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研究生： 謝宗勳
Hsieh, Chung-Hsun
論文名稱： 彩色濾光片彩色層鍍膜製程品質提升之研究
Study on Quality Enhancement for the Colored Layer Coating Procedure of Color Filter
指導教授： 趙隆山
Chao, Long-Sun
學位類別： 碩士
Master
系所名稱： 工學院 - 工程科學系碩士在職專班
Department of Engineering Science (on the job class)
論文出版年： 2008
畢業學年度： 96
語文別： 中文
論文頁數： 76
中文關鍵詞： 鍍膜 、穿透率及擠壓式塗佈法 、彩色濾光片 、色度
外文關鍵詞： Slit Die Coating, Color Filter, Coater, Colorimetric, Transmittance
相關次數： 點閱：92  下載：3 
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    • 隨著顯示器市場推陳出新，如面板大型化、低價化、廣視角(Multi-domain Vertical Alignment)、廣色域(Wild Color Gamut)、高對比、高穿透度、高色彩飽和度等條件以滿足消費者市場需求，其中彩色濾光片(Color Filter)為液晶顯示器呈現色彩之關鍵材料，因此彩色濾光片色度(Colorimetric)要求條件亦相形嚴峻。在彩色濾光片製造方法中，顏料分散法之光微影製程因具備高信賴性、高解析度、及耐高溫特性，廣為業界採用，但是面板大型化與低價策略影響下，彩色濾光片更被要求降低成本，於是減化製程步驟、低材料成本、高直通率成為彩色濾光片重要議題之一。
    本文之研究將旋轉塗佈轉換成擠壓式塗佈(Slit Die Coating)方式可提高光阻利用率至90％以上，並將鉻黑色矩陣(Cr Black Matrix)轉換成樹脂黑色矩陣(Resin Black Matrix)可減化鍍鉻製程、降低材料成本與減少重金屬所造成環境污染。另一重要議題為色彩飽和度與對比度，由於紅、藍、綠三原色膜厚高，色再現性(Color Reproduction)將會提升，但其穿透率是降低的，所以色度(膜厚)與穿透率(對比度)相互衝突的特性，需要由光阻特性之改變取得高色度與高對比度之平衡，上述兩點之重要議題為本實驗主軸及探討之主題。

    As TFT-LCD products bring forth the new through the old, the market demands become more and more critical, such as large-size panel, low price, multi-domain vertical alignment, wild color gamut, high contrast, high transmittance, high saturation of color, etc. In a LCD, the color filter is the key part for color appearance and hence the colorimetric requirement becomes rigorous. Among the fabricating methods of color filter, the photolithographic process of pigment dispersion method possesses high reliability, high contrast and high temperature endurance, which is generally used by the TFT-LCD company. However, under the influences of large size panel and low price policy, it is asked to cut the cost of color filter. Accordingly, the simplification of fabrication procedure, the decrease of material cost and the high throughput become the important topics.
    In this study, the slit die coating is used instead of slit-spindle coating for the coating process and the performance of the new scheme is evaluated. The utilization ratio of photo resistance can be improved and the ratio after improvement is more than 90%. Since the material of black matrix can be changed from chromium to resin, this could reduce the chromium coating process, material cost and heavy metal pollution. The other important topics are the saturation of color and the contrast ratio. Since the film thicknesses of the three primary colors (red, blue and green) increase with the new method, the color reproduction will be improved; however, the transmittance will decrease. The conflict between colorimetric (thickness) and transmittance (contrast ratio) must be balanced by changing the photo-resistance characteristic. Hence the exploration of the two key points, thickness and transmittance, described above is the primary purpose of this work.

