本研究中，我們與中研院物理研究所李尚凡教授實驗室李榮銓博士合作，在室溫下利用自旋幫浦 (spin pumping)引發逆自旋霍爾效應(Inverse spin Hall effect, ISHE)，探討氧化鋅ZnO之ISHE相關物理特性以及其應用。由我們負責元件製程及基本電性與磁性量測，我們利用脈衝雷射鍍膜系統成長高品質之ZnO，接著利用Sputter成長鎳鐵層以及電極鉭Ta，而中研院物理研究所負責利用鐵磁共振(ferromagnetic resonanceFMR)產生自旋幫浦 (spin pumping)並量測逆自旋霍爾效應(Inverse spin Hall effect, ISHE)之訊號。

本實驗首先施加微波及磁場量測其吸收訊號，以找尋最大之鐵磁共振(ferromagnetic resonanceFMR)條件，接著利用該FMR條件去量測電壓訊號，並且改變微波強度、頻率及磁場方向，發現此電壓訊號的變化關係皆符合spin pumping引發ISHE之趨勢，因此我們認為即使在弱自旋軌道耦合(spin-orbit coupling)的材料ZnO中，也能找尋到ISHE之訊號，未來我們希望能夠再做更進一步之研究，探討其中的原因以及其應用性。

In this study, we cooperated with postdoctoral Lee,Jung-Chuan in the lab of professor Lee,Shang-Fan of the Institute of Physics in Academia Sinica. We use spin pumping from NiFe by ferromagnetic resonance (FMR) to induce the inverse spin Hall effect (ISHE) in ZnO at room temperature for studying the physical properties and applications of the inverse spin Hall effect (ISHE) in ZnO. The characters were measured in our lab and the devices were made from our lab of which high quality ZnO was deposited by Pulse Laser Deposition ( PLD ) and the electrodes Ta and ferromagnetic layer NiFe (Py) were deposited by sputter. The measurements of the spin pumping from NiFe by FMR and ISHE in ZnO at room temperature are performed in the Institute of Physics in Academia Sinica.

We first used the FMR spectra to find the FMR conditions of our samples. Next, we detected the electromotive force signals V in the FMR conditions. The electromotive force signals V changed with the microwave excited frequencies, the microwave excitation power, and the in-plane angle θ of the external magnetic field H. The results allow the estimation of the inverse spin Hall (ISHE) in ZnO induced by spin pumping. Therefore, we can detect the ISHE even in ZnO of which the spin-orbital coupling is weak. We want to research further in the future to explore the origins and the applications of the ISHE in ZnO.

Chapter 1.
[1] http://tamt.yuntech.edu.tw/annual/49e/493.pdf
[2] M. N. Baibich, J. M. Broto, A. Fert, F. Nguyen Van Dau, and F. Petroff, “Giant Magnetoresistance of (001)Fe/(001)Cr Magnetic Superlattices”, Phys. Rev. Lett. 61, 2472–2475, 1988
[3] http://www.nanotech-now.com/spintronics.htm
[4] http://web.physics.udel.edu/research/nanoscale-physics/spintronics
[5] E. Saitoh, M. Ueda, and H. Miyajima, “Conversion of Spin current into charge current at room temperature: Inverse spin-Hall effect”, Appl. Phys. Lett. 88, 182509, 2006.
[6] H. Y. Inoue, K. Ando, K. Sasage, and E. Saitoh, “Detection of pure inverse spin-Hall effect induced by spin pumping at various excitation”,J. Appl. Phys. 102, 083915,2007
[7] K. Ando, S. Takahashi, J.leda, Y. Kajiwara, H. Nakayama, T.Yoshino, K. Harii, Y. Fujikawa, M. Matsuo, S. Maekawa, and E. Saitoh, “Inverse spin-Hall effect induced by spin pumping in metallic system”, J. Appl. Phys. 109, 103913,2011
[8] Axel Hoffmann, “Spin Hall Effects in Metals”, IEEE (1), 2014
[9] http://prpc.phys.nthu.edu.tw/discovery_8.php
[10] H. Nakayama, K. Ando, K. Harii, T.Yoshino, R. Takahashi, Y. Kajiwara, K. Uchida, Y. Fujikawa, and E. Saitoh, “Geometry dependence on inverse spin Hall effect induced by spin pumping in Ni81Fe19/Pt films”, Phys. Rev. B.85, 144408, 2012.
