科技日新月異，使得人類對於雷射的需求越來越多元，近年來最重要的需求便追求小尺寸雷射元件以達到更快的反應速度、更低的能耗、更高的效率以及更多的應用場域。雖然目前的雷射製程技術已經相當成熟可以製作出微米尺寸的雷射元件，但是傳統的半導體雷射元件體積受制於光學繞射極已無法再進一步縮減元件體積；為滿足雷射的回饋機制，雷射共振腔的長度要符合發光波長的半整數倍，才可以符合出雷射共振腔條件。由於大部分的光學增益材料其發光波長約在數百奈米至數微米之間，使得雷射共振腔的體積無法縮減至數個奈米。近年有研究團隊利用表面電漿子共振取代光學共振腔，從而突破光學上的繞射極限產生出只有數十奈米長的奈米雷射。 其概念是將存在於金屬與絕緣體間的表面電漿波與半導體中的激子耦合，產生表面電漿極化子。由於表面電漿極化子的波長遠小於可見光波長，因此可以在極小的空間內完成共振放大，並藉由表面散射機制耦合出雷射光。因此，透過適當的條件設計表面電漿共振腔，可有效縮減雷射的總體積。 過去本實驗室利用懸空法克服了表面電漿子雷射高損耗問題，同時利用懸空技術實現了可轉移的表面電漿子雷射元件，但舊有的轉移技術限制了金屬層的厚度並且有低良率問題。故此本實驗專注在利用新的轉移技術，將金屬層的厚度縮小挑戰表面電漿子雷射的理論體積極限以及提高懸空表面電漿子雷射的良率。同時，本實驗成功將表面電漿子雷射元件轉移到葉子的表面，以證明懸空技術可以轉移雷射元件以及應用在生物體的可行性，以期未來將雷射元件植入生物細胞內,達成生醫感測應用。最後，本研究利用有限元素分析以及熱傳導實驗證明無基板元件的熱傳比有基板的雷射元好，可做為未來設計表面電漿子雷射的參考。

This thesis mainly discusses the fractionation and heat transfer of substrate-free surface plasmon polariton (SPP) laser, which breaks the diffraction limit. Through experiment, we confirmed that a substrate-free system could effectively release heat to the surrounding. We improved the technique of suspending metal layers on printed circuit boards (PCBs) and successfully minimized the thickness of the aluminum layer to 20 nm. Then, we used laser cutting to cut a piece of an aluminum film containing ZnO nanowires onto the leaf surface and successfully achieved substrate-free SPP laser operation. Finally, we simulated the heat transfer between the substrate and the substrate-free system by the finite element method and confirmed the difference experimentally.

[1] A. Otto, “Excitation of nonradiative surface plasma waves in silver by the method of frustrated total reflection,” Zeitschrift für Physik A Hadrons and nuclei, vol. 216, no. 4, pp. 398–410, 1968.
[2] R. H. Ritchie, E. Arakawa, J. Cowan, and R. Hamm, “Surface-plasmon resonance effect in grating diffraction,” Physical review letters, vol. 21, no. 22, p. 1530, 1968.
[3] TSMC, “TSMC Annual Report 2021,”https://investor.tsmc.com/sites/ir/annualreport/2021/20212021.
[4] G. E. Moore, “Cramming more components onto integrated circuits, reprinted from electronics, volume 38, number 8, april 19, 1965, pp.114 ff.” IEEE Solid-State Circuits Society Newsletter, vol. 11, no. 3, pp. 33–35, 2006.
[5] D. Miller, “Rationale and challenges for optical interconnects to electronic chips,” Proceedings of the IEEE, vol. 88, no. 6, pp. 728–749, 2000.
[6] M. Born, E. Wolf, A. B. Bhatia, P. C. Clemmow, D. Gabor, A. R. Stokes, A. M. Taylor, P. A. Wayman, and W. L. Wilcock, Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light, 7th ed. Cambridge University Press, 1999.
[7] E. I. Galanzha, R. Weingold, D. A. Nedosekin, M. Sarimollaoglu, J. Nolan, W. Harrington, A. S. Kuchyanov, R. G. Parkhomenko, F. Watanabe, Z. Nima et al., “Spaser as a biological probe,” Nature communications, vol. 8, no. 1, pp. 1–7, 2017.
[8] R. F. Oulton, V. J. Sorger, T. Zentgraf, R.-M. Ma, C. Gladden, L. Dai, G. Bartal, and X. Zhang, “Plasmon lasers at deep subwavelength scale,” nature, vol. 461, no. 7264, pp. 629–632, 2009.
