簡易檢索 / 詳目顯示

回結果列表
研究生： 林志駿
Lin, Chih-Chun
論文名稱： 奈米碳管陣列成長應用於仿生壁虎腳無膠黏著
Growth of Aligned Carbon Nanotube Arrays for Fabricating Gecko-Foot-Mimetic Dry Adhesives
指導教授： 洪昭南
Hong, Chau-Nan Franklin
學位類別： 碩士
Master
系所名稱： 工學院 - 化學工程學系
Department of Chemical Engineering
論文出版年： 2010
畢業學年度： 98
語文別： 中文
論文頁數： 122
中文關鍵詞： 奈米碳管 、水汽 、壁虎腳
外文關鍵詞： CNT, water vapor, gecko foot
相關次數： 點閱：68  下載：0 
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報

    • 本研究以熱裂解化學氣相沉積法，藉由水汽輔助成長奈米碳管陣列，並探討水汽以及各參數對奈米碳管的影響。此外，利用微波輔助法將奈米碳管陣列轉印至glass/PMMA基板上並應用於仿生壁虎腳無膠黏著。
    以Al/Fe當作成長奈米碳管的觸媒，從結果發現鍍有Al層當作中間層的觸媒，顆粒大小較均勻且較不易聚集。於水汽輔助成長奈米碳管時，以氫氣、水汽與乙炔為前驅物，並控制成長階段的壓力以及成長時間，合成出奈米碳管陣列，並藉由穿透式電子顯微鏡分析發現，碳管的成長模式為頂部成長模式。
    為了增加奈米碳管與基板之間的附著力，分別嘗試五種方法，其中以微波輔助法將奈米碳管垂直地轉印至glass/PMMA基板上的效果最好，並將glass/PMMA/CNT基板應用於仿生壁虎腳無膠黏著，且由吊重實驗結果顯示最大可負載的重量約為92克。

    In this work, water vapor is used to assist in fabricating carbon nanotube (CNTs) arrays by thermal chemical vapor deposition (Thermal CVD). The influence of water vapor and some experimental parameters are discussed in the following article. Moreover, the as-grown carbon nanotube array is transferred from Si substrate to glass/PMMA substrate by using microwave treatment. Therefore, the as-prepared glass/PMMA/VACNT substrate will be applied to fabricate gecko-foot-mimetic dry adhesives.
    The catalyst for synthesizing CNT arrays is Al/Fe. The Al layer in this work is proved that it can prevent catalyst from aggregating during annealing process. CNT array is synthesized by acetylene CVD containing H2 and water vapor. By means of controlling the growth pressure and growth time, CNT arrays is obtained successfully. Furthermore, the results by TEM analysis show that CNT is tip-growth mode. In order to enhance the adhesion between CNT and substrate, microwave treatment is carried out to assist in transferring Si/CNT to glass/PMMA substrate. In addition, gecko-foot-mimetic dry adhesive is fabricated by using glass/PMMA/VACNT substrate, and the result shows that the maximum loading weight is about 92 grams.

