半導體高科技產業自1980年起已成為國內最重要的經濟活動項目之一，其製程中常使用到具危害性的特殊氣體，當氣體外洩導致災害，輕則造成員工虛驚恐慌、影響產品良率或損失金錢及商譽；嚴重者，導致人員傷亡、廠房損毀，使公司面臨無法經營，甚至於破產之困境。有鑒於此，為了使事故危害及損失降低，本研究探討半導體廠相關氣體外洩的潛在危害、特性及防護措施，提出半導體廠針對氣體外洩預防、防護、緊急應變及災後復原之策略模式，並透過近年半導體相關產業重大氣體外洩事故災例，歸納其發生原因並提出改善建議，檢討其防災管理缺失。在氣體外洩預防方面，完善的氣體供應系統安全設計，建立危害辨識與風險評估機制，導入教育訓練與有效的安全管理，且藉由內部稽核查證及外部第三單位驗證稽核，將有效降低氣體外洩之風險。在氣體外洩安全防護方面，以氣體監控系統(Gas Monitor System)完整涵蓋作業區域，輔以緊急排氣系統(Calamity System) 、氣瓶櫃(Gas Cabinet)及調壓盤(Valve Manifold Box)的強化隔離、設定氣體外洩自動語音疏散廣播等，使氣體外洩時能早期警報，並藉相關防護系統將外洩之氣體阻絕或排除，將氣體外洩所造成之影響降至最低。在緊急應變方面，建立緊急應變計畫、緊急應變組織及、運作流程，加上外部支援，災後復原程序，可免於意外事故發生時損失持續擴大。本研究希望藉提出之策略模式，協助半導體廠進行氣體外洩防災管理，期將災害風險或損失降至最低。

High-tech semiconductor industries since 1980 have become one of the most important economic activities in the world and in particular in Taiwan. The manufacturing processes for making semiconductor’s related products often use many special hazardous gases. When the gas leakage led to disasters, it will result in staff nervous, effect on production schedule, loss of goodwill, and financial affair. Affected market will incur casualties, factory damage, companies would go under, and even bankruptcy straits. Thus, the purpose of this research is to analyze and explore the potential harm of special gas leaks, characteristics, and then propose some protection measures to be employed in semiconductor industries so as to reduce the disaster rate to some extent, and to provide risk management protocols for prevention, protection, emergency response and disaster recovery for the gas leaking. This study starts with literatures review regarding recent semiconductor-related industries’ gas leakage disaster cases with accidents, then summed up the causes and makes suggestions for improvement, examine the disaster prevention and management deficiencies. In the gas leakage prevention, it is suggested to conduct the following actions: (1) to improve the safety design criteria of the gas supply system; (2) to establish hazard Identification and risk assessment mechanisms; (3) to implement education, training and effective safety management. Moreover, the internal audit and external verification audit authenticated by the third party should also be implemented to reduce the risk of gas leakage. As for the protection aspects of the gas leakage, it is listed as (1) the gas monitoring system should cover the complete operating region, supplemented by calamity system, and gas cylinder cabinets and the valve manifold box enhance isolation; (2) to set up automatic voice broadcasting announcing evacuation system as the gas leak early warning and block or eliminate the gas leak by the relevant protection system. The gas leakage caused damage will be reduced. In terms of emergency response, it is suggested to (1) establish emergency response plans; (2) establish emergency response organization and operational processes; (3) combined with external support; (4) disaster recovery procedures. This can avoid the accident loss continuously to expand. The results from this research can be used as a reference guideline for the semiconductor high-tech industry to implement leakage of hazard gas disaster management and lower the loss as minimum as possible when accidents or disasters take place.

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