本研究分別以CeO2/FTO與CeO2/TiO2/FTO感測膜製作EGFET酸鹼度感測器，探討製備變因對感測膜之結構性質以及在pH 2~pH 12感測特性的影響。以下分為兩大主軸：(一) 以溶膠凝膠法來製備CeO2薄膜，並以旋轉塗佈法將溶膠塗佈於FTO，來製作CeO2/FTO酸鹼度感測器。改變製備變因為：前驅鹽濃度、固含量、旋轉速率、塗佈次數、煅燒溫度、溶膠反應時間、溶劑種類及鈰前驅鹽之影響。(二) 以溶膠凝膠法製備CeO2薄膜與電紡法製備TiO2粒子來製作CeO2/TiO2/FTO複合材料之酸鹼度感測器。改變製備變因為：旋轉塗佈速率、電紡收集時間與工作電壓。
綜合以上變因之結果，影響感測值因素可歸納為兩點：表面活性基座數(NS)與片電阻值(R)。藉由減小粒子尺寸、增大比表面積，以增加活性座數目供氫離子吸附；控制薄膜厚度來減少片電阻值與增加粒子結晶度有利電訊傳遞，皆可使感測值上升。
本實驗中最佳CeO2/FTO感測元件製備條件為：前驅鹽濃度21.12mM，固含量1 wt%，旋轉速率1000 rpm，塗佈次數1次，煅燒溫度500 oC，溶膠凝膠反應時間12 h，溶劑為丙醇-水混合系統，前驅鹽為Ce(NO3)3·6H2O。最佳感測值為87.19 mV/pH，線性度為0.9975。CeO2/TiO2/FTO最佳元件製備條件為：CeO2薄膜製作方式與上述相同，但旋轉速率為2000 rpm；TiO2薄膜為電紡收集時間1 min，工作電壓為15 kV。最佳元件感測值為75.69 mV/pH，線性度為0.9988。
吾人亦針對最佳元件進行遲滯、時漂等穩定性探討，結果顯示兩種元件穩定性高且對氫離子具有極佳之選擇性。值得一提的是其元件生產成本低具有可拋性、體積小等優勢，因此未來在pH值應用相關方面具有其開發價值及發展潛力。

In this study, CeO2/FTO and CeO2/TiO2/FTO pH sensors based on extended gate field-effect transistors (EGFET) were fabricated. The influences of variables on properties of sensing films were investigated and the sensing characteristics of devices to pH were also explored in pH range from 2 to 12. At first, a novel ceria based transistor type pH sensor was fabricated by the facile sol-gel method. Starting from the cerium precursor reacting with alcohol/water, the resultant CeO2 nanoparticles was uniformly deposited on the FTO substrate by means of spin-coating technique. Among the studied CeO2/FTO devices, the best device shows an extremely high pH sensitivity of 87.19 with a good linearity of 0.9975 in the pH range of 2~12. Secondly, TiO2 films were deposited on FTO substrate by electrospinning, then CeO2 nanoparticles deposited on TiO2/FTO by sol-gel method to fabricate CeO2/TiO2/FTO sensing devices. Among the studied CeO2/TiO2/FTO devices, the best device shows an extremely high pH sensitivity of 75.69 with a good linearity of 0.9988 in the pH range of 2~12. In summary, both CeO2/FTO devices and CeO2/TiO2/FTO devices revealed good sensing performance and exhibited a good long time stability. With advantage of easy fabrication and low cost, they have great potential in pH sensing development for various application.

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