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研究生: 王元亭
Wang, Yuan-Tin
論文名稱: 放電結球細微銅導線抗拉強度之韋伯解析研究
A Study of Weibull Analysis on Ultimate Tensile Strength of Fine Copper Wires after EFO Process
指導教授: 陳立輝
Chen, Li-Hui
呂傳盛
Lui, Truan-Sheng
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 58
中文關鍵詞: 銅線韋伯
外文關鍵詞: copper wire, Weibull
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  •   銅線使用於打線接合相較於金線有成本低、強度高及導電率高等優勢,但氧化及延展性不足等因素使得銅線於銲線時的可靠度降低,其中,在銲線時產生的斷線亦為使可靠度下降之因素;因此本研究針對ψ=25μm之純銅線,以改變線材之退火條件(150℃~250℃,持溫一小時) ,來探討銅線放電結球前後之機械性質與微觀組織,並針對結球後之拉伸強度進行可靠度分析。

      實驗結果顯示,退火溫度於200℃上可得到完全退火材,其強度下降,延性上升,組織由單方向細長之晶粒再結晶形成等軸之晶粒。各不同退火條件下之線材經放電產生之結球其球端為柱狀晶組織,球端之頸部由於受熱影響會產生再結晶及組織粗大的現象,且微硬度值及抗拉強度的表現較差,導致結球後之結球拉伸斷裂位置發生於熱影響區間,且拉伸數據的變動範圍較大。

      韋伯分析結果顯示,各退火條件下之韋伯模數皆屬於m >1之磨耗破壞型,完全退火之線材經放電結球後,其抗拉強度相較於未退火之線材結球會具有較好之可靠度,其中又以200℃退火條件之線材表現最佳。

      The advantages of copper wire for wire bonding are lower cost, higher strength and electrical conductivity in comparison with gold wire. Oxidation and insufficient ductility of copper wire resulted in low reliability in the copper wire bonding process, and fracture during wire bonding process is also a factor that reduces reliability. In this study, copper wires (ψ=25μm) of different annealing temperature (150~250℃, hold 1hr) had been melted into a ball by the EFO (Electric Flame Off) process and discussed both the mechanism properties and microstructure with wires and FAB (Free Air Ball). Then the UTS of the wires after EFO process had been discussed by reliability analysis.

      As results as the experiments, fully annealed wires could be obtained as annealing temperature was above 200℃. The elongated grains transformed into equiaxed grains due to recrystallization above 200℃, and the tensile data showed lower strength and higher elongation. The microstructure of copper wire FABs revealed columnar grains. The melting of wire tail resulted in a temperature gradient and caused the variation in properties over the region called the heat-affected zone (HAZ). The HAZ showed the lower hardness and UTS due to the recrystallization and growth of new grains. This result made the fracture occurred in HAZ in tensile test and also caused the distribution of the tensile data showed a larger range.

      As results as the Weibull analysis, the Weibull modulus under all annealing conditions were wear-out failure mode. UTS of fully annealed wires after EFO process had better reliability than as-drawn wires. And 200℃ was the best condition of annealing.

    中文摘要…………………………………………………………… Ⅰ 英文摘要…………………………………………………………… Ⅱ 誌謝………………………………………………………………… Ⅲ 總目錄……………………………………………………………… Ⅵ 表目錄……………………………………………………………… Ⅶ 圖目錄……………………………………………………………… Ⅷ 第一章 前言………………………………………………………………1 第二章 文獻回顧…………………………………………………………2 2-1 打線接合技術……………………………………………………2 2-2 銅銲線製程………………………………………………………3 2-3 材料可靠度與破壞率……………………………………………3 2-3-1 材料可靠度工程之統計意義…………………………………3 2-3-2韋伯分佈函數 (Weibull Distribution Function)………5 2-3-3 相關係數r與決定係數………………………………………8 2-3-4 破壞形態的種類……………………………………………8 2-3-5韋伯三參數之物理意義……………………………………………9 第三章 實驗步驟與方法………………………………………………19 3-1 實驗材料……………………………………………………………19 3-2 退火熱處理…………………………………………………………19 3-3 拉伸試驗…………………………………………………………19 3-3-1 線材拉伸測試……………………………………………………19 3-3-2 結球拉伸測試……………………………………………………20 3-3-3 結球拉伸測試之可靠度分析……………………………………20 3-4 微硬度試驗…………………………………………………………20 3-4-1 線材微硬度測試…………………………………………………20 3-4-2 結球微硬度測試…………………………………………………20 3-5 微觀組織分析………………………………………………………21 第四章 實驗結果………………………………………………………26 4-1 微觀組織特徵觀察…………………………………………………26 4-1-1 不同熱處理之線材組織變化……………………………………26 4-1-2 結球微觀組織觀察………………………………………………26 4-2 熱處理對線材機械性質之影響……………………………………27 4-2-1 拉伸測試結果……………………………………………………27 4-2-2 微硬度測試結果…………………………………………………27 4-3 結球拉伸試驗結果…………………………………………………27 4-4 結球拉伸測試之可靠度分析………………………………………28 第五章 討論………………………………………………………………47 5-1 放電結球對微觀組織之影響………………………………………47 5-2 放電結球對機械性質之影響………………………………………47 5-3 退火熱處理對結球拉伸強度之影響………………………………48 5-4 退火熱處理與可靠度之關連性……………………………………48 第六章 結論………………………………………………………………54 第七章 文獻回顧…………………………………………………………55 附錄………………………………………………………………………57 附錄一 不同退火溫度線材之UTS……………………………………57 附錄二 不同退火溫度線材結球後之UTS……………………………58

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