    目 錄 中文摘要 I 英文摘要 II 誌謝 III 目錄 V 圖目錄 X 第一章 緒論 1 1-1 前言 1 1-2 研究動機與目的 5 1-3 各章提要 6 第二章 文獻回顧 7 2-1 奈米碳管的結構與性質 7 2-1-1結構及電性 7 2-1-1.1 單層奈米碳管的結構及電性 7 2-1-1.2 多層奈米碳管的結構及電性 8 2-1-2機械特性 9 2-1-3熱性質 10 2-1-3.1 熱穩定性 10 2-1-3.2 熱導性 10 2-2 奈米碳管的生成機構 17 2-3 CVD法合成奈米碳管 21 2-4 奈米碳管的應用 25 2-4-1奈米碳管場發射顯示器 25 2-4-2奈米碳管場效電晶體 26 2-4-3奈米碳管應用於紡絲技術 26 2-4-4仿生壁虎腳無膠黏著的製作 26 第三章 實驗方法與步驟 37 3-1 實驗流程 37 3-2 實驗系統設計 38 3-2-1熱裂解化學氣相沉積系統 38 3-2-1.1反應氣體輸入裝置 38 3-2-1.2反應器 38 3-2-1.3加溫及溫控系統 39 3-2-1.4真空及排氣系統 39 3-2-2濺鍍(Sputtering)系統 40 3-2-2.1反應氣體輸入裝置 40 3-2-2.2真空及排氣系統 40 3-2-2.3電源供應器 41 3-2-3電泳沉積系統 41 3-2-3微波加熱系統 41 3-3 實驗材料 47 3-3-1基板材料 47 3-3-2觸媒材料 47 3-3-3 Thermal CVD反應物 47 3-3-4有機材料 48 3-4 實驗步驟 50 3-4-1 觸媒的製備 50 3-4-2 水汽輔助成長奈米碳管之實驗步驟 50 3-4-3 濺鍍金屬於奈米碳管頂部並利用高溫退火之實驗步驟 51 3-4-4 利用電泳沉積垂直排列的奈米碳管之實驗步驟 51 3-4-5 利用無電鍍來提升碳管與基板之間的附著力之實驗步驟 52 3-4-6 利用UV聚合樹脂轉印奈米碳管之實驗步驟 53 3-4-7利用微波輔助轉印奈米碳管至塗佈PMMA的玻璃基板之實驗步驟 53 3-4-8 製作仿生壁虎腳並進行吊重之實驗步驟 54 3-5 分析與鑑定 57 3-5-1 表面形態觀察 57 3-5-2 結構分析 57 第四章 水汽輔助法成長奈米碳管 59 4-1 水汽輔助法成長奈米碳管 59 4-2 觸媒組成的影響 64 4-3 水汽對於合成奈米碳管的影響 67 4-4 壓力效應 70 4-5 成長時間效應 73 4-6 結論 77 第五章 提升奈米碳管於基板之附著力並應用於仿生壁虎腳無膠黏著 78 5-1 附著力提升之實驗設計 78 5-1-1 濺鍍Al於奈米碳管頂部並利用高溫退火將Al 移動至碳管底部以增加附著力 80 5-1-2 利用電泳沉積垂直排列的奈米碳管 83 5-1-3 利用無電鍍銀來提升碳管與基板之間的附著力 88 5-1-4 利用UV聚合樹脂轉印奈米碳管 91 5-1-5 利用微波輔助轉印奈米碳管至塗佈PMMA的玻璃基板 94 5-1-5.1 配製不同濃度的PMMA溶液 94 5-1-5.2 微波輔助轉印奈米碳管 97 5-2 奈米碳管應用於仿生無膠黏著技術 102 5-3 結論 110 第六章 總結論 112 第七章 參考文獻 115

    [1] M Kunpfer, Surface Science Reports 42(2001)1.
    [2] LC Qin, X Zhao, K Hirahara, Y Miyamoto, Y Ando,S Iijima, Nature 408(2000)50.
    [3] R Saito, M Fujita, G Dresselhaus, MS Dresselhaus, Physical Review B 46 (1992)1804.
    [4] R Saito, M Fujita, G Dresselhaus, MS Dresselhaus, Applied Physics Letters 60(1992)2204.
    [5] N Hamada, S Swada, A Oshiyama, Physical Review Lett. 68(1992)1579.
    [6] R Saito, G Deresselhaus, MS Dresselhaus, Physical Properties of Carbon Nanotubes, Imperial College Press; London,(1998).
    [7] TA Edison, US Patent 470,925(1892).(Issued March 15,1892).
    [8] P Schutzenberger, L Schutzenberger, Comptes. Rendus. 111(1890)774.
    [9] CH Pelabon, Comptes. Rendus. 137(1905)706.
    [10] R Bacon, Journal of Applied Physics. 31(1960)283.
    [11] C Herring, JK Galt, Physical Review 85(1952) 1060.
