壓電致動平台由於自身體積小、高頻率響應、所需功率低且精度運動可達到奈米甚至次奈米等級精度等優點，可廣泛用於在光學影像、超精密機械加工系統、半導體產業應用上。本研究中利用滯滑運動方式設計壓電致動平台，並將這些類型之平台運用在光學影像系統如穿隧式X光顯微系統 (Transmission X-Ray microscopy)及微米級X光顯微系統(Micro-resolution X-ray imaging)。
在訊號處理方面，使用光學編碼器量測制平台的位移訊號，再利用Labview訊號擷取卡做訊號處理及自動控制，最後透過訊號放大電路控制壓電致動平台達到閉迴路之運用。
本研究設計之壓電致動平台在開迴路的方式下單位移量可達20nm左右，結合編碼器光學尺能讓位移量控制在3nm以內，且設計之壓電致動平台的尺寸極小能運用在空間狹小的實驗上，並開發一種新穎電刷式平台結合壓電致動平台解決平台旋轉時電線纏繞問題。本實驗也使用光學編碼器與雷射干涉儀驗證壓電致動平台之解析度差異。

In this thesis, we use the stick-slip principle of piezo stage to design the nanopositioning system and it has been used in some x-ray optical imaging system, such as transmission x-ray microscopy and micro-resolution x-ray imaging. This system has about 3nm resolution with closed loop control method. The closed loop control method consisting of optical encoder, amplifier, and Labview DAQ card which are used for position measurement, signal processing and automatic control. The piezo nanopositioning stage with tiny size can be used in a limited space experiment. In addition, we will introduce how to design the slip ring type of piezo stage and use it to solve the problem of wires being tangled during rotation. Moreover, the resolution of piezo nanopositioning stage has been verified by the optical encoder and the interferometer.

[1] Curr. Biol,. 2011 Jan 11; 21(1):1-11.
[2] Jianping Li, Xiaoqin Zhou, Hongwei Zhao, Mingkun Shao, Pengliang Hou and Xiuquan Xu “Design and experimental performances of a piezoelectric linear actuator by means of lateral motion,” IOPscience , 2015
[3] Saeid Bashash, Nader Jalili “Robust Adaptive Control of Coupled Parallel Piezo-Flexural Nanopositioning Stages,” IEEE/ASME Transaction on mechatronics, Vol. 14, no. 1, (2009)
[4] Xiantao Suna, Weihai Chena, Jianbin Zhang b, Rui Zhoua, Wenjie Chen “A novel piezo-driven linear-rotary inchworm actuator,” Sensors and Actuators A: Physical, Volume 224, 1 April 2015, Pages 78–86
[5] Jiang Guoa, Sze Keat Chee b, Takeshi Yano b, Toshiro Higuchi “Micro-vibration stage using piezo actuators,” Sensors and Actuators A: Physical Volume 194, (2013), Pages 119–127
[6] Matthew B. Starr, Xudong Wang, “Coupling of piezoelectric effect with electrochemical processes,” Nano Energy 14, 296–311 (2015)
[7] D. Vatansever, E Siores and T. Shah “Alternative Resources for Renewable Energy: Piezoelectric and Photovoltaic Smart Structures,” InTech, DOI: 10.5772/50570. (2012)
[8] http://www.smaract.com/technology/
[9] J.Y.Peng, X.B.Chen “Modeling of Piezoelectric-Driven Stick–Slip Actuators,” IEEE/ASME Transactions on Mechatronics Volume: 16, Issue: 2, (2011)
[10] Wouter O. Schotborgh, Frans G.M. Kokkeler, Hans Trager, and Fred J.A.M. van Houten, ”Dimensionless design graphs for flexure elements and a comparison between three flexure elements”, Precision Engineering, Vol. 29, Issue. 1, pp. 41-47, 2005. 18. G.
[11] Yuen Kuan Yong, Sumeet S. Aphale, S. O. Reza Moheimani ” Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning” IEEE Transactions on Nanotechnology ( Volume: 8, Issue: 1, Jan. 2009 )
[12] Ho Je Jung1, Jung Hyun Kim1 “Novel Piezo Driven Motion Amplified Stage,” International Journal Of Precision Engineering And Manufacturing, Vol. 15, No. 10, pp. 2141-2147 (2014)
[13] http://www.ni.com/white-paper/52419/en/
[14] http://www.instrumentation.co.za/article.aspx?pklarticleid=4108
[15] En-Te Hwu, Evgeny Nazaretski, Yong S. Chu, Huang-Han Chen, Yu-Sheng Chen, Weihe Xu, Yeukuang Hwu Chen “Design and characterization of a compact nano-positioning system for a portable transmission x-ray microscope,” Review of Scientific Instruments 84, 123702 (2013)