殘留氣體分析儀於真空製程有廣泛之應用，是洩漏偵測、製程監控與製程參數最佳化等的重要儀器。但儀器使用時會受製程氣體之汙染，導致產生偵測訊號衰退，進而影響資料判讀的誤差。本文為了瞭解殘留氣體分析儀預期保養狀態，結合工業4.0智慧工廠的趨勢，透過大數據分析技術，統計使用壽命與靈敏度兩者間線性迴歸模型，掌握殘留氣體分析儀預測保養指標，再由田口方法對殘留氣體分析儀參數研究，並藉此找出影響品質特性之顯著因子。結合兩項研究當預期指標警訊時，可以採取適當維護措施。
本文使用L18直交表，找出影響殘留氣體分析儀靈敏度之顯著因子為離子能量。經改善後的參數，預測靈敏度由2.9E-7 amps/Torr提升至4.9E-7 amps/Torr ，改善為68.9%。經由驗證導入預測需維護之儀器，最佳化參數對於偵測靈敏度有很大的提升。綜合以上對殘留氣體分析儀預期性的監測和導入參數調整手法，達使用生命週期延長和減低維護成本。

Residual gas analyzers have been used in vacuum processes for decades, providing leak detection, process monitoring, process parameter optimization and other roles. However, the instrument will be contaminated by the process gas while being used and results in a detection sensitivity decline which leads to errors in data interpretation. In order to understand the decline of residual gas analyzers, this research takes the measured data and uses linear regression analysis to deduce the service life and sensitivity to obtain predictive maintenance indicators of residual gas analyzers. Also, the Taguchi method is used to explore the sensitivity of the residual gas analyzer to its control parameters, and to find out the significant factors affecting the quality characteristics via the L18 orthogonal array.
The results show that the most significant factor affecting the sensitivity of the residual gas analyzer is the ion energy. With the improved parameters, the prediction sensitivity is increased from 2.9x10-7 Amps/Torr to 4.9x10-7 Amps/Torr, an improvement of 68.9%.

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