本論文研製使用步階式阻抗之小型化、低插入損失CMOS毫米波60-GHz、77-GHz與60-/110-GHz、24-/77-GHz雙頻帶通濾波器，分別採用TSMC CMOS 0.18-μm與90-nm GUTM製程。60-GHz 步階式阻抗負載平行耦合線帶通濾波器，選用短路平行耦合線搭配兩段式步階阻抗開路截線作為負載以達到微小化。77-GHz反向平行耦合線帶通濾波器具有兩個可調式傳輸零點，使用兩段式步階阻抗開路耦合線及並聯兩段式步階阻抗開路截線之架構，可方便調控兩側傳輸零點位置，具有陡峭的選擇性。60-/110-GHz低插入損失之步階式阻抗雙頻帶通濾波器，共振器架構為並聯三段式步階阻抗截線，導納轉換器為三段式步階阻抗傳輸線等效而成。24-/77-GHz雙頻帶通濾波器使用π型阻抗/導納轉換器架構，共振器為串聯兩段式步階阻抗傳輸線。電路設計以Agilent ADS與Ansoft 3-D全波電磁模擬軟體HFSS以及Zeland-IE3D進行模擬，量測部分則是採用on-wafer方式進行，模擬與量測皆具有良好的一致性。

This thesis presents the research on compact and low-insertion-loss CMOS millimeter-wave (MMW) single-band (60 and 77 GHz ) and dual-band (60/110 and 24/77 GHz) bandpass filters (BPFs) using stepped-impedance (SI) resonators, implemented by standard TSMC 0.18-μm or 90-nm GUTM CMOS process. The 60-GHz BPF, consists of the short-ended coupled line and two-section SI open-circuited stub, achieves a significant size reduction. The 77-GHz BPF with the two-section SI open-ended coupled line and two-section SI open-circuited stubs has two transmission zeros for sharp band edges. For dual-band BPFs, the 60-/110-GHz BPF which consists of resonators, tri-section SI stubs, and admittance inverters provides enough design parameters to synthesize the dual-band BPF. In 24-/77-GHz BPF design, the resonators are two-section SI transmission lines, and the π-type structures are used to realize the K/J inverters. The designed MMW CMOS filters are all performed by using the on-wafer measurement. Simulation and measurement results are compared and discussed.

[1] J. A. Howarth, A. P. Lauterbach, M. L. J. Boers, L. M. Davis, A. Parker, J. Harrison, J. Rathmell, M. Batty, W. Cowley, C. Burnet, L. Hall, D. Abbott, and N. Weste, “60 GHz radios: enabling next-generation wireless applications,” in Proc. TENCON 2005 region 10, Nov. 2005, pp. 1–6.
[2] RF atmospheric absorption / ducting [Online]. Available : http://www.tscm.com/rf_absor.pdf
[3] IEEE 802.15 Working Group for WPAN. [Online]. Available: http://www.ieee802.org/15
[4] M. Makimoto and S. Yamashita, “Compact bandpass filters using stepped impedance resonators,” Proc. IEEE, vol. 67, no. 1, pp. 16-19, Jan. 1979.
[5] C.-Y. Hsu, C.-Y. Chen, and H.-R. Chuang, “A 60-GHz millimeter-wave bandpass filter using 0.18-μm CMOS technology,” IEEE Electron Device Lett., vol. 29, no. 3, pp. 246–248, Mar. 2008.
[6] C.-Y. Hsu, C.-Y. Chen, and H.-R. Chuang, “70 GHz folded loop dual-mode bandpass filter fabricated using 0.18 μm standard CMOS technology,” IEEE Microw. Wireless Compon. Lett., vol. 18, no. 9, pp. 587–589, Sep. 2008.
[7] Y.-C. Hsiao and C.-H. Tseng, “Design of 60 GHz CMOS bandpass filters using complementary-conducting strip transmission lines,” in IEEE MTT-S Int. Microw. Symp. Dig., May 2010, pp. 1712–1715.
[8] S.-C. Chang, Y.-M. Chen, S.-F. Chang, Y.-H. Jeng, C.-L. Wei, C.-H. Huang, and C.-P. Jeng, “Compact millimeter-wave CMOS bandpass filters using grounded pedestal stepped-impedance technique,” IEEE Trans. Microw. Theory Tech., vol. 58, no. 12, pp. 3850–3858, Dec. 2010.
[9] H.-R. Lin, C.-Y. Hsu, L.-K. Yeh, H.-R. Chuang, and C.-Y. Chen, “A 77-GHz CMOS on-chip bandpass filter using slow-wave stepped-impedance resonators,” in IEEE Asia-Pacific Microw. Conf., Dec. 2010, pp. 826-828.
[10] C.-Y. Hsu, C.-Y. Chen, and H.-R Chuang, “A 77-GHz CMOS On-Chip bandpass filter with balanced and unbalanced outputs,” IEEE Electron Device Lett., vol. 31, no. 10, pp. 1205–1207, Nov. 2010.
[11] L.-K. Yeh, C.-Y. Chen, and H.-R. Chuang, “A millimeter-wave CPW CMOS On-Chip bandpass filter using conductor backed resonators,” IEEE Electron Device Lett., vol. 31, no. 5, pp. 399–401, May 2010.
[12] Y.-C. Chen, L.-K. Yeh, and H.-R. Chuang, “Design of a compact 77-GHz CMOS on-chip bandpass filter using U-type dual-spiral resonators,” in IEEE Asia-Pacific Microw. Conf., Dec. 2011, pp. 41-44.

