本實驗以射頻濺鍍（Radio Frequency Sputtering）方式成長類鑽碳膜（Diamond like carbon Flims，DLCF）。以拉曼光譜來探討不同濺鍍功率與不同厚度之DLCF的品質優劣及退火過程對DLCF之影響。

結果顯示，在濺鍍功率210W、厚度61.6nm時，能得到最佳的DLCF；隨著厚度、退火溫度與退火時間的增加，DLCF會有石墨化的傾向。

Diamond like carbon films (DLCFS) were grown by radio frequency sputtering at different sputtering power and different thickness. The DLCF sample and its annealing effect were analized by Raman spectra.

Our results show that, the best DLCF was grown at 210W,61.6nm. With the increasing thickness, annealing temperature and annealing time, the DLCF was graphized.

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