    [12] AP Levitt, in Whisker Technology, Wiley-Interscience, New York,(1970).
    [13] AW Morre, AR Ubbelohde, DA Young, Brit. Journal of Applied Physics. 13(1962)393.
    [14] LCF Blackman, AR Ubbelohde, Proceedings of the Royal Society of London - A 266(1962)20.
    [15] MS Dresselhaus, G Dresselhaus, K Sugihara, IL Spain, HA Goldberg, Graphite Fibers and Filaments(Springer-Verlag, Berlin,1988), Vol. 5 of Springer Series in Materials Science.
    [16] M Endo, Mecanisme de croissance en phase vapor de fibers de carbon(The growth mechanism of vapor-grown carbon fibers). PhD thesis, University of Orleans, Orleans, France, 1975. (in French).
    [17] M Endo, H. W. Kroto, The Journal of Physical Chemistry. 96(17), (1992), 6941
    [18] A Oberlin, M Endo, T Koyama, Carbon 14(1976)133.
    [19] A Oberlin, M Endo, T Koyama, Journal of Crystal Growth 32(1976)335.
    [20] HW Kroto, JR Heath, SC O’Brien, RF Curl, RE Smelley, Nature(London) 318(1985)162.
    [21] S Iijima, Nature(London) 354(1991)56.
    [22] DS Bethune, CH Kiang, MS Deveries, G Gorman, R Savoy, J Vazquez, R Beyars, Nature 363 (1993) 605.
    [23] S Iijima, T Ichibashi, Nature 363 (1993) 603
    [24] A Thess, R Lee, P Nikolaev, H Dai, P Petit, J Robert, C Xu, YH Lee, SG Kim, AG Rinzler, D T Colbert, GE Scuseria, D Tomanek, JE Fischer, RE Smalley, Science 273(1996)483
    [25] C Journet, WK Maser, P Bernier, A Loiseau, M Lamy de Chapelle, S Lefrant, P Deniard, R Lee, JE Fischer, Nature 388(1997) 756.
    [26] H Dai, A Rinzler, P Nikolaev, A Thess, DT Colbert, R E Smalley, Chemical Physics Letters 260 (1996) 471.
    [27] MS Dresselhaus, G Dresselhaus, R Saito, Carbon 33(1995) 883.
    [28] DH Oh, YH Lee, Physical Review B 58(1998) 7407.
    [29] ATR Lee, P Nikolaev, H Dai, P Petit, J Robert, C Xu, YH Lee, SG Kim, DT Colbert, G Scuseria, D Tomanek, JE Fisher, RE Smalley, Science 275(1996) 483.
    [30] M Treones, N Grobert, J Olivares, JP Zhang, H Terrones, K Kordatos, WK Hsu, JP Hare, PD Townsend, K Prassides, AK Cheetham, HW Kroto, DRM Walton, Nature 388(1997) 52.
    [31] M Terrones, WK Hsu, HW Kroto, DRM Walton, Topics in Current Chemistry 199(1998)1.
    [32] H Dai, EW Wong, CM Lieber, Science 272(1996) 52.
    [33] V Ivanov, JB Nagy, P Lambi, AA Lucas, XB Zhang, XF Xhang, D Bernaerts, GV Tendeloo, S Amelinckx, JV Lunduyt, Chemical Physics Letters 223(1994) 329.
    [34] B Gan, J Ahn, Q Zhang, Rusli, SF Yoon, J Yu, QF Huang, K Chew, VA Ligatchev, XB Zhang, WZ Li, Chemical Physics Letters 333 (2001) 23.
    [35] CJ Lee, J Park, Applied Physics Letters 77(2000)3397.
    [36] P Chen, X Wu, J Lin, H Li KL Tan, Carbon 38(2000)139.
    [37] S Iijima, C Brabec, A Maiti, J Bernholc,Journal of Chemical Physics 104(1996) 2089.
    [38] NG Chopra, LX Benedict, VH Crespi, ML Choen, SG Louie, A Zettl, Nature 377(1995) 135.
