本論文內容主要分為四部分： (a)平面式雙頻帶通濾波器與超寬頻帶通濾波器之設計；(b) 以共面波導傳輸線(CPW)與負載樁式共振器設計之三頻帶通濾波器；(c) 步階阻抗型負載樁式共振器設計之四頻帶通濾波器；(d) 以氮化鋁薄膜披覆之高阻值矽基板技術以及設計於該基板上之毫米波低通與高通濾波器。
第一部分介紹具有雙頻帶之帶通濾波器之設計，其內容為分別討論四個濾波器元件之設計。首先討論可應用於無線區域網路(WLAN) 系統，中心頻率位於2.4 GHz與5.2 GHz之雙頻帶通濾波器，其以步階式阻抗共振器控制頻率，並以交錯耦合方式增加傳輸零點而增強了雙通帶之選擇性(selectivity)。第二個元件則為一雙工器元件，其結合可用於超寬頻（UWB）系統，通帶範圍為2.98至 5.1GHz的寬頻帶通濾波器，以及中心頻率位於2.4 GHz的藍牙（Bluetooth）的帶通濾波器所組成。藉由良好設計的T型匹配電路連接，可使二濾波器獨立運作而不互相干擾，形成一具有三埠的雙工器元件。第三個元件則是以平行耦合線結合槽線結構實施的雙頻超寬頻（UWB）帶通濾波器之設計。其利用一可產生傳輸零點的槽線結構，可在通帶範圍為3.4至 9.9 GHz的超寬頻（UWB）系統內，於5.2 GHz處製造一壓抑量為18 dB以上的傳輸零點，可隔離5-6 GHz頻段內之無線區域（WLAN）網路信號干擾。
在第二部分之研究中，則介紹具有三通帶的二組帶通濾波器之研究，首先為以共面波導傳輸線（CPW）實現之三頻帶通濾波器，其以半集總式電路法（semi-lump）設計，具有低諧波干擾之優點，且可各別調整通帶之中心頻率，達成一具有高自由度之設計，其中心頻率位於1.30 GHz，2.03 GHz 及 2.74 GHz。且因共平面波導結構設計具有易實現於微波積體電路（MMIC）上之特性，因此該設計具有可實現於毫米波頻段之潛力。第二個濾波器則為以微小化的負載樁式共振器（SLR）所設計的三頻帶通濾波器，負載樁式共振器具有單一共振器可產生三個可控制之共振模態的特性，因此藉由調整該三個共振態之頻率，可達成以二個共振器設計出三頻率帶通濾波器之目標，可將所需使用之共振器數量減到最少，達到縮小元件尺寸之目的，其為目前最微小化之三頻濾波器設計。此外，以零度饋入方式使其可於三個通帶之間產生二個傳輸零點而具有良好的通帶選擇性。其中心頻率為2.4 GHz、3.5 GHz與5.2 GHz，可應用於無線區域網路（WLAN），全球互通微波存取（WiMAX）之系統。
於第三部分研究中，本論文提出一四頻帶通濾波器之設計。以第二部分所提出之負載樁式共振器為基礎，搭配步階式阻抗共振器之設計原理改良。可產生第四個可控制之共振模態。因此可以單一共振器產生四共振模態之方式，實現一使用最少共振器數量之四頻帶通濾波器，其具有元件尺寸微小化之優點。該濾波器中心頻率分別為1.8 GHz、2.4 GHz、3.5 GHz與5.2 GHz，可應用於全球行動通訊系統（GSM），無線區域網路（WLAN），全球互通微波存取（WiMAX）之系統。此外，以零度饋入方式使其可於四個通帶之間產生四個傳輸零點，使該濾波器之複數個通帶間具有高阻隔性。
於第四部分研究中，本論文提出以氮化鋁薄膜作為高阻值基板之表面披覆膜，降低以氧化層披覆基板時，所造成基板的微波損失。以氮化鋁薄膜披覆之共面波導線在17 GHz時具有較低的衰減量為0.5 dB/mm。並以共面波導傳輸線形式設計了截止頻率位於 23 GHz的高通濾波器以及截止頻率為32 GHz的低通濾波器元件，實現氮化鋁薄膜披覆基板應用於毫米波頻段之元件設計技術。

The thesis divides into four parts: (a) design of the dual-band bandpass filters and UWB filters (b) design of the tri-band bandpass filters based on coplanar waveguide line (CPW) and stub loaded resonator (SLR); (c) design of the quad-band bandpass filter using the SLR with stepped impedance resonator section；and (d) surface passivation method with AlN film on high resistivity silicon (HRS) substrate and the design of the millimeter CPW filter on AlN passivated HRS substrate .
