隨著現代產品微小化與系統的整合，因而發展出微細加工與精密加工，為了減少因外界振動破壞加工的精度，甚而降低產品的良率，因而在加工過程中如何減少外界震動的影響成為重要的議題。而主動式避震系統能藉由外加能量的方式，來滿足系統在各種環境中所需的抑震規格，研究上愈來愈受到重視，主動式避震系統經常使用天鉤阻尼控制，是利用主動元件產生虛擬阻尼使能夠針對共振峰值進行抑制，若能配合系統被動元件特性，設計所需的虛擬阻抗，將可提升避震性能。
因此，本論文的主要研究工作是主動式避震系統的阻抗估測與控制之整合應用技術，阻抗參數估測透過遞迴最小平方法(RLS)，計算原避震系統的等效阻抗，此方法無需額外架設儀器與配線，實驗所獲結果之系統參數的估測誤差約為2%。此外，藉由阻抗控制可以設計適當的系統自然頻率 與阻尼比 ，產生所需虛擬阻抗來增加避震性能。本研究所設計的控制器能使低頻 (<10Hz)的外界振動產生的影響降低到0dB以下，以達到抑制低頻震動的效果，並同時有效降低共振峰值大小。

As the demands of manufacturing have become more and more precise in modern times, requirements for anti-vibration technology have grown into a significant issue. Passive anti-vibration systems can work well to attenuate high frequency vibration, but have inherent low frequency resonance. Active anti-vibration systems, with extra energy, can achieve different goals in various applications and have recently become more and more popular in academic and industrial fields. This study applies to active anti-vibration by combining estimation and impedance control parameters. First, the recursive least squares (RLS) method is adopted to estimate the real impedance of the anti-vibration system. With the known parameters, we used impedance control to produce a virtual impedance force in order to reduce low-frequency vibrations by changing the equivalent and . The experimental results will show that parameters estimated by RLS are very close to those evaluated by the dynamic signal analyzer (SR785). Additionally the impedance control can successively reduce the magnitude of the low-frequency response and the peak value of resonance.

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