    [39] PM Ajayan, O Stephan, C Colliex, D Trauth, Science 265(1994) 1212.
    [40] G Overney, W Zhong, D Tomanek, Physica D 27(1993) 93.
    [41] DH Robertson, DW Brener, JW Minmire, Physical Review B 4(1992) 592.
    [42] Kelly BT, Physics of Graphite Applied Science, London (1992).
    [43] J Tersoff, Physical Review B 46(1992) 546.
    [44] MR Falvo, GJ Clary, RM II Taylor, V Chi, FP Brooks, S Washburn, R Superfine, Nature 389(1997) 582.
    [45] M Treacy, TW Ebesen, JM Gibson, Nature 381(1996) 678.
    [46] EW Wong, PE Sheehan, CM Lieber. Science 277(1997) 1971.
    [47] N Krishnankutty, C Park, NM Rodriguez, RTK Baker, Carbon 27(1989) 315.
    [48] RS Ruoff, DC Lorents, Carbon 33(1995) 925.
    [49] S Berber, YK Kwon, D Tomanek, Physical Review Letters 84 (2000) 4613.
    [50] J Hone, M Whitney, A Zettl, Synthetic Metals 103(1999) 2498.
    [51] M Endo, HW Kroto, Journal of Physical Chemistry 96(1992) 6491.
    [52] Y Saito, T Yoshikawa, M. Inagaki, M. Tomita, T Hayashi, Chemical Physics Letters 304 (1993) 277.
    [53] RTK Baker , PS Harries, Chemistry and physics of carbon, Marcel Dekker, New York (1978) 83.
    [54] RTK Baker, MA Braber, PS Harries FS Feates, RJ Waite, Journal of Catalysis 26(1972) 51.
    [55] RTK Baker, JJ Chludzinski, Journal of catalysis 64(1980) 464.
    [56] RTK Baker, PS Harries, RB Thomas, RJ Waite, Journal of catalysis 30(1973) 86.
    [57] RTK Baker, RJ Waite, Journal of catalysis 37(1975) 101.
    [58] T Baird, JR Fryer, Carbon 12(1974) 591.
    [59] M Jung, KY Eun, JK Lee, YJ Baik, KR Lee, JW Park, Diamond and Related Materials 10 (2001) 1235.
    [60] S Xie, W Li, Z Pan, B Chang, L Sun, Materials Science and Engineering A286 (2000) 11.
    [61] XH Chen, SQ Feng, Y Ding, JC Peng, ZZ Chen, Thin Solid Films 339 (1999) 6.
    [62] CJ Lee, J Park, SY Kang, JH Lee, Chemical Physics Letters 323 (2000) 554.
    [63] CJ Lee, JH Park, J Park, Chemical Physics Letters 323 (2000) 560.
    [64] N. Grobert , M. Terrones , S. Trasobares , K. Kordatos , H. Terrones , J. Olivares , J.P. Zhang , Ph. Redlich , W.K. Hsu ,C.L. Reeves , D.J. Wallis , Y.Q. Zhu1, J.P.Hare1, A.J. Pidduck , H.W.Kroto , D.R.M. Walton, Applied Physics A-Materials Science & Processing 70 (2000) 175.
    [65] M. Terrones, N. Grobert, J. Olivares, J. P. Zhang,H. Terrones, K. Kordatos, W. K. Hsu, J. P. Hare,P. D. Townsend, K. Prassides, A. K. Cheetham, H. W. Kroto & D. R. M. Walton, Nature 388 (1997) 52.
    [66] M. Terrones, N. Grobert, J. P. Zhang, H. Terrones, J. Olivares, W. K. Hsu, J. P. Hare, A. K. Cheetham, H. W. Kroto and D. R. M. Walton, Chemica Letters 285 (1998) 299.
    [67] N Krishnankutty, C Park, NM Rodriguez, RTK Baker, Catalysis Today 37 (1997) 295.
