本研究之目的在建立微感測器之性能測試程序及水聲微感測器之應用及推廣，測試用感測器為微機電製程之壓阻式感測器。感測原理為利用微機電製程裡的面型加工所形成的薄膜結構，在感測面適當位置鋪上適當的壓阻材料，當受到聲壓使薄膜變形改變壓阻阻抗，經由惠斯敦電橋輸出信號可量測其感度(Sensitivity)。與商業用的B&K8104比較後，微機電製程之壓阻式感測器有較好之感度。本文亦整合聲學實驗設備，提供使用者自動化掃頻(sweep frequency)測試，藉由改變不同頻率聲波及利用結構本身具有自然頻率之特性，在特定頻率聲波下，結構共振產生較高訊雜比，此特定頻率可做為感測器在水中的工作頻率，利用本研究開發之程式可以快速得知感測器之工作頻率。本文亦討論水下通訊程式於資料傳遞之應用，利用水聽器B&K 8104做為訊號發射端及接收端，在60公分距離內達到132bps傳輸速率，位元錯誤率(Bit Error Ratio, BER)為8%，未來可做為微感測器應用時的測試基礎。

　This study focus on establishing the standard characteristics testing on MEMS sensor. Also the application and promotion for underwater acoustic MEMS sensor are our goal. These testing sensors are piezoresistive sensors which fabricated by MEMS process. Comparing with the commercial hydrophone B&K 8104, MEMS sensors have better sensitivity.
　We build an auto sweep frequency program for users. To set the initial frequency, interval frequency and end frequency coefficients, the program can automatically generate the user-defined swept frequencies. By changing the acoustic frequency, if the acoustic frequency equal to the structure’s natural frequency, the resonance induce high signal-to-noise ratio. The specific frequency could be the sensor’s working frequency in water. According to the auto sweep frequency program, sensor’s frequency response and working frequency can be quickly determined.
　We also apply the MEMS sensor as the receiver element in underwater communication. The B&K 8104 is used to be a projector to generate the codes. In 60cm transmitting distance , our experiment results in 132bps transmitting speed and 8% bit error ratio. The result can be the foundation of MEMS sensor applications.

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