本研究主要設計、發展與驗證一創新內藏型圓柱陣列式磁致動器(Embedded Cylindrical Array Magnetic Actuator, ECAMA)並應用於CNC銑床。針對主軸因偏心及切削反作用力而衍生的位置動態偏擺進行補償。本研究所設計之ECAMA採用柱陣列設計，以增加繞線空間，除方便加工及組配外，更可在有限體積下，大幅提升線圈繞線匝數，與同體積之傳統磁浮軸承相比，在相同供電條件下，ECAMA之安匝數可輕易達到傳統設計的3倍以上，而且所能產生之磁驅動力亦高於傳統磁浮軸承設計的4倍以上。 此外，為了有效縮減製造成本，本研究設計一自感測模組(Self-sensing Module)，取代傳統間隙感測器。除了大幅縮減成本外，更可簡化ECAMA整體結構複雜度。
本研究最後成功製作一組ECAMA雛型，搭配訊號處理模組及工程軟體(MATLAB/Simulink)，進行實際測試。為驗證ECAMA於高速銑切(10000RPM以上)下之效能，以高速馬達(最高轉速達24000RPM)搭配ECAMA並裝配於桌上型CNC銑床，以進行實際銑削試驗，並針對靜態、動態及銑切模式下，搭配PID控制器，以驗證其功能與穩定性。經實驗結果可知，本論文所提出之ECAMA確實具有節制主軸位置偏擺的效能。

The purpose of this thesis is to develop an innovative Embedded Cylindrical Array Magnetic Actuator(ECAMA) which is to regulate spindle position for mill machines. For the purpose to increase the wound coil turns, the coils are wound on four I-shape silicon steel columns instead of the traditional yokes. Under identical power supply, the overall ampere-turns of ECAMA could be three times with respect to that by conventional Active Magnetic Bearing (AMB). As a result, the induced magnetic force by ECAMA is also enhanced and 3-times stronger than that by traditional AMBs. In addition, a Self-Sensing Module is proposed and equipped with ECAMA to waive the cost of gap sensors and reduce the complexity of ECAMA profile and assembly.
Finally, a prototype of ECAMA is successfully built up. In order to verity the validity and efficacy of ECMA, a high speed motor (24000RPM) is equipped with the CNC milling machine. By employing the signal processing interface (Model DS-1104 by dSPACE) and the commercial software (MATLAB/Simulink), efficiency of ECAMA and the Self-Sensing Module are verified by the intensive experiments.

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