    [68] Q Liang, Q Li, DL Chen, DR Zhou, BL Zhang, ZL Yu, Chemical Journal of Chinese Universities-Chinese, 21 (2000) 623.
    [69] Kenji Hata, Don N. Futaba, Kohei Mizuno, Tatsunori Namai, Motoo Yumura, Sumio Iijima, Science 306, (2004) 1362.
    [70] Don N. Futaba, Kenji Hata, Takeo Yamada, Kohei Mizuno, Motoo
    Yumura, Sumio Iijima, Phys. Rev. Lett. 95, (2005) 056104.
    [71] XX Zhang, ZQ Li, GH Wen, KK Fung, J Chen, Y Li, Chemical Physics Letters 333 (2001) 509.
    [72] Y Li, J Chen, Y Ma, J Zhao, Y Qin, L Chang, Chemical Communications (1999) 1141.
    [73] OP Krivoruchko, NI Maksimova, VI Zaikovskii, Aleksei N Salanov, Carbon 38 (2000) 1075.
    [74] K Hernadi, A Fonseca, JB Nagy, A Siska, I Kiricsi, Applied Catalysis A General 199 (2000) 245.
    [75] M Nath, BC Satishkumar, A Govindaraj, CP Vinod, CRN Rao, Chemical Physics Letters 322 (2000) 333.
    [76] H. Murakami, M. Hirakawa, C. Tanaka, H. Yamakawa, Appl. Phys. Lett. 76, (2000) 1776.
    [77] W. B. Choi, D. S. Chung, J. H. Kang, H. Y. Kim, Y. W. Jin, I. T. Han, Y. H. Lee, J.E. Jung, N. S. Lee, G. S. Park and J. M. Kim, Appl. Phys. Lett., 75, (1999) 3129.
    [78] S. J. Tans, A. R. M. Verschueren, C. Dekker, Nature 393, (1998) 49.
    [79] R. Martel, T. Schmidt, H.R. Shea, T. Hertel, P. Avouris, Appl. Phys. Lett. 73, (1998) 2447.
    [80] Z. Yao, H. W. C. Postma, L. Balents, C. Dekker, Nature 402, (1999) 273.
    [81] J. A. Misewish, R. Martel, P. Avouris, J. C. Tsang, S. Heinze, J. Tersoff, Science 300, (2003) 783.
    [82] L. M. Ericson, H. Fan, H. Peng, V. A. Davis, W. Zhou, J. Sulpizio, Science305, (2004) 1447.
    [83] Y.-L. Li, I. A. Kinloch, A H. Windle, Science 304, (2004) 276.
    [84] Liangti Qu, Liming Dai, Advanced Materials, 19, (2007) 3844
    [85] Liangti Qu, Liming Dai, Morley Stone, Zhenhai Xia, Zhong Lin Wang, Science 322, (2008) 238
    [86] A. K. Geim, S. V. Dubonos, I. V. Grigorieva,K. S. Novoselov, A. A. Zhukov, S. Y. Shapoval, Nature Materials, (2003), 2, 461.
    [87] Y. Zhao, T. Tong, L. Delzeit, A. Kashani, M. Meyyappan, A. Majumdar, Jornal of Vacuum Science and Technology B,(2006), 24, 331.
    [88] Tae-il Kim, Hoon Eui Jeong, Kahp Y. Suh, Hong H. Lee, Advanced Materials,21,(2009) 2276.
    [89] Michael P. Murphy, Burak Aksak, Metin Sitti, Small, 5,(2009),No.2,170
    [90] Woochul Nam, TaeWon Seo, Byungwook Kim, Dongsu Jeon, Kyu-Jin Cho, Jongwon Kim, Journal of Bionic Engineering,6,(2009),246
    [91] Ruth Y. Zhang, Islamshah Amlani, Jeff Baker, John Tresek, Raymond K. Tsui, Nano Letters. 3, (2003) 731

    無法下載圖示 校內：2020-12-31公開
    校外：不公開
    電子論文尚未授權公開，紙本請查館藏目錄
    QR CODE