傳統的聚焦式超聲波換能器所得到的訊號，是將壓電材料的所有感測面積接收到的反射聲波做積分疊加而得到一個單一輸出訊號，如此則無法得到有用的聲場資訊或材料內部的缺陷資訊。因此本論文以P(VDF-TrFE)當作壓電材料製作與傳統聚焦換能器不同的新型解析與陣列式超聲波換能器，利用黃光微影的方式在石英柱的內凹曲面製作13個陣列式感測單元，各個單元可獨立的接收訊號且輸出，進而得知更詳細的聲波資訊。
本文利用商用針尖式水聽器量測此陣列換能器所產生之不同平面的入射聲場，且搭配角頻譜(angular spectrum)理論計算，實驗量測的入射聲場與理論計算有極高的相似性，並建構COMSOL有限元素模型來驗證角頻譜理論，模擬之聲場與角頻譜之預測聲場也有相當高的相似程度。此外，本論文利用自製的新型解析與陣列式超聲波換能器做試材之缺陷檢測，分別檢測有側通孔之PMMA及有表面裂紋之不鏽鋼，PMMA的部份可量測到側通孔之位置及孔洞內之材質差異，不鏽鋼的上表面裂紋則可量測到其深度及傾斜方向。

Traditional focusing ultrasound transducer produces only one output signal by integrating all waves received in the entire sensing area of a piezoelectric material. In this way useful information of wave field is lost. In this thesis, P(VDF-TrFE), which is a polymer piezoelectric material, is used for fabricating a new type of analytic back scattering arrayed ultrasound transducer. Using photolithography, thirteen independent P(VDF-TrFE) sensing elements are fabricated on the concave surface of an acoustic lens. Detailed and important information of reflected waves are captured and analyzed with application on non-destructive evaluation.
Commercial needle hydrophones are used to measure incident acoustic field. Based on angular spectrum analysis, incident and reflected wave fields at different locations can be predicted and compared with experiment measurements and numerical simulation by COMSOL Multiphysics®. Good agreements are observed. This analytic back scattering arrayed transducer is applied for non-destructive evaluation to detect circular inhomogeneity in a polymer solid and surface cracks in a stainless steel block. The position of inhomogeneity and crack depth and tilting direction can be detected.

[1] 彭朋畿, "鋼結構之非破壞檢測技術簡介." 中華民國鋼結構協會資料
[2] C.-H. Chung, Y.-C. Lee, S.-H. Kuo, and C.-L. Chiu, "A novel back scattering ultrasound transducer for non-destructive material evaluation and defect inspection," IEEE Ultrasonics Symposium, vol. 1, pp. 174-177, 2005.
[3] C.-H. Chung and Y.-C. Lee, "A Novel Back Scattering Ultrasound Transducer for Nondestructive Material Evaluation," IEEE Ultrasonics Symposium, vol. 1, pp. 46-49, 2006.
[4] H. Kawai, "The piezoelectricity of poly (vinylidene fluoride)," Japanese Journal of Applied Physics, vol. 8, pp. 975-976, 1969.
[5] E. Fukada, "History and recent progress in piezoelectric polymers," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 47, pp. 1277-1290, 2000.
[6] S. Smolorz and W. Grill, "Focusing PVDF transducers for acoustic microscopy," Research in Nondestructive Evaluation, vol. 7, pp. 195-201, 1996.
[7] J. W. Goodman, Introduction to Fourier optics: Roberts and Company Publishers, 2005.
[8] P. R. Stepanishen and K. C. Benjamin, "Forward and backward projection of acoustic fields using FFT methods," The Journal of the Acoustical Society of America, vol. 71, pp. 803-812, 1982.
[9] C. J. Vecchio, M. E. Schafer, and P. A. Lewin, "Prediction of ultrasonic field propagation through layered media using the extended angular spectrum method," Ultrasound in Medicine & Biology, vol. 20, pp. 611-622, 1994.
[10] M. Silk and B. Lidington, "The potential of scattered or diffracted ultrasound in the determination of crack depth," Non-Destructive Testing, vol. 8, pp. 146-151, 1975.
[11] B. Dutton, A. Clough, M. Rosli, and R. S. Edwards, "Non-contact ultrasonic detection of angled surface defects," NDT & E International, vol. 44, pp. 353-360, 2011.
[12] OLYMPUS, "Introduction to Phased Array Ultrasonic Technology Applications," OLYMPUS Corporation, 2007.
[13] OLYMPUS, "Ultrasonic Transducer Technical Notes," OLYMPUS Corporation, 2006.
[14] 邱巨霖, "壓電式PVDF水聽器與解析式超音波換能器之研究," 國立成功大學機械工程研究所, 碩士論文, 2006.
[15] 朱品儒, "解析式超音波換能器之量測與分析," 國立成功大學機械工程研究所, 碩士論文, 2010.
[16] 李奕顯, "超音波檢測應用於圓管焊接道缺陷檢測," 國立成功大學機械工程研究所, 碩士論文, 2013.
[17] 羅杰斯, "解析式背向散射陣列換能器之製作與應用," 國立成功大學機械工程研究所, 碩士論文, 2013.