影像交互相關EBSD技術基於微小應變理論，比對應變前後晶體EBSD菊池圖譜得晶軸移動量，近一步計算預測晶體應變與旋轉量。以A.J. Wilkinson 為首之研究團隊廣泛利用影像交互相關EBSD技術於陶瓷薄膜、金屬、天然礦物等材料之應變與晶體旋轉的量測，且回報其應變與旋轉量測準確度可達10^(-4)、10^(-2)度。然而HR-EBSD的高精準量測建立在EBSD系統的精細校正、試片本身應力狀態以及針對不同情況需要的修正方案等等，使其應用範圍有所限制。
本研究將使用數位交互相關軟體分析EBSD菊池圖譜，首先以OIM軟體生成鎳晶體沿試片座標軸RD, TD, ND轉動前後，不同晶體方位的模擬菊池圖譜，利用自開發DIC軟體分析晶體轉動後菊池圖譜中影像特徵的二維轉動、位移量。另外也使用自開發DIC軟體分別分析鎳晶體轉動的模擬圖譜、壓痕試驗後鎳單晶試片之四組晶軸位移，再計算出晶體相對座標軸RD, TD, ND的方位差、應變，結果顯示三軸轉動中，RD旋轉的量測旋轉值最接近給定晶體旋轉角度。以HR-EBSD法量測晶體旋轉得到的晶軸位移會計算出不存在的剪應變值，剪應變與量測旋轉角度誤差值隨旋轉角度增加的趨勢相同。

The angle resolution is the smallest angle that can be distinguished between two objects. The higher the resolution, the smaller the angle that can be detected. In the electron backscatter diffraction (EBSD) experiment, the angle also represents the misorientation between scanning points. In traditional EBSD, the misorientation can be obtained by scanning and calculating the crystal orientation. In high-resolution EBSD, it uses the measurement of the zone axis displacement to obtain the displacement gradient, and then calculate the misorientation.
This research incorporates digital image correlation (DIC) method into EBSD techniques. With the help of the self-developed DIC software, we are able to correlate the corresponding image features of different experimental Kikuchi patterns to gain the displacement gradients, from which the rotation components can be calculated. First, the OIM software will be used to generate the simulated Kikuchi pattern of different crystal orientations before and after the nickel crystal is rotated along the sample axes RD, TD and ND. Self-developed DIC software will be used to analyze the in-plane rotation and displacement of Kikuchi pattern image features. In addition, the self-developed DIC software will measure shifts of four zone axes on each of the experimentally collected EBSD patterns after the nickel single crystal sample conducted indentation test. Lattice rotation and shear strain can be calculated from the measured zone-axis shifts.

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