本研究使用直流非平衡磁控濺鍍法，探討TiN/ZrN多層膜的性質首先濺鍍TiN、ZrN單層膜，考慮硬度及附著力來尋找單層膜之最佳參數，得到硬度之最佳參數P1(N2流量45sccm，Ar流量45sccm，靶材電流3.5A，基板偏壓-40V，工作壓力1.5×10-3Torr，濺鍍距離10cm)及附著力最佳參數P2(N2流量45sccm，Ar流量45sccm，靶材電流2.5A，基板偏壓-50V，工作壓力2×10-3Torr，濺鍍距離10cm)之後再開始濺鍍TiN/ZrN多層膜。本研究採用兩種不同之參數P1、P2濺鍍TiN/ZrN多層膜，在P1參數下改變濺渡之週期厚度(λ=9nm、17nm、25nm、35nm)，且增加一組濺鍍距離5cm之參數來探討隨著多層膜之濺鍍距離改變其性質的變化情形；在P2參數下改變濺渡之週期厚度(λ=5nm、7nm、10nm)，也增加一組濺鍍距離5cm之參數來討論隨著多層膜之濺鍍距離改變其性質的變化情形。研究結果顯示，TiN/ZrN多層膜之硬度值最大可達50GPa，附著力最高為50N，耐磨耗壽命更是TiN、ZrN單層膜之3~4倍。

　We use D.C. unbalanced magnetron sputter to deposit TiN、ZrN single layer first, and find the optimum parameter of single layer from adhesion force and hardness. The optimum parameter of hardness is P1(N2 flow rate 45sccm, Ar flow rate 45sccm, target current 3.5A, substrate bias -40V, working pressure 1.5×10-3Torr, sputter distance 10cm). The optimum parameter of adhesion force is P2(N2 flow rate 45 ccm, Ar flow rate 45sccm, target current 2.5A, substrate bias -50V, working pressure 2×10-3Torr, sputter distance 10cm). Then we use two different parameter P1、P2 to deposit TiN/ZrN multilayer, and change the periodic thickness under P1(λ=9nm、17nm、25nm、35nm). Besides, we add the sputter distance 5cm to discuss the change of property with different sputter distance. We change the periodic thickness under P2(λ=5nm、7nm、10nm). Besides, add the sputter distance 5cm to discuss the change of property with different sputter distance. From the experimental results, The maximum hardness of TiN/ZrN multilayer is up to 50GPa, the maximum adhesion force is 50N. The wear life of TiN/ZrN multilayer is 3~4 times better than TiN、ZrN single layer.

參考文獻
1. S. J. Bull, and A. M. Jones, “Multilayer Coatings for Improved Performance”, Surf. Coat. Technol., 78, (1996) 173-184.
2. W. –H. Soe, and R. Yamamoto, “Mechanical Properties of Ceramic Multilayers: TiN/CrN, TiN/ZrN, and TiN/TaN”, Materials Chemistry and Physics, 50, (1997)176-181.
3. H. Holleck and V. Schier, “Muliilayer PVD Coatings for Wear Protection”, Surf. Coat. Technol., 76-77, (1995)328-336.
4.S. A. Barnett, A. Madan, L. Kim, and K. Martin, “Stability of Nanometer-Thick Layers in Hard Coatings”, MRS Bulletin/March, (2003)169-172.
5. H. Holleck, M. Lahres, and P. Woll, “Muliilayer Coatings – Influence of Fabrication Parameters on Constitution and Properties”, Surf. Coat. Technol., 41, (1990)179-190.
6. X. Chu, M. S. Wong, W. D. Sproul, and S. A. Barnett, “Mechanical Properties and Microstructure of Polycrystalline Ceramic/Metal Superlattices: TiN/Ni and TiN/Ni0.9Cr0.1”, Surf. Coat. Technol., 61, (1993)251-256.
7. 楊玉森，硬質鍍膜技術與工業應用，2002年中華民國鍍膜科技研討會暨國科會計畫研究成果發表會，(2002) 。
8. M. Nordin, M. Larsson, S. Hogmark，”Mechanical and tribological properties of multilayered PVD TiN/CrN, TiN/MoN, TiN/NbN and TiN/TaNcoatings on cemented carbide”Surf. Coat. Technol, 106, (1998)234-241.
9. S.M Rossnagel et al., “Handbook of plasma processing technology”, Noyes Publications, Park Ridge, New Jersey, U.S.A, (1982)
10. Brain Campman, “Plasma”, Glow Discharge Process, (John Wiley & Sons, NewYork, U. S. A, (1980), Chap.3.
11. 林光隆, 國立成功大學 材料科學及工程學系, “材料表面工程講義”, chap.7, (2001).
12. L. John Vossen and Werner Kerm, “Thin Film Process”, Academic Process, (1999), pp.134.
13.吳正杰,國立成功大學材料科學及工程學系, ”以濺射共沈積法成長ITO-ZnO複合透明導電薄膜之性質研究”, (2004).
14. R. F. Bunshah, “Deposition Technologies for Films and Coatings”, Noyes Publications, Park Ridge, New Jersey, U. S. A., (1982)
15. J. Venables, “Nucleation and Growth of Thin films”, Rep. Prog. Phys., 47, (1984) 399.
16. 李輝煌,“田口方法-品質設計的原理與實務”, (2000).
