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研究生: 朱育弘
Chu, Yu-Hung
論文名稱: 以聚焦離子束製作具微奈米結構之鍍金基板於表面增顯拉曼散射之應用
Focused Ion Beam Based Micro/nano-structured Au Substrate for the Application of Surface Enhanced Raman Scattering
指導教授: 廖峻德
Liao, Jiunn-Der
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2010
畢業學年度: 98
語文別: 中文
論文頁數: 72
中文關鍵詞: 表面增顯拉曼散射聚焦離子束R6G流行性感冒病毒
外文關鍵詞: Surface Enhanced Raman Scattering (SERS), FIB, R6G, influenza virus
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  • 醫學領域上精確且快速之診斷感染疾病方式一直以來為研究之重要方向,而利用表面電漿共振(SPR)現象之技術發展越來越受人矚目,特別是表面增顯拉曼散射(SERS)之應用逐漸成熟並開始運用在致病物種之檢測,現今SERS領域上開始發展利用具微奈米結構修飾之SERS效應基板方式來增強待測物訊號,並解決傳統以奈米粒子膠體溶液增顯會有再現性不足之問題。本研究利用聚焦離子束(FIB)方式在鍍金基材表面上直接進行微奈米結構陣列之製作來排除化學微影製程之化學汙染與步驟繁瑣費時之缺點,並藉由聚焦離子束可程式化精準製作出微奈米即結構之特色製作出不同特性之微奈米結構,來對影響SERS之結構上的幾何參數進行靈敏度之探討。研究中,先利用FIB製作出不同尺寸、間距與幾何形狀之微奈米結構陣列,且利用羅丹明6G(R6G)分子探針進行利用微拉曼光譜儀進行SERS效應之檢測與評估,結果顯示對於結構尺寸從300, 250 , 200和150 nm縮小時,150 nm尺寸大小之位於檢測區內結構數越多相對增加熱區之範圍使得訊號增強,而結構彼此間距從83, 58 ,45, 31, 26減少至22 nm時,結構間越近會引發熱區(hot spot)來提升電磁效應之貢獻使訊號增強;當變化微結構本身形狀所引發之避雷針效應(lightning rod effect)也會加強電磁效應使SERS效果加強,研究中具最多邊角之六邊形有較佳之SERS效果;在幾何參數之變化下,對其SERS之影響程度也有所差異,SERS之靈敏度為改變結構間距遠近較高,其次為形狀,而結構尺寸影響程度較小。利用所製作之SERS效應基板進行A型流行性感冒H1N1亞型病毒作拉曼光譜之檢測,得到胺基酸如苯丙胺酸與色胺酸以及蛋白質之資訊,推測訊號來自病毒外層包膜之蛋白質等結構,顯示以SERS效應基板方式能有效檢測出致病物種,達到快速精確檢測之目的。

    The study of rapid and accurate diagnosis is of infectious diseases important in the medical field. The development of techniques using surface plasmon resonance (SPR) has become popular and has been applied in the detection of pathogens. Especially the application of surface enhanced Raman scattering (SERS) grows up and begins to be used for the detection of pathogens. Compared with traditional nanoparticles, micro/nanostructures on specific substrate have potentials to be used as SERS-active substrates, which are used to enhance the signal of species. In this study, we used focused ion beam (FIB) to fabricate micro/nanostructures array on the Au film directly to avoid chemical pollution and save time. Besides, several parameters, such as dimension and space were also designed to study their effects on SERS. Finally, this SERS-active substrate was used to diagnose viruses.
    In this study, the micro/nanostructure with different dimensions, space and geometry (shape) in array were fabricated by FIB. Moreover R6G as a molecular probe was chosen to estimate the effect of SERS. Based on the results, it indicated higher intensity appeared as dimension and space were decreased because of more hot spot areas. In addition, we also found lightning rod effect induced by varying geometry of micro/nanostructure can also raise EM effect to enhance the signal. Taken together, SERS was affected by space, followed by geometry and finally by dimension.
    In the end of the study, we tried to detect the Raman spectra of influenza A virus WSN/33 (H1N1) through our SERS-active substrate. Raman spectra revealed the information of amino acids, phenylalanine and tryptophan, and proteins, indicated the information come from envelope and matrix proteins of virus. It was proved to be a new diagnostic method that is much sensitive and simple and able to detect viruses.

    目錄 摘要 I Abstract II 誌謝 III 目錄 V 表目錄 VII 圖目錄 VIII 第一章 緒論 1 1.1 研究背景 1 1.2 研究動機 2 1.3 文獻回顧 3 1.3.1 表面拉曼散射增顯 3 1.3.2 奈米級結構對表面拉曼散射增顯之影響 3 1.3.3 聚焦離子束於微奈米結構之製作 8 1.4 研究目的 10 第二章 理論基礎 11 2.1 拉曼光譜 11 2.1.1 振動光譜 11 2.1.2 拉曼散射理論 13 2.2表面增顯拉曼散射光譜(Surface Enhanced Raman Scattering, SERS) 17 2.2.1 表面電漿(surface Plasmon) 18 2.2.2電磁效應(Electromagnetic effect) 20 2.2.4 化學效應(chemical effect) 23 第三章 實驗材料與方法 24 3.1 實驗流程 24 3.2 實驗材料與方法 25 3.2.1 基板清洗 25 3.2.2 以電子束蒸鍍機進行金薄膜製備 25 3.2.3 SERS效應基板製作 26 3.2.4 分子探針溶液製備 27 3.2.5 拉曼檢測 29 3.2.6 訊號處理 30 3.3 製程儀器 31 3.3.1 電子束蒸鍍機 (electron beam evaporation) 31 3.3.2 雙束型聚焦離子束 (Dual-beam focused ion beam; DB-FIB) 31 3.4 分析儀器 33 3.4.1 顯微拉曼光譜儀 (Microscopes Raman Spectrometer) 33 3.4.2 掃描式電子顯微鏡 (Scanning Electron Microscopy) 34 第四章 結果與討論 36 4.1拉曼光譜分析之校正 36 4.1.1 拉曼光譜量測之正規化 36 4.1.2 增顯因子(enhancement factor, EF)之評估 38 4.2微奈米結構陣列內結構尺寸於SERS之影響分析 40 4.2.1 表面形貌分析 40 4.2.2表面增顯拉曼散射光譜分析 43 4.3 微奈米結構陣列內結構間距於SERS之影響分析 47 4.3.1表面形貌分析 47 4.3.2表面增顯拉曼散射光譜分析 49 4.4微奈米結構陣列內結構幾何形狀於SERS之影響分析 51 4.4.1表面形貌分析 51 4.4.2表面增顯拉曼散射光譜分析 53 4.5 幾何參數於SERS效應基板之靈敏度分析 55 4.6 A型流行性感冒H1N1亞型病毒之表面增顯拉曼散射光譜分析 59 第五章 結論 62 參考文獻 63 附錄 71

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