本研究主要以微波電漿輔助化學氣相沉積成長奈米鑽石薄膜，實驗中先討論鑽石鍍膜前，前處理的方式與差異；隨後分別比較鑽石薄膜沉積在各種基板上的差異，並討論鑽石在大氣中施以熱處理後鑽石薄膜在表面形貌、拉曼光譜、X 光光電子能譜與電性質上的改變。研究中發現，使用金屬鍍層鎢能夠有效的促進鑽石的成長，將成長速率由235 nm/hr提升至640 nm/hr，且與沉積與矽基板上的鑽石相比其結構並無明顯差異。
之後將所沉積出來的鑽石薄膜在大氣環境中施以熱處理，藉由拉曼光譜、掃描式電子顯微鏡、X光繞射、AFM、X 光光電子能譜等儀器，對熱處理後的鑽石薄膜性質做分析；實驗中，使用了三種不同參數所沉積的鑽石來作為熱處裡的試片，此三種鑽石分別具有不同的晶粒尺寸，觀察其在熱處理後試片表面形貌的變化，進一步比較不同大小的鑽石顆粒對於抵抗氧化能力的差異；並且利用黃光微影製造一電性值的量測元件，量測熱處理後鑽石電性質的改變，發現電阻值與電容值回隨著熱處理而改變，且熱處理後鑽石的電阻值受到試片表面的SP2含量而電容值則與平均晶粒大小有關。

Nano-crystalline diamonds were deposited by microwave plasma enhanced chemical vapor deposition on different substrates such as tungsten coated silicon, quartz, silicon. The different substrates exhibit various surface characteristics such that nano-crystalline diamonds having different growth rate and thickness uniformity were obtained. Selected diamonds were heat treated at different temperatures, ranging from 100 to 500 ℃ in ambient air for 1 hr. The heat treated diamonds were then subjected to not only property measurements but also material characteristics analyses. The capacitance a were determined before and after the heat treatments. In the mean time, atomic force microscopy, Raman spectroscopy, scanning electron microscopy, and X-ray Photoelectron Spectroscopy were used to characterize the as-deposited and heat-treated diamonds. Effects of heat treatments on the material characteristics are discussed. Correlation between the material characteristics and the electrical properties are also made.

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