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研究生： 姚冠仲
Yao, Guan-Zhong
論文名稱： 脈衝雷射斜角鑽孔成形之研究
The contours of the drilling hole in pulsed laser drilling with inclination angles
指導教授： 林震銘
Lin, Jehn-ming
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2010
畢業學年度： 98
語文別： 中文
論文頁數： 117
中文關鍵詞： 斜角鑽孔 、脈衝雷射 、輔助氣流
外文關鍵詞： inclination angle, laser drilling, pressure
相關次數： 點閱：122  下載：5 
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    • 本文探討脈衝雷射斜角鑽孔成形，以數值分析與實驗研究雷射功率密度、靶材角度及壓力對錐孔輪廓之影響。在數值分析方面以自行編寫之數值分析程式，分析脈衝雷射斜角鑽孔成形中，不同雷射功率密度、靶材傾斜角度及壓力下，錐孔之深度與寬度變化；另以流體計算軟體FLUENT模擬斜板上輔助氣流之流場分佈特性，觀察壓力分佈與斜板角度之關係。實驗上以Nd-YAG脈衝雷射及同軸噴嘴進行石墨靶材之斜鑽孔加工，藉由改變靶材傾斜角及輔助氣流壓力，觀察鑽孔輪廓之差異；並觀察不同斜角鑽孔汽化煙塵之擴散現象，經由實驗結果得到煙塵擴散幾近垂直於靶材表面。經由數值分析與實驗結果比較，若提升雷射功率密度及壓力，可得到較大之鑽孔深度與寬度，且增加靶材傾斜角度可使錐孔寬度越大。

    The contours of the drilling hole in pulsed laser drilling with various laser intensities, inclination angles and drilling pressures have been investigated numerically and experimentally in the study.

    In the numerical analysis, a computation model was developed to analyze the profiles of the drilling holes at various process parameters. The flow structure of the shielding gas on the substrate at various inclination angles was simulated. In the experiment, the graphite targets were drilled by an Nd-YAG pulsed laser. The laser induced plume at various inclination angles was also visualized.

    Both the numerical and experimental results show that the increase of laser intensity and pressure will increase the depth and width of drilling hole, furthermore the increase of inclination angle will increase the width of drilling hole.

    摘要……………………………………………………Ⅰ Abstract………………………………………………………Ⅱ 誌謝……………………………………………………Ⅲ 目錄……………………………………………………Ⅳ 表目錄…………………………………………………Ⅷ 圖目錄…………………………………………………XI 符號說明………………………………………………XVI 第一章緒論………………………………………………1 1-1 研究目的…………………………………………1 1-2 文獻回顧 …………………………………………4 1-2.1 雷射鑽孔………………………………………4 1-2.2 輔助氣流效應…………………………………8 1-3 本文架構…………………………………………9 第二章製程原理………………………………………10 2-1 雷射光之特性……………………………………10 2-1.1 雷射光模態……………………………………10 2-1.2 功率密度之高斯分佈…………………………11 2-1.3 雷射光束品質…………………………………13 2-1.3.1 高斯光束之聚焦……………………………14 2-1.3.2 雷射光束品質因子M2……………………… 17 2-1.3.3 光纖導引Nd-YAG雷射系統…………………18 2-1.3.4 雷射光束之偏極性…………………………22 2-2 噴嘴震波的形成……………………………………23 2-3輔助氣流流場之數值分析…………………………24 2-3.1流場方程式………………………………………24 2-3.1.1 擾流方程式…………………………………24 2-3.1.2 氣動方程式…………………………………27 2-4 雷射鑽孔機制……………………………………29 2-4.1 蒸氣分子數量密度……………………………30 2-4.2 一維熱暫態傳導方程式………………………31 2-4.3 材料移除率與總移除量………………………32 第三章數值計算結果……………………………………34 3-1加工材料之特性……………………………………35 3-2 雷射光束在斜板上之分佈特性……………………35 3-3 鑽孔深度計算及孔形輪廓建立……………………39 3-4 數值計算流程………………………………………40 3-5 材料移除計算結果…………………………………42 3-5.1 溫度模擬結果……………………………………43 3-5.1.1 材料表面溫度隨時間變化……………………44 3-5.1.2 表面移除量與鑽孔深度………………………46 3-5.1.3 不同靶材斜角之鑽孔孔形輪廓………………47 3-5.1.4 環境壓力對鑽孔的影響………………………51 3-5.2 斜板輔助氣流之模擬……………………………52 3-5.2.1 幾何範圍和網格之建立及物理條件……………52 3-5.2.2 FLUENT模擬結果與討論………………………54 3-6 結果與討論……………………………………………60 第四章實驗…………………………………………………61 4-1輔助氣流對錐孔孔形影響之實驗……………………61 4-1.1 孔形量測參數定義…………………………………61 4-1.2實驗設備與配置……………………………………63 4-1.3 實驗結果與討論……………………………………66 4-1.3.1 靶材傾斜角度對錐孔寬度與深度的影響………66 4-1.3.2 輔助氣流對鑽孔輪廓的影響……………………70 4-1.3.3 實驗結果與模擬之比較…………………………73 4-2 煙塵觀測實驗…………………………………………76 4-2.1 實驗方法……………………………………………76 4-2.2 實驗配置……………………………………………77 4-2.3 實驗結果與討論……………………………………79 4-3 結果與討論……………………………………………83 第五章綜合討論與建議……………………………………84 5-1 綜合討論………………………………………………84 5-2 相關建議及未來發展…………………………………86 參考文獻……………………………………………………88 附錄A ABCD法則………………………………………92 附錄B 方程式之離散……………………………………95 附錄C GAMBIT繪製網格………………………………97 附錄D FLUENT分析之斜板氣流震波結果……………99 附錄E 脈衝雷射鑽孔實驗圖……………………………103 附錄F 輔助氣流對蒸氣煙塵作用觀測實驗……………116

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