    摘要..........................................................................................................I Abstract....................................................................................................II 誌謝.........................................................................................................IV 目錄..........................................................................................................V 表目錄.....................................................................................................Ⅳ 圖目錄......................................................................................................Ⅴ 第一章 緒論.............................................................................................1 1-1 前言....................................................................................................1 1-2文獻回顧.............................................................................................2 1-3 研究動機............................................................................................4 1-4 論文架構............................................................................................5 第二章 彩色濾光片製程與色度量測模式.............................................6 2-1 彩色濾光片製程方法........................................................................6 2-1-1 黑色矩陣(BM：Black Matrix)製程品質要求.............................6 2-1-2 彩色層(Red、Green、Blue)製程品質要求................................8 2-1-3 曝光、顯影製程品質要求..........................................................9 2-2 CIE色彩理論...................................................................................10 2-2-1可見光與色彩..............................................................................11 2-2-2色度三刺激值..............................................................................11 2-2-3加法混色......................................................................................13 2-3實驗模式與控制因子......................................................................15 第三章實驗設備與方法.........................................................................17 3-1實驗設備..........................................................................................17 3-2現行所採用之各種規範..................................................................18 3-3 實驗設計參數.................................................................................18 3-3-1實驗模式Case A...........................................................................20 3-3-2實驗模式Case B...........................................................................21 3-3-3實驗模式Case C...........................................................................22 第四章 結果與討論.................................................................................24 4-1擠壓式塗佈(Slit Die Coater)與色度膜厚之變化.............................24 4-2曝光量(Exposure)與膜厚之關係.....................................................26 4-3後烤(Post-oven)與膜厚色度之關係................................................27 4-4拋光(Polish)與膜厚色度之關係......................................................28 第五章結論與未來展望.........................................................................30 參考文獻.................................................................................................32 附錄1表色系與用語...............................................................................36 附錄2塗佈平坦度與彩色濾光片之膜厚斷面圖...................................38 表1.1彩色濾光片產品特性要求............................................................39 表1.2彩色濾光片（RGB）設計規格.....................................................40 表2.1色彩的分類.....................................................................................41 表2.2可見光波長.....................................................................................42 表2-3實驗設計參數因子.........................................................................43 表3.1現有之色度規範.............................................................................44 表3.2彩色濾光片（RGB）設計規格.....................................................45 表4.1各光阻用量.....................................................................................46 表4.2紅綠藍色溼膜之膜厚.....................................................................46 表4.3濕膜色度及穿透率.........................................................................47 表4.4紅綠藍色乾膜之膜厚.....................................................................48 表4.5乾膜色度及穿透率.........................................................................49 表4.6紅色拋光前後之穿透率.................................................................50 表4.7綠色拋光前後之穿透率.................................................................50 表4.8藍色拋光前後之穿透率.................................................................51 表4.9拋光後之膜厚.................................................................................51 圖1.1 液晶顯示器中三原色....................................................................52 圖1.2 CIE 1931色彩空間.........................................................................52 圖1.3 NTSC、CRT、LCD之色域比較....................................................53 圖1.4塗佈方法與光阻用量之比較(資料來源 TOK)..............................53 圖2.1彩色濾光片結構.............................................................................54 圖2.2 CIE 1931 Yxy色度圖.....................................................................54 圖2.3可見光波長.....................................................................................55 圖2.4色彩匹配實驗方法.........................................................................55 圖2.5彩色濾光片 紅、綠、藍製程色度量測........................................56 圖3.1實驗量測點.....................................................................................57 圖3.2狹縫式塗佈機構造.........................................................................58 圖3.3分光光譜儀.....................................................................................59 圖3.4畫素尺寸..........................................................................................60 圖3.5人眼之可見光範圍..........................................................................60 圖3.6曝光步驟..........................................................................................61 圖3.7拋光機台示意圖..............................................................................61 圖4.1濕膜色度與NTSC.............................................................................62 圖4.2濕膜色度與NTSC.............................................................................62 圖4.3濕膜色度(Red) .................................................................................63 圖4.4濕膜色度(Green) ..............................................................................63 圖4.5濕膜色度(Blue) ................................................................................64 圖4.6膜厚與露光量...................................................................................64 圖4.7烘烤後色度.......................................................................................65 圖4.8烘烤後色度......................................................................................65 圖4.9 OVEN烘烤後色度(Red) ..................................................................66 圖4.10 OVEN烘烤後色度(Green) .............................................................66 圖4.11 OVEN烘烤後色度(Blue) ................................................................67 圖4.12全尺寸方式量測點..........................................................................68 圖4.13乾膜色度與穿透(Red) ....................................................................69 圖4.14乾膜膜厚與穿透(Red) ....................................................................69 圖4.15乾膜色度與穿透(Green) .................................................................70 圖4.16乾膜膜厚與穿透(Green) .................................................................70 圖4.17乾膜色度與穿透(Blue) ....................................................................71 圖4.18乾膜膜厚與穿透(Blue) ....................................................................71 圖4.19紅色拋光前後穿透率之影響...........................................................72 圖4.20紅色拋光前後色度之影響...............................................................72 圖4.21綠色拋光前後穿透率之影響...........................................................73 圖4.22綠色拋光前後色度之影響...............................................................73 圖4.23藍色拋光前後穿透率之影響...........................................................74 圖4.24藍色拋光前後色度之影響...............................................................74 圖4.25拋光前後穿透率之影響...................................................................75 圖4.26拋光後之色度...................................................................................75 圖4.27拋光後之色度...................................................................................76

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