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研究生：	朱方瑞 Chu, Fang-Jui
論文名稱：	雙閘極調控鐵電高分子耦合氧化銦鎵鋅電晶體應用於人工神經網路與儲備池運算 Dual-Gate Modulation of Ferroelectric Polymer Coupled IGZO Transistor for Artificial Neural Network and Reservoir Computing
指導教授：	陳貞夙 Chen, Jen-Sue
學位類別：	碩士 Master
系所名稱：	工學院 - 材料科學及工程學系 Department of Materials Science and Engineering
論文出版年：	2023
畢業學年度：	111
語文別：	中文
論文頁數：	110
中文關鍵詞：	類神經網路、儲備池運算、薄膜電晶體、雙閘極電晶體、鐵電材料、載子捕捉/釋放效應
外文關鍵詞：	Neuromorphic Computing, Reservoir Computing, Thin Film Transistor, Dual-gate Transistor, Ferroelectric, Charge Trapping/Detrapping
ORCID：	none
相關次數：	點閱：67 下載：0
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摘要 I
Extended Abstract III
誌謝 VII
內文目錄 VIII
圖目錄 XI
表目錄 XVII
第一章 緒論 1
1-1 前言 1
1-2 介紹與研究動機 3
第二章 理論基礎與文獻回顧 4
2-1 非晶系氧化物半導體之薄膜電晶體介紹 4
2-2 薄膜電晶體之操作與元件特性 6
2-3 鐵電與極化效應應用 11
2-3.1 鐵電材料、極化效應與其應用 11
2-3.2 鐵電遲滯曲線 16
2-3.3 鐵電高分子聚偏二氟乙烯-三氟乙烯(P(VDF-TrFE))性質介紹 19
2-4 神經突觸行為與訊號傳輸原理機制及應用 21
2-4.1 神經元型態與構造 21
2-4.2 神經元突觸連結傳遞 23
2-4.3 動作電位 26
2-4.4 短期突觸可塑性(Short term plasticity) 29
2-4.5 長期突觸可塑性(Long term plasticity) 31
2-5 人工神經網路(Artificial Neural Network) 33
2-5.1 全連接層深度學習人工神經網路架構與原理 33
2-5.2 儲備池運算(Reservoir Computing)架構與原理 36
第三章 實驗方法與步驟 39
3-1 實驗材料與相關製程設備 39
3-1.1 實驗相關藥品 39
3-1.2 金屬電極電子束蒸鍍源 39
3-1.3 氧化物陶瓷濺鍍靶材 39
3-1.4 磁控濺鍍通入氣體 40
3-1.5 實驗用基板 40
3-1.6 射頻磁控濺鍍製程設備 (RF Magnetron Sputter) 41
3-1.7 電子束蒸鍍金屬 42
3-1.8 旋轉塗佈機 (Spin coater) 42
3-2 實驗步驟 43
3-2.1 矽基板切割與清洗 43
3-2.2 藥品配置 43
3-2.3 雙閘極鐵電高分子耦合氧化物薄膜電晶體元件製程 43
3-3 分析儀器 45
3-3.1 表面粗度儀 (Alpha-step Profilometer) 45
3-3.2 穿透式電子顯微鏡 (Transmission Electron Microscopy, TEM) 46
3-3.3 掃描式電子顯微鏡 (Scanning Electron Microscopy, SEM) 47
3-3.4 低掠角X光繞射儀 (Grazing Incident Angle X-Ray Diffractometer, GIAXRD) 48
3-3.5 紫外光-可見光-近紅外光學儀(UV-Vis-NIR Spectrum) 49
3-3.6 X射線光電子能譜儀(XPS) 50
3-3.7 紫外光電子能譜儀(UPS) 51
3-3.8 半導體元件參數分析儀 52
第四章 結果與討論 53
4-1 元件疊層與命名 53
4-2 元件材料性質分析 55
4-2.1 HR-TEM、SAED與EDS縱深元素分析 55
4-2.2 P(VDF-TrFE) SEM表面分析 58
4-2.3 GIXRD 結晶分析 60
4-2.4 UV-VIS-NIR光學性質分析氧化銦鎵鋅薄膜能隙 62
4-2.5 氧化銦鎵鋅薄膜X射線光電子能譜(XPS) 64
4-2