[11] Mariko Koike, Eiji Shikoh, Yuichiro Ando, Teruya Shinjo, Shinya Yamada, Kohei Hamaya, and Masashi Shiraishi, “Dynamical Spin Injection into p-Type Germanium at Room Temperature”, Appl. Phys. Express 6, 023001, 2013
[12] Dazhi Hou, Z. Qiu, K. Harii, Y. Kajiwara, K. Uchida, Y. Fujikawa, H. Nakayama, T. Yoshino, T. An, K. Ando, Xiaofeng Jin, and E. Saitoh, “Interface induced inverse spin Hall effect in bismuth/permalloy bilayer”, Appl. Phys. Lett. 101, 042403, 2012.
[13] Kazuya Ando, Yosuke Kajiwara, Kohei Sasage, Kenichi Uchida, and Eiji Saitoh, “Inverse Spin-Hall Effect Induced by Spin Pumping in Various Metals”, IEEE 46, 9, 2010
[14] O. Mosendz, V. Vlaminck, J. E. Pearson, F. Y. Fradin, G. E. W. Bauer, S. D. Bader, and A. Hoffmann, “Detection and quantification of inverse spin Hall effect from spin pumping in permalloy/normal metal bilayers” Phys. Rev. B.82, 214403, 2010.
[15] Kazuya. Ando, and Eiji. Saitoh, “Observation of the inverse spin Hall effect in silicon”, Nature Communications, 10.1038, 2012.

Chapter 2.
[1] M. I. Dyakonov, and V. I. Perel, “Possibility of orientating electron spins with current”, Sov. Phys. JETP Lett. 13: 467, 1971
[2] M.I. Dyakonov and V.I. Perel , “Current-induced spin orientation of electrons in semiconductors”, Phys. Lett. A 35 (6): 459, 1971
[3] J. E. Hirsch, “Spin Hall Effect”, Phys. Rev. Lett.83(9), 1999.
[4] Shuichi Murakami, Naoto Nagaosa, and Shou-Cheng Zhang, “Dissipationless Quantum Spin Current at Room Temperature”, Science 301, 1348 (2003)
[5] J. Wunderlich, B. Kaestner, J. Sinova, and T. Jungwirth, “Experimental Observation of the Spin-Hall Effect in a Two-Dimensional Spin-Orbit Coupled Semiconductor System”, Phys. Rev. Lett.94, 047204, 2005.
[6] Y. K. Kato, R. C. Myers, A. C. Gossard, and D. D. Awschalom, “Observation of the Spin Hall Effect in Semiconductors”, Science 306, 1910 (2004)
[7] John Schliemann, “Spin Hall Effect”, Int. J. Mod. Phys. B 20 (9),1015-1036,2006
[8] E. Saitoh, M. Ueda, and H. Miyajima, “Conversion of Spin current into charge current at room temperature: Inverse spin-Hall effect”, Appl. Phys. Lett. 88, 182509, 2006.
[9] H. Y. Inoue, K. Ando, K. Sasage, and E. Saitoh, “Detection of pure inverse spin-Hall effect induced by spin pumping at various excitation”,J. Appl. Phys. 102, 083915,2007
[10] K. Ando, S. Takahashi, J.leda, Y. Kajiwara, H. Nakayama, T.Yoshino, K. Harii, Y. Fujikawa, M. Matsuo, S. Maekawa, and E. Saitoh, “Inverse spin-Hall effect induced by spin pumping in metallic system”, J. Appl. Phys. 109, 103913,2011
[11] Eiji Shikoh, Kazuya Ando, Kazuki Kubo, Eiji Saitoh,Teruya Shinjo, and Masashi Shiraishi, “Spin-Pump-Induced Spin Transport in p-type Si at Room Temperature”, Phys. Rev. Lett.110, 127201, 2013.
[12] H. Nakayama, K. Ando, K. Harii, T.Yoshino, R. Takahashi, Y. Kajiwara, K. Uchida, Y. Fujikawa, and E. Saitoh, “Geometry dependence on inverse spin Hall effect induced by spin pumping in Ni81Fe19/Pt films”, Phys. Rev. B.85, 144408, 2012.
