銬型電極是神經性義肢重要的元件之一。它可用來刺激運動神經元或是紀錄感覺神經元訊號。神經電極植入人體後，當施於神經之壓力大於20mmHg時，會對神經產生不良影響。因此銬型電極與神經介面間的壓力是監測神經健康狀態之重要指標。本研究除了改良先前發展的銬型電極外，並發展整合電容式微壓力感測器的新型電極。
　　本研究利用熱處理方式製作出電極金表面凸起的銬型電極，但實驗結果顯示電極表面的凸起或凹陷對於神經訊號的量測雜訊比並無太大的影響。另外，成功製作出一電容式微壓力感測器，其感測電極尺寸為7000m×7000m，量測範圍為0-50mmHg，靈敏度為0.01pF/mmHg。此外，發現感測器中介電層之波松比與遲滯比等特性對感測器是重要的設計參數和絕緣層厚度會影響感測器的電容初始值。

　　Cuff electrode is an indispensable component in a neural prostheses system. It is used to stimulate the motor neuron and to record neural signals from the peripheral nerve. It is known that a pressure larger than 20mmHg has a harmful effect to the nerve trunk. Measuring the interface pressure between the cuff and the nerve trunk provides a means to monitor the health of nerve trunk. Therefore, the goals of this study are twofold: first, to improve the measurement performance of cuff electrodes and second, to develop a micro capacitive pressure sensor embedded into the cuff electrode.
　　In current study, the fabrication of a cuff electrode with a convex structure on the surface of gold electrode is suggested by using heat treatment. However, experiment result revealed that there is no significant difference in measurement performance between the electrodes with either the convex surface or the concave surface. In addition, a micro capacitive pressure sensor is successfully developed and tested. The dimension of the sensing electrode measured 7000m×7000m; the range of pressure measurement was from 0 to 50 mmHg; and the sensitivity was 0.01 pF/mmHg. It is found design the Poisson’s ratio and hysteresis properties of the dielectric layer has significant effect on sensor design and a thickness of the insulated layer affects the initial capacitance of the pressure sensor.

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