磨耗試驗 22 4-1-4 小結 23 4-2 600℃持溫1小時氧化對Cr-Al鍍膜的影響 23 4-2-1鍍膜基本性質 24 4-2-1-1 鍍膜微結構 24 4-2-1-2 鍍膜硬度 24 4-2-1-3 鍍膜表面及斷面SEM觀察 24 4-2-2 鍍膜附著性 25 4-2-2-1 壓痕試驗 25 4-2-2-2 刮痕試驗 25 4-2-3 SRV磨耗試驗 25 4-2-4 小結 26 4-3不同溫度氧化CrAl-2鍍膜之實驗結果與討論 26 4-3-1 鍍膜基本性質 26 4-3-1-1 鍍膜硬度 26 4-3-1-2 鍍膜微結構 27 4-3-1-3 鍍膜表面及斷面SEM觀察 27 4-3-2 鍍膜附著性 27 4-3-2-1 壓痕試驗 27 4-3-2-2 刮痕試驗 28 4-3-3 SRV磨耗試驗 28 4-3-4 小結 29 4-4乾車削實驗 30 4-5鑽削實驗 31 第五章 結論與未來展望 32 5-1 結論 32 5-2 未來展望 33 第六章 參考文獻 34 自述 80 表目錄 Table3- 1 Deposition parameters of Cr-Al coatings 38 Table3- 2 Chemical composition (wt. %) of AISI 1045 cylinder, JIS SKH51 disk and AISI 52100 ball 38 Table3- 3 SRV wear test parameters 38 Table3- 4 Oxidation experimental detail for Cr-Al coatings 39 Table3- 5 Oxidation experimental detail for Cr-Al-2 coatings 39 Table4- 1 The elemental composition of Cr-Al coatings 39 Table4- 2 Indentation fracture level of Cr-Al coatings(oxidation treatment 600℃ 60min) 40 Table4- 3 Indentation fracture level of Cr-Al coatings after oxidation treatment (different temperature and duration) 40 Table4- 4 SRV wear test parameters 40 Table4- 5 The parameters of Ht6-2 40 圖目錄 圖2- 1 薄膜形成技術種類[1] 41 圖2- 2 典型直流鍍膜系統構造示意圖 42 圖2- 3 輝光放電示意圖 43 圖2- 4 傳統磁控與非平衡磁控濺鍍示意圖 43 圖3- 1 流程圖 44 圖3- 2 KD-550U封閉是非平衡磁控濺鍍系統(主腔體) 45 圖3- 3 KD-550U封閉是非平衡磁控濺鍍系統(控制系統) 45 圖3- 4 KD-550U封閉式非平衡磁控濺鍍系統(腔體內部構造示意圖) 46 圖3- 5壓痕破裂型態示意圖 46 圖3- 6刮痕測試機台示意圖 47 圖3- 7 (a) SRV磨耗測試機 (b) 下試件磨耗類型（點磨） 48 圖3- 8 車刀磨耗型態及切削性能評估準則示意圖 49 圖3- 9 PWB微鑽孔實驗示意圖(a) 實驗架構示意圖(b) 實驗參數 50 圖3- 10 FR-4雙面板之單層疊構圖 51 圖3- 11 微鑽針磨耗評估準則 51 圖4- 1 Cr-Al鍍膜之鉻、鋁含量比與鍍膜關係(EDS分析) 52 圖4- 2 Cr-Al鍍膜之鉻、鋁含量比與硬度關係(基材JIS SKH51) 52 圖4- 3 Cr-Al鍍膜之XRD繞射圖 53 圖4- 4 Cr-Al原材及600℃氧化1小時之鍍膜斷面SEM圖 54 圖4- 5 Cr-Al原材及600℃氧化1小時之鍍膜表面SEM圖 56 圖4- 6原材及600℃1小時氧化鍍膜表面粗糙度比較 57 圖4- 7 Cr-Al原材及600℃1小時氧化之鍍膜壓痕SEM圖 58 圖4- 8 Cr-Al鍍膜刮痕試驗結果 60 圖4- 9 Cr-Al原材及600℃1小時氧化之鍍膜刮痕破裂示意圖(基材 SKH51-光學顯微鏡放大200倍) 61 圖4- 10 Cr-Al鍍膜之SRV點磨耗試驗結果（load =10N, 1min） 62 圖4- 11 Cr-Al鍍膜經600℃1小時氧化之XRD繞射圖 63 圖4- 12原材及600℃1小時氧化Cr-Al鍍膜硬度值(load =25g) 64 圖4- 13 原材及600℃1小時氧化Cr-Al鍍層刮痕試驗結果比較 64 圖4- 14 原材及600℃1小時氧化Cr-Al鍍膜SRV摩耗試驗結果比較(load =10N ,1min) 65 圖4 - 15 原材及600℃1小時氧化鍍膜SRV摩擦係數比較(load =10N ,1min) 65 圖4- 16 不同氧化溫度之CrAl-2鍍膜硬度值 66 圖4- 17 不同氧化溫度之Cr-Al鍍膜XRD繞射圖 67 圖4- 18 不同氧化溫度之Cr-Al鍍膜表面及斷面SEM圖 68 圖4- 19不同氧化溫度之CrAl-2鍍膜表面粗糙度 69 圖4- 20 不同氧化溫度之Cr-Al鍍膜壓痕試驗結果 70 圖4- 21 不同氧化溫度之CrAl-2鍍膜刮痕試驗結果 71 圖4- 22 不同溫度氧化之CrAl-2鍍膜刮痕破裂示意圖(利用光學顯微鏡200倍觀察) 71 圖4- 23 不同氧化溫度之CrAl-2鍍膜SRV磨耗試驗結果((load =10N, 1min) 72 圖4- 24 H3(600℃)鍍膜GDOS縱深分析結果 72 圖4- 25 H3(600℃)鍍膜腐蝕前SRV磨痕形貌(與鉻鋼球對磨-點磨) 73 圖4- 26 H3(600℃)鍍膜腐蝕後SRV磨痕形貌(與鉻鋼球對磨-點磨) 73 圖4- 27 H2(500℃)及H3(600℃)鍍膜SRV磨耗試驗結果(load =10N, 2min) 74 圖4- 28 H2(500℃)及H3(600℃)鍍膜腐蝕後SRV磨痕形貌(與鉻鋼球對磨-點磨) 75 圖4- 29 乾車削實驗結果 76 圖4- 30 H3(600℃)鍍膜披覆於車刀之刀腹磨耗EDS分析 76 圖4- 31車刀刀腹磨耗圖(利用光學顯微鏡放大200倍觀察) 77 圖4- 32鑚削實驗結果 78 圖4- 33 H3(600℃)鍍膜披覆於鑽針之刀腹、刀角磨耗EDS分析 78 圖4- 34 鑚針刀腹及刀角磨耗SEM圖 79

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