[9] M. Noginov, G. Zhu, A. Belgrave, R. Bakker, V. Shalaev, E. Narimanov, S. Stout, E. Herz, T. Suteewong, and U. Wiesner, “Demonstration of a spaser-based nanolaser,” Nature, vol. 460, no. 7259, pp. 1110–1112, 2009.
[10] M. T. Hill, M. Marell, E. S. Leong, B. Smalbrugge, Y. Zhu, M. Sun, P. J. Van Veldhoven, E. J. Geluk, F. Karouta, Y.-S. Oei et al., “Lasing in metal-insulator-metal subwavelength plasmonic waveguides,” Optics express, vol. 17, no. 13, pp. 11 107–11 112, 2009.
[11] S.-W. Chang, T.-R. Lin, and S. L. Chuang, “Theory of plasmonic fabry-perot nanolasers,” Optics Express, vol. 18, no. 14, pp. 15 039–15 053, 2010.
[12] I. Guide, “Comsol multiphysics,” 5.6, COMSOL AB, pp. 204–8, 1998.
[13] X. Cao, C. Jiang, D. Tan, Q. Li, S. Bi, and J. Song, “Recent mechanical processing techniques of two-dimensional layered materials: A review,” Journal of Science: Advanced Materials and Devices, vol. 6, no. 2, pp. 135–152, 2021.
[14] A. C. Tamboli, E. D. Haberer, R. Sharma, K. H. Lee, S. Nakamura, and E. L. Hu, “Room-temperature continuous-wave lasing in gan/ingan microdisks,” Nature photonics, vol. 1, no. 1, pp. 61–64, 2007.
[15] M. H. Huang, S. Mao, H. Feick, H. Yan, Y. Wu, H. Kind, E. Weber, R. Russo, and P. Yang, “Room-temperature ultraviolet nanowire nanolasers,” science, vol. 292, no. 5523, pp. 1897–1899, 2001.
[16] F. Van Beijnum, P. J. Van Veldhoven, E. J. Geluk, M. J. de Dood, W. Gert, and M. P. Van Exter, “Surface plasmon lasing observed in metal hole arrays,” Physical review letters, vol. 110, no. 20, p. 206802, 2013.
[17] M. A. Zimmler, J. Bao, F. Capasso, S. Müller, and C. Ronning, “Laser action in nanowires: Observation of the transition from amplified spontaneous emission to laser oscillation,” Applied Physics Letters, vol. 93, no. 5, p. 051101, 2008.
[18] M. Khajavikhan, A. Simic, M. Katz, J. Lee, B. Slutsky, A. Mizrahi, V. Lomakin, and Y. Fainman, “Thresholdless nanoscale coaxial lasers,” Nature, vol. 482, no. 7384, pp. 204–207, 2012.
[19] M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, “Room-temperature subwavelength metallo-dielectric lasers,” Nature Photonics, vol. 4, no. 6, pp. 395–399, 2010.
[20] W. L. Barnes, A. Dereux, and T. W. Ebbesen, “Surface plasmon subwavelength optics,” nature, vol. 424, no. 6950, pp. 824–830, 2003.
[21] R.-M. Ma, R. F. Oulton, V. J. Sorger, G. Bartal, and X. Zhang, “Room-temperature subdiffraction- limited plasmon laser by total internal reflection,” Nature materials, vol. 10, no. 2, pp. 110–113, 2011.
[22] Y.-J. Lu, J. Kim, H.-Y. Chen, C. Wu, N. Dabidian, C. E. Sanders, C.-Y. Wang, M.-Y. Lu, B.-H. Li, X. Qiu et al., “Plasmonic nanolaser using epitaxially grown silver film,” in CLEO: Science and Innovations. Optica Publishing Group, 2012, pp. CTh5C–7.
[23] V. Garg, B. S. Sengar, V. Awasthi, P. Sharma, C. Mukherjee, S. Kumar, S. Mukherjee et al., “Localized surface plasmon resonance on au nanoparticles: tuning and exploitation for performance enhancement in ultrathin photovoltaics,” RSC advances, vol. 6, no. 31, pp. 26 216–26 226, 2016.
[24] A. Amirjani and D. F. Haghshenas, “Ag nanostructures as the surface plasmon resonance (spr)˗ based sensors: a mechanistic study with an emphasis on heavy metallic ions detection,” Sensors and Actuators B: Chemical, vol. 273, pp. 1768–1779, 2018.