[13] Y. Kajiwara, K. Harii, S. Takahashi, J. Ohe, K. Uchida, M. Mizuguchi, H. Umezawz, H. Kawai, K. Ando,K. Takanashi, S. Maekawa, and E. Saitoh, “Transmission of electrical signals by spin-wave interconversion in a magnetic insulator”, Nature 464, 262-266, 2010
[14] O. Mosendz, V. Vlaminck, J. E. Pearson, F. Y. Fradin, G. E. W. Bauer, S. D. Bader, and A. Hoffmann, “Detection and quantification of inverse spin Hall effect from spin pumping in permalloy/normal metal bilayers” Phys. Rev. B.82, 214403, 2010.
[15] Yaroslav Tserkovnyak, Arne Brataas, Gerrit E. W. Bauer, and Bertrand I. Halperin, “Nonlocal magnetization dynamics in ferromagnetic heterostructures”, Rev. Mod. Phys.77(4), 2005.
[16] Kazuya. Ando, and Eiji. Saitoh, “Observation of the inverse spin Hall effect in silicon”, Nature Communications, 10.1038, 2012.
[17] A. Azevedo, L. H. Vilela-Leao, R. L. Rodr´ıguez-Su´arez, A. F. Lacerda Santos, and S. M. Rezende, “Spin pumping and anisotropic magnetoresistance voltages in magnetic bilayers:Theory and experiment” Phys. Rev. B.83, 144402, 2011.

Chapter 3.
[1] http://www.pascal-co-ltd.co.jp/products/deppld_pacplmbe.html
[2] http://qucs.sourceforge.net/tech/node86.html
[3] http://www.dualsignal.com.tw/30913255112866637709sputter.html
[4] http://qucs.sourceforge.net/tech/node86.html
[5] K. Harii, K. Ando, H. Y. Inoue, K. Sasage, and E. Saitoh, “Inverse spin-Hall effect and spin pumping in metallic films ( invited )”, J. Appl. Phys. 103, 07F311,2008
[6] G. Y. Luo , M.Y. Song , H. Y. Hung , Y.C.Chiu , J.Kwo , S. F. Lee , C. R. Chang , and J. G. Lin, “Spin Pumping Induced Inverse Spin-Hall Effects in La0.7Sr0.3MnO3 / Platinum Bilayer Film”, IEEE Trans. Magn. 48, 0018-9464, 2012
[7] CHENG P. WEN, “Coplanar Waveguide: A Surface Strip Transmission Line Suitable for Nonreciprocal Gyromagnetic Device Applications”, IEEE MTT-17, 12, 1969
[8] O. Mosendz, V. Vlaminck, J. E. Pearson, F. Y. Fradin, G. E. W. Bauer, S. D. Bader, and A. Hoffmann, “Detection and quantification of inverse spin Hall effect from spin pumping in permalloy/normal metal bilayers” Phys. Rev. B.82, 214403, 2010.
[9] http://zh.wikipedia.org/wiki/%E5%B8%83%E6%8B%89%E6%A0%BC%E5%AE%9A%E5%BE%8B
[10] http://idc.ord.ncku.edu.tw/files/11-1080-8524-1.php
[11] http://hyperphysics.phy-astr.gsu.edu/hbase/magnetic/hall.html
[12] http://pvcdrom.pveducation.org/CHARACT/4pp.HTM
[13] http://www.mast-tech.com.tw/Resistivity%20Measurement.pdf
[14] http://www.mast-tech.com.tw/4PP-Introduction-e-learnning.pdf
[15] http://pvcdrom.pveducation.org/CHARACT/4pp.HTM

Chapter 6.
[1] J. E. Hirsch, “Spin Hall Effect”, Phys. Rev. Lett.83(9), 1999.
[2] E. Saitoh, M. Ueda, and H. Miyajima, “Conversion of Spin current into charge current at room temperature: Inverse spin-Hall effect”, Appl. Phys. Lett. 88, 182509, 2006.
