本研究以介電泳力(DEP Force)與光誘發介電泳力(Light Induced DEP Force)為驅動方式，成功的排列、操縱微米粒子於微機電製造的微小晶片中。有別於傳統光鉗利用光壓差來移動微小粒子，以介電泳力為驅動方式有著減低光源能量、較小的工作電壓、較大的操縱範圍、同時操縱大量微粒子、較簡易的實驗設備等優點。
本研究設計了兩種不同的實驗晶片，分別以介電泳與光誘發介電泳為機制來操縱微米粒子，其差別在於前者需要預先定義出電極的圖形，後者只需定義光源之圖形，在晶片製造上較簡易且操縱粒子之機動性較大，可發展成為新一代之光電鉗。利用光誘發介電泳為機制所設計的晶片如下，我們以上下兩片薄板夾著100um厚度的PDMS水槽作為實驗晶片，其中上薄板為透明電極氧化銦錫(ITO)，下薄板使用玻璃做底材，濺鍍上鋁電極並沉積一層光電薄膜作為光導層。在以特定頻率的交流訊號加於上下兩電極後，將高功率光束打入光導層，使產生一虛擬電極於光導層上誘使介電泳效應產生，以正介電泳力操縱PDMS水槽內的10um乳膠粒子，並以光學顯微鏡配合CCD影像擷取系統即時的觀測微粒子的移動軌跡。
同時我們利用CFDRC分析軟體模擬介電泳鉗的電場梯度、介電泳力場、微粒子運動之軌跡等，並以光電薄膜之光導電係數為改變參數，探討薄膜特性對光誘發介電泳效應之影響。

This thesis presents experimental studies on the light induced dielectrophoresis (DEP) force in a single MEMS based chip. For the light induced DEP force tweezers, non-uniform electric fields created by light patterns are used as holding forces to trap and move the particles. It has more advantages than conventional optical tweezers, needs less optical power level, larger manipulating area, lower operating voltage, and both micro- or sub-micro particles can be easily manipulated.
DEP and light induced DEP forces are used as major mechanism to manipulate particles which patterned and pattern-less electrode are designed to form non-uniform electric fields respectively. Light induced DEP tweezers consists of two surfaces, a top transparent electrode indium tin oxide (ITO) glass, and a bottom glass substrate sputtering Al as electrode and coated with photoconductive film. An AC signal is applied between two surfaces at a specific frequency. Particles immersed in DI water are sandwiched between two surfaces. Then patterned light source illuminated onto the photoconductor forms a virtual electrode to transport the particles by using DEP force, just like a virtual tweezers.
In this study, the simulation was performed with the CFD-ACE+ software. Electric potential, electric field, DEP force and particles trajectories are simulated to verify our design concepts.
In addition, particles behaviors are observed and captured by using optical microscope and digital CCD camera and then display on a PC monitor. When applying an AC signal with a specific frequency, particles move toward the expected positions due to DEP effects.

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