[25] C. Langhammer, M. Schwind, B. Kasemo, and I. Zoric, “Localized surface plasmon resonances in aluminum nanodisks,” Nano letters, vol. 8, no. 5, pp. 1461–1471, 2008.
[26] A. Goetzberger and W. Greube, “Solar energy conversion with fluorescent collectors,” Applied physics, vol. 14, no. 2, pp. 123–139, 1977.
[27] H. Suzuki, “Organic light-emitting materials and devices for optical communication technology,” Journal of Photochemistry and Photobiology A: Chemistry, vol. 166, no. 1-3, pp. 155–161, 2004.
[28] B. Jacquier, E. Lebrasseur, S. Guy, A. Belarouci, and F. Menchini, “Rare earth-doped confined structures for amplifiers and lasers,” Journal of alloys and compounds, vol. 303, pp. 207–213, 2000.
[29] Y.-H. Chou, K.-B. Hong, C.-T. Chang, T.-C. Chang, Z.-T. Huang, P.-J. Cheng, J.-H. Yang, M.-H. Lin, T.-R. Lin, K.-P. Chen et al., “Ultracompact pseudowedge plasmonic lasers and laser arrays,” Nano letters, vol. 18, no. 2, pp. 747–753, 2018.
[30] Y.-H. Chou, Y.-M. Wu, K.-B. Hong, B.-T. Chou, J.-H. Shih, Y.-C. Chung, P.-Y. Chen, T.- R. Lin, C.-C. Lin, S.-D. Lin et al., “High-operation-temperature plasmonic nanolasers on single-crystalline aluminum,” Nano letters, vol. 16, no. 5, pp. 3179–3186, 2016.
[31] D. K. Sharma, S. Shukla, K. K. Sharma, and V. Kumar, “A review on zno: Fundamental properties and applications,” Materials Today: Proceedings, 2020.
[32] J. L. Bromberg, The laser in America, 1950-1970. MIT press, 1991.
[33] A. J. Gross and T. R. Herrmann, “History of lasers,” World journal of urology, vol. 25, no. 3, pp. 217–220, 2007.
[34] G. Chartier, Introduction to optics. Springer, 2005.
[35] J. F. Ready, Industrial applications of lasers. Elsevier, 1997.
[36] R. Paschotta, Field guide to lasers. SPIE press Bellingham, WA, 2008, vol. 12.
[37] C. Fabry, “Theorie et applications d’une nouvelle methods de spectroscopie intereferentielle,” Ann. Chim. Ser. 7, vol. 16, pp. 115–144, 1899.
[38] E. Hecht, “Optics 4th edition,” Optics 4th edition by Eugene Hecht Reading, 2001.
[39] R. W. Wood, “Xlii. on a remarkable case of uneven distribution of light in a diffraction grating spectrum,” The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science, vol. 4, no. 21, pp. 396–402, 1902.
[40] U. Fano, “The theory of anomalous diffraction gratings and of quasi-stationary waves on metallic surfaces (sommerfeld＇s waves),” JOSA, vol. 31, no. 3, pp. 213–222, 1941.
[41] D. K. Cheng et al., “Fundamentals of engineering electromagnetics,” 1993.
[42] S. L. Chuang, Physics of photonic devices. John Wiley & Sons, 2012.
[43] S. A. Maier et al., Plasmonics: fundamentals and applications. Springer, 2007, vol. 1.
[44] R. F. Oulton, V. J. Sorger, D. Genov, D. Pile, and X. Zhang, “A hybrid plasmonic waveguide for subwavelength confinement and long-range propagation,” nature photonics, vol. 2, no. 8, pp. 496–500, 2008.
[45] W. Zhou, M. Dridi, J. Y. Suh, C. H. Kim, D. T. Co, M. R. Wasielewski, G. C. Schatz, and T. W. Odom, “Lasing action in strongly coupled plasmonic nanocavity arrays,” Nature nanotechnology, vol. 8, no. 7, pp. 506–511, 2013.
[46] J. Jackson, “Classical electrodynamics , publisher john wiley & sons inc,” New Jersey, vol. 558559, 1998.
[47] A. H. Kitai, Solid state luminescence: Theory, materials and devices. Springer Science& Business Media, 2012.
[48] J. I. Goldstein, D. E. Newbury, J. R. Michael, N. W. Ritchie, J. H. J. Scott, and D. C.Joy, Scanning electron microscopy and X-ray microanalysis. Springer, 2017.
[49] M. Hayat, Basic techniques for transmission electron microscopy. Elsevier, 2012.
[50] K. S. Harsha, Principles of vapor deposition of thin films. Elsevier, 2005.