[3] H. Y. Inoue, K. Ando, K. Sasage, and E. Saitoh, “Detection of pure inverse spin-Hall effect induced by spin pumping at various excitation”,J. Appl. Phys. 102, 083915,2007
[4] O. Mosendz, J.E. Pearson, F. Y. Fradin, G.E.W. Bauer, S. D. Bader, and A. Hoffmann “Quantifying Spin Hall Angles from Pumping: Experiments and Theory”, Phys. Rev. Lett.104, 046601, 2010.
[5] K. Ando, S. Takahashi, J.leda, Y. Kajiwara, H. Nakayama, T.Yoshino, K. Harii, Y. Fujikawa, M. Matsuo, S. Maekawa, and E. Saitoh, “Inverse spin-Hall effect induced by spin pumping in metallic system”, J. Appl. Phys. 109, 103913,2011
[6] H. Nakayama, K. Ando, K. Harii, T.Yoshino, R. Takahashi, Y. Kajiwara, K. Uchida, Y. Fujikawa, and E. Saitoh, “Geometry dependence on inverse spin Hall effect induced by spin pumping in Ni81Fe19/Pt films”, Phys. Rev. B.85, 144408, 2012.
[7] Kazuya. Ando, and Eiji. Saitoh, “Observation of the inverse spin Hall effect in silicon”, Nature Communications, 10.1038, 2012.
[8] K. Ando, S. Takahashi, J.leda, H. Kurebayashi, T.Trypiniotis, C. H. W. Barnes, S. Maekawa, and E. Saitoh, “Electrically tunable spin injector free from the impedance mismatch problem”, Nature Mater. 10.1038, 2011.
[9] A. Azevedo, L. H. Vilela-Leao, R. L. Rodr´ıguez-Su´arez, A. F. Lacerda Santos, and S. M. Rezende, “Spin pumping and anisotropic magnetoresistance voltages in magnetic bilayers:Theory and experiment” Phys. Rev. B.83, 144402, 2011.
[10] Eiji Shikoh, Kazuya Ando, Kazuki Kubo, Eiji Saitoh,Teruya Shinjo, and Masashi Shiraishi, “Spin-Pump-Induced Spin Transport in p-type Si at Room Temperature”, Phys. Rev. Lett.110, 127201, 2013.
[11] M. I. Dyakonov, and V. I. Perel, “Possibility of orientating electron spins with current”, Sov. Phys. JETP Lett. 13: 467, 1971
[12] M.I. Dyakonov and V.I. Perel , “Current-induced spin orientation of electrons in semiconductors”, Phys. Lett. A 35 (6): 459, 1971
[13] John Schliemann, “Spin Hall Effect”, Int. J. Mod. Phys. B 20 (9),1015-1036,2006
[14] Shuichi Murakami, Naoto Nagaosa, and Shou-Cheng Zhang, “Dissipationless Quantum Spin Current at Room Temperature”, Science 301, 1348 (2003)
[15] J. Wunderlich, B. Kaestner, J. Sinova, and T. Jungwirth, “Experimental Observation of the Spin-Hall Effect in a Two-Dimensional Spin-Orbit Coupled Semiconductor System”, Phys. Rev. Lett.94, 047204, 2005.
[16] Y. K. Kato, R. C. Myers, A. C. Gossard, and D. D. Awschalom, “Observation of the Spin Hall Effect in Semiconductors”, Science 306, 1910 (2004)
[17] O. Mosendz, V. Vlaminck, J. E. Pearson, F. Y. Fradin, G. E. W. Bauer, S. D. Bader, and A. Hoffmann, “Detection and quantification of inverse spin Hall effect from spin pumping in permalloy/normal metal bilayers” Phys. Rev. B.82, 214403, 2010.
[18] Yaroslav Tserkovnyak, Arne Brataas, Gerrit E. W. Bauer, and Bertrand I. Halperin, “Nonlocal magnetization dynamics in ferromagnetic heterostructures”, Rev. Mod. Phys.77(4), 2005.