17. W. D. Callister, JR., Materials Science and Engineering: An Introduction, 5th ed., John Wiley & Sons, Inc., New York, (1999).
18. S. J. Bull, and A. M. Jones, “Multilayer Coatings for Improved Performance”, Surf. Coat. Technol., 78, (1996)173-184.
19. H. Holleck and V. Schier, “Muliilayer PVD Coatings for Wear Protection”, Surf. Coat. Technol., 76-77, (1995)328-336.
20. H. Holleck , and H. Schulz, “Advanced Layer Material Constitution”, Thin Solid Films, 153, (1987)11-17.
21. O. Knotek, F. Lffler, and G. Krmer, “Multicomponent and Multilayer Physically Vapour Deposited Coatings for Cutting Tools”, Surf.Coat. Technol., 54-55, (1992)241-248.
22. J. S. Koehler, “Attempt to Design a Strong Solid”, Phys. Rev., B2, (1970)547-551.
23. S. L. Lehoczky, “Strength enhancement in thin-layered Al-Cu laminates”, J. Appl. Phys., 49, (1978)5479-5485.
24. U. Helmersson, S. Todorova, S. A. Barnett, and J. –E. Sundgen, “Growth of Single-Crystal TiN/VN Strained-Layer Superlattices with Extremely High Mechanical Hardness”, J. Appl. Phys., 62, (1987)481-484.
25. X. Chu, M. S. Wong, W. D. Sproul, S. L. Rohde, and S. A. Barnett“Deposition and Properties of Polycrystalline TiN/NbN Superlattice Coatings”, J. of Vac. Sci. Techno., A10, (1992)1604-1609.
26. K. M. Hubbard, T. R. Jervis, P. B. Mirkarimi and S. A. Barnett“Mechanical properties of epitaxial TiN/(V0.6Nb0.4)N superlattices measured by nanoindentation”, J. Appl. Phys. 72, (1992)4466-4468.
27. P. B. Mirkarimi, L. Hultman, and S. A. Barnett, “Enhanced Hardness in Lattice-matched Single-Crystal TiN/(V0.6Nb0.4)N superlattices”, Appl. Phys Lett., 57, (1990)2654-2656.
28. K. K. Shih and D. B. Dove, “Ti/TiN, HfN/Hf-N and W/WNx Multilayer Films with High Mechanical Hardness”, Appl. Phys Lett., 61, (1992)654-656.
29. K. K. Shih and D. B. Dove, “Ti/TiN, HfN/Hf-N and W/WNx Multilayer Films with High Mechanical Hardness”, Appl. Phys Lett., 61, (1992)654-656.
30. J. H. Xu, G. Y. Li, and M. Y. Gu, “The Microstructure and Mechanical Properties of TaN/TiN and TaWN/TiN Superlattice Films”, Thin Solid Films, 370, (1998)45-49.
31. W. H. Soe, and R. Yamamoto, “Mechanical Properties of Ceramic Multilayers: TiN/CrN, TiN/ZrN, and TiN/TaN”, Materials Chemistry and Physics,50, (1997)176-181.
32.P. Wallen, S. Hogmark, ”Influence of TiN coating thickness on wear of high speed steel at elevated temperature”, Wear, Vol.130, Iss.1, (1989)122-135.
33.J. C. Doong, J. G. Duh and S. Y. Tasi, ”Wear behavior in TiN coatings modified by an electroless Ni interlayer on mild steel”, Surface and Coatings Technology, 58, (1993)151-155.
34.楊春欽譯,摩擦與磨耗-“磨耗”,(1984)139-140.
35.W. C. Oliver, G. M.Pharr，”An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments”, J. Mater. Res., 7, (1992) 1564.
36.D. J. Rich, A. J. Perry ,P. F. Woerner, ”Spalling resistance of cemented carbide with physically and chemically vapor deposited coatings”, Thin solid Film, 154, (1987)417-424.
37.Raymond G. Bayer,“MECHANICAL WEAR PREDICTION AND PREVENTION”, (1994)
38.V. V. Uglov, V. M. Anishchik, V. V. Khodasevich, ”Structure characterization amd mechanical properties of Ti-Zr-N cocating,deposited by vacuum arc”, Surf. Coat. Tech., 180-181, (2004)519-525.
39.U. Wahlstrom, L.Hultman, J. E. Sundgren, F. Adibi, I. Petrov, J. Egreen, ”Crystalgrowth and microstructure”, Thin Solid Films, Vol.235, (1993)pp.62.
40.H. J. Bae, C. M. Lee and S. K. Hwang, S. W. Choi, ”Effects of Processing Variables on The Mechanical Properties of Multilayer Coatings of TiN/ZrN on a High-Speed Tool-Steel Substrate”, J. Korean. Phys. Soc., 33, (1998)689-695.
41. U. Helmersson, S. Todorova, S. A. Barnett, and J. E. Sundgen, “Growth of Single-Crystal TiN/VN Strained-Layer Superlattices with Extremely High Mechanical Hardness”, J. Appl. Phys., 62, (1987)481-484.
42.經濟部技術處金屬工業研究發展中心,”金屬加工用刀工具材料及處理技術手冊”,(2000)169~170.