In the first part of the dissertation, we introduce four bandpass filter designs. First, we proposed a the dual-band bandpass filter designed by using the stepped impedance resonator (SIR) to control the frequencies locations to correspond to the wireless local area network (WLAN) 2.4 and 5.2 GHz applications, and cross-coupling method is used to create the transmission zeros at passband edge to achieve the goal of high selectivity; the second device is a diplexer designed with two passbands corresponding to UWB system with bandwidth of 2.98-5.1 GHz, and t Bluetooth system with center frequency at 2.4 GHz. By means of the T-junction matching circuit, the two filters can operate individually without interference each other to form a 3-port diplexer ; the third device is the design of the dual-band bandpass filter with UWB response by using the combination of slot-line and parallel couple line structure. A stub loaded slot-line can be used to create a transmission zero at 5.2 GHz with suppression above 18 dB within the bandwidth of 3.4-9.9 GHz. The method can be used to avoid the interference from the WLAN within 5-6 GHz.
In the second part of the dissertation, we propose the research about two bandpass filters with triple passband response. First, the tri-band bandpass filter realized by coplanar waveguide line (CPW) is proposed with semi-lump mechanism, which exhibits the property of less harmonic interference. Furthermore, the passband center frequency can be adjusted individually and thus high design freedom can be achieved. The center frequencies in this application are 1.30 GHz, 2.03 GHz and 2.74 GHz. This design has the potential of being used to realize the monolithic microwave integrated circuit (MMIC) design. The second device is a compact tri-band bandpass filter designed by stub loaded resonator (SLR) with three controllable resonant modes. By means of tunning the frequencies of the three resonant modes, tri-band filter response can be designed by only one pair of resonators, therefore the number of the resonator for realizing tri-band filter can be reduced to achieve the goal of compact size. Furthermore, the zero degree feed method are used to create two transmission zeros between the three passbands and thus good passband selectivity are induced. The proposed device is designed with the center frequencies at 2.4, 3.5 and 5.2 GHz, corresponding to the system requirement of the WLAN, and WiMAX(Worldwide Interoperability for Microwave Access) services.
In the third part of the dissertation, we propose the design of the bandpass filter with quad-passband response. The quad-band filter is designed based on the tri-mode SLR proposed in the second part of the dissertation. With combing the design theory of SIR to improve the tri-mode SLR, the fourth controllable resonant mode is induced. Therefore the improved SLR with quad-mode property can create four transmission poles to realize design of a compact quad-band bandpass filter with the minimum number of resonators. The quad-band filter has the passband center frequencies at 1.8 GHz, 2.4 GHz, 3.5 GHz and 5.2 GHz, which can be used for global system for mobile communications (GSM), WLAN, and WiMAX. Besides, good passband selectivity and isolation are also achieved by inducing four transmission zeros locating between the four passbands and passband edge.
In the fourth part of the dissertation, we propose a new surface passivation method by using aluminum nitride (AlN) film as the passivation layer to suppress the surface conductive channel on high resistivity silicon (HRS). The improved effects on reducing the attenuation in microwave region have been verified with the measured attenuation of 0.5 dB/mm at 17 GHz. Furthermore, the integrated millimeter-wave high-pass filter (HPF) and low-pass (LPF) have been fabricated on such substrate. The measured results have a satisfied insertion loss lower than 1 dB, return loss of -14 dB, and a transmission zero appeared in the passbnad edge to enhance the band selectivity. Therefore, this study is helpful for improving the passive device performance as introducing the HRS.

Chapter 1
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