[19] Axel Hoffmann, “Spin Hall Effects in Metals”, IEEE (1), 2014
[20] M. N. Baibich, J. M. Broto, A. Fert, F. Nguyen Van Dau, and F. Petroff, “Giant Magnetoresistance of (001)Fe/(001)Cr Magnetic Superlattices”, Phys. Rev. Lett. 61, 2472–2475, 1988
[21] http://prpc.phys.nthu.edu.tw/discovery_8.php
[22] http://tamt.yuntech.edu.tw/annual/49e/493.pdf
[23] http://www.nanotech-now.com/spintronics.htm
[24] http://web.physics.udel.edu/research/nanoscale-physics/spintronics
[25] Y. Kajiwara, K. Harii, S. Takahashi, J. Ohe, K. Uchida, M. Mizuguchi, H. Umezawz, H. Kawai, K. Ando,K. Takanashi, S. Maekawa, and E. Saitoh, “Transmission of electrical signals by spin-wave interconversion in a magnetic insulator”, Nature 464, 262-266, 2010
[26] K. Harii, K. Ando, H. Y. Inoue, K. Sasage, and E. Saitoh, “Inverse spin-Hall effect and spin pumping in metallic films ( invited )”, J. Appl. Phys. 103, 07F311,2008
[27] R. H. Silsbee, A. Janossy, and P. Monod, “Coupling between ferromagnetic and conduction-spin-resonance modes at a ferromagnetic —normal-metal interface”, Phys. Rev. B 19, 4382 ,1979
[28] Y. Tserkovnyak and A. Brataas, “Enhanced Gilbert Damping in Thin Ferromagnetic Films”, Phys. Rev. Lett. 88, 117601,2002
[29] S. Mizukami, Y. Ando, and T. Miyazaki, “Effect of spin diffusion on Gilbert damping for a very thin permalloy layer in Cu/permalloy/Cu/Pt films”, Phys. Rev. B 66, 104413 ,2002.
[30] G. Y. Luo , M.Y. Song , H. Y. Hung , Y.C.Chiu , J.Kwo , S. F. Lee , C. R. Chang , and J. G. Lin, “Spin Pumping Induced Inverse Spin-Hall Effects in La0.7Sr0.3MnO3 / Platinum Bilayer Film”, IEEE 48, 0018-9464, 2012
[31] CHENG P. WEN, “Coplanar Waveguide: A Surface Strip Transmission Line Suitable for Nonreciprocal Gyromagnetic Device Applications”, IEEE MTT-17, 12, 1969
[32] http://qucs.sourceforge.net/tech/node86.html
[33] http://www.brighthubengineering.com/manufacturing-technology/87512-theory-and-operation-of-magnetron-sputter-deposition-coating-process/
[34] http://hyperphysics.phy-astr.gsu.edu/hbase/magnetic/hall.html
[35] http://pvcdrom.pveducation.org/CHARACT/4pp.HTM
[36] http://www.mast-tech.com.tw/Resistivity%20Measurement.pdf
[37] http://www.mast-tech.com.tw/4PP-Introduction-e-learnning.pdf
[38] http://pvcdrom.pveducation.org/CHARACT/4pp.HTM
[39] Mariko Koike, Eiji Shikoh, Yuichiro Ando, Teruya Shinjo, Shinya Yamada, Kohei Hamaya, and Masashi Shiraishi, “Dynamical Spin Injection into p-Type Germanium at Room Temperature”, Appl. Phys. Express 6, 023001, 2013
[40] Dazhi Hou, Z. Qiu, K. Harii, Y. Kajiwara, K. Uchida, Y. Fujikawa, H. Nakayama, T. Yoshino, T. An, K. Ando, Xiaofeng Jin, and E. Saitoh, “Interface induced inverse spin Hall effect in bismuth/permalloy bilayer”, Appl. Phys. Lett. 101, 042403, 2012.
[41] Kazuya Ando, Yosuke Kajiwara, Kohei Sasage, Kenichi Uchida, and Eiji Saitoh, “Inverse Spin-Hall Effect Induced by Spin Pumping in Various Metals”, IEEE 46, 9, 2010
[42] CHARLES KITTEL, “On the Theory of Ferromagnetic Resonance Absorption”, Phys. Rev. 73, 2, 1948
[43] http://www.pascal-co-ltd.co.jp/products/deppld_pacplmbe.html
[44] http://www.dualsignal.com.tw/30913255112866637709sputter.html
[45] http://zh.wikipedia.org/wiki/%E5%B8%83%E6%8B%89%E6%A0%BC%E5%AE%9A%E5%BE%8B
[46] http://idc.ord.ncku.edu.tw/files/11-1080-8524-1.php