近年來，無線網路感測器亦或穿戴式裝置的應用日益增加，其中關鍵的是一體積小、能長時間供應能源的電池，然而一般微型電池已開始無法滿足其需求。微型能源採集器可從周遭環境轉換能源為電能，其中熱電能源採集器能夠將環境中廢熱轉換成可用之電能，而且無可動組件加上電能供應穩定可靠性高。故本論文利用現有最新金氧半導體製程技術，考量其材料奈米性質運用於結構設計並加以分析。透過分析數值模型，其元件之功率輸出為0.125 μW/cm2K2，電壓方面係數為25.91 V/cm2K。最終設計一矽鍺微型熱電能源採集器晶片，晶片尺寸為 2.2 mm × 2.25 mm，其中並聯三組矽鍺微型熱電能源採集器，總輸出電壓3.75 V及輸出功率2.084 μW。

In the development of wireless sensor network and wearable device, battery endurance is one of the most problems. Thermoelectric generator can convert electric power from environment without requiring moving components. This thesis proposes a novel thermoelectric energy harvester by TSMC 0.18 μm BiCMOS mixed signal SiGe standard process. The simulation of low-dimension thermoelectric materials property shows that the optimal power factor 0.125 μW/cm2K2 and voltage factor 25.91 V/cm2K can be achieved by a thermoelectric energy harvester with thermoleg length and width 45 μm × 2 μm. A 2.2 mm × 2.25 mm thermoelectric energy harvester chip with three sets of 2.01 mm × 0.72 mm harvester in parallel provides 3.75 V and 2.084 μW.

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