熱電式能源採集晶片可以將裝置的熱端與冷端之間的溫差直接轉換為可用的電能，進而能夠將環境中多餘的廢熱轉換為可用的電能。本研究提出整合於 TSMC 矽鍺互補式金屬氧化物半導體製程設計與製作之微型化矽鍺熱電式能源採集晶片，其面積為 。除了元件的結構設計之外再搭配適當的後製程步驟以製作可以提升能源採集器性能的熱隔離空腔，並以實驗量測加以探討不同尺寸的熱電偶對於能源採集器性能的影響。研究結果顯示最佳熱電偶尺寸為長度45μm、寬度2μm，其輸出電壓為60.62mV，voltage factor為23.53 V/cm2K ；單位面積280μm*92μm下之電阻為9.45MΩ，其中包含了63組熱電偶。

Thermoelectric energy harvester chip converts temperature difference between hot and cold junctions into electric energy. This thesis aims at studying a thermoelectric energy harvester chip of by TSMC 0.18μm SiGe BICMOS 3P6M process. By measuring micro thermoelectric energy generator (μTEG) performance and investigating the optimal thermoleg size, it is shown that the TEG chip with thermoleg length = 45μm and width = 2μm has the best performance of output voltage 60.62mV with voltage factor 23.53 V/cm2K. The resistance is 9.45MΩ, and one unit-cell (280μm*92μm) contains 63 thermocouples. Thermoelectric energy harvester chip presented in this work consists of isolative cavity and support structure to improve the performance.

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