[13] R. K. Pokharel, X. Liu, R. Dong, A. B. A. Dayang, H. Kanaya, and K. Yoshida, “60GHz-band low loss on-chip band pass filter with patterned ground shields for millimeter wave CMOS SoC,” in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2011, pp. 1–4.
[14] L.-K. Yeh, C.-Y. Hsu, C.-Y. Chen, and H.-R. Chuang, “A 24-/60-GHz CMOS on-chip dual-band bandpass filter using trisection dual-behavior resonators,” IEEE Electron Device Lett., vol. 29, no. 12, pp. 1373–1375, Dec. 2008.
[15] C.-Y. Chen and T.-C. Chou, “A miniaturized CMOS on-chip 60-/110-GHz dual band bandpass filter,” J. Electromagn. Waves Appl., vol. 25, no. 10, pp. 1391–1401, May 2011.
[16] S. Lee and Y. Lee, “Generalized miniaturization method for coupled-line bandpass filters by reactive loading,” IEEE Trans. Microw. Theory Tech., vol. 58, no. 9, pp. 2383-2391, Sep. 2010.
[17] J.-H. Park, S. Lee, and Y. Lee, “Extremely miniaturized bandpass filters based on asymmetric coupled lines with equal reactance,” IEEE Trans. Microw. Theory Tech., vol. 60, no. 2, pp. 261-269, Feb. 2012.
[18] G. L. Mattaei, L. Young, and E. M. T. Jones, Microwave Filters, Impedance-Matching Network, and Coupling Structures. Norwood, MA: Artech House, 1980.
[19] J. S. Hong and M. J. Lancaster, Microstrip Filters for RF/Microwave Applications, 2000.
[20] Y.-M. Chen, and S.-F. Chang, “A ultra-compact 77-GHz CMOS bandpass filter using grounded pedestal stepped-impedance stubs,” in Proc. IEEE European Microw. Conf., Oct. 2011, pp.194-197.
[21] A.-L. Franc, E. Pistono, D. Gloria, and P. Ferrari, “High-performance shielded coplanar waveguides for the design of CMOS 60-GHz bandpass filters,” IEEE Trans. Electron Devices, vol. 59, no. 5, pp. 1219–1226, May 2012.
[22] K. Ma, S. Mou, and K. S. Yeo, “Miniaturized 60–GHz on-chip multimode quasi-elliptical bandpass filter,” IEEE Electron Device Lett., vol. 34, no. 8, pp. 945–947, Aug. 2013.
[23] J. Ha, S. Lee, B.-W. Min, and Y. Lee, “Application of stepped-impedance technique for bandwidth control of dual-band filters,” IEEE Trans. Microw. Theory Tech., vol. 60, no. 7, pp. 2106–2114, Jul. 2012.
[24] S. Zhang, and L. Zhu, “Synthesis design of dual-band bandpass filters with λ/4 stepped-impedance resonators,” IEEE Trans. Microw. Theory Tech., vol. 61, no. 5, pp. 1812–1819, May 2013.
[25] W.-K.-W. Ali and S.-H. AI-Charchafchi, “Using equivalent dielectric constant to simplify the analysis of patch microstrip antenna with multi layer substrates,” in Proc. IEEE AP-S Int. Symp., vol. 2, pp. 676-679, Jun. 1998.