近年來隨著智慧製造產業的發展，加工和檢測的方式已從傳統人工操作到自動化產線完成，其精度也從毫米等級往微奈米等級進步，在有足夠定位精度需求的自動化高速運動任務中，快速定位和振動抑制技術起著至關重要的作用。一個典型的例子如自動化光學檢測(AOI)機台，由於固有的結構剛性和快速運動期間產生的慣性力，對於點對點運動而言殘余振動將不可避免，這意味著需要更多的等待時間來避免模糊的圖像，而搭載一額外的精密平台搭配控制系統，能有效提升機台的振動抑制能力，從而提升檢測效率。因此本研究發展出一具撓性結構的橡膠軸承主動平台，依據此平台設計相應的控制系統，將平台安裝於線性馬達上，並透過架設CCD鏡頭，驗證主動平台系統的振動抑制能力。在平台設計上，以四組橡膠搭配中心鋁塊組成橡膠軸承拘束平台運動，平台前端固定撓性結構，仿照真實機台中剛性較低的鏡頭支撐結構，以實驗進行系統進行模型參數辨識最終確立了主動平台的數學模型。在控制器設計上，本研究基於平台數學模型，採用了L.T.設計法和輸入修正法進行控制設計，通過L.T.設計法先後發展出發展出A方案與B方案分別應對系統的定位和減振能力。在平台定位方面，A方案的過衝量及安定時間分別為9.2%和0.16s，搭配輸入修正則降至7.1%及0.09s；在振動抑制方面，於線性馬達上進行振動抑制，A方案的殘留振動與安定時間分別為154.1%和1.3s，搭配輸入修正法則為31.0%和0.60s，因此回授控制搭配輸入修正比照單一控制能有效提升系統定位及減振的能力。為進一步提升回授控制系統擾動抑制能力，發展出的B方案在殘留振動與安定時間分別為30.4%與0.25s，減振能力的提升更為明顯。在CCD影像檢測中，主動平台系統採用上述控制策略皆能提早觀測到清晰的產品特徵。本研究設計一主動平台，運用不同的控制器設計，實現了主動平台定位以及減振的能力，並透過影像結果證實了主動平台搭配控制器能夠有效降低光學檢測過程中殘留振動，從而提升光學檢測效率。

Along with the development of industrial technologies in various manufacturing and metrology applications, fast positioning and vibration suppression play important roles in virtually all tasks requiring high speed of maneuvers with sufficient motion accuracy. One typical example is on the optical inspection system, it performs numerous product defect inspections by fast moving to the desired inspection locations and take images for defect evaluation. Due to the inherent structural compliance and the inertial force generated during fast movement, residual vibrations will be inevitable for the point-to-point movement and this implies that additional settling time would be required for avoiding blurred images. Obviously, mounting a controllable stage on machine can effectively reduce residual vibration, thereby improving inspection efficiency. Therefore, this work develops an active stage with rubber bearings and flexible structure equipping with a CCD camera, designs the corresponding controller, and verifying the vibration suppression capability of the active stage system under the action of the linear motor. In terms of stage design, the four sets of rubber-bonded aluminum blocks form rubber bearing which provide stiffness of the stage, and a flexible beam is mounted on stage for imitating the camera-support structure of the real machine. The model parameters are identified by dynamic testing and the mathematical model of the active stage is obtained. In terms of controller design, this work adopts both loop transmission (L.T.) shaping and input shaping methods. Through the L.T. method, two schemes called A and B, have been developed successively to handle the positioning and vibration suppression. On the issue of stage positioning, the overshoot and settling time of the A scheme are 9.2% and 0.16s. Once it cooperating with input shaping scheme, the corresponding performance can be further reduced to 7.1% and 0.09s. On the vibration suppression issue, the residual vibration and settling time of the A scheme are originally 154.1% and 1.3s and are improved to 31.0% and 0.60s with input shaping schemes. Therefore, the shaping-control integration can effectively improve the system controlled performance in comparison with the results from control only. Meanwhile, in order to further improve the vibration suppression in feedback control, we also develop the B scheme and it successfully reduces residual vibration and settling time to 30.4% and 0.25s. Finally, essential AOI inspection experiments are carried. Based on captured image, the active stage employ above schemes can indeed reduce the blur level to achieve a faster inspection. This work successfully confirmed that the active stage control system can effectively reduce residual vibration during optical inspection, thereby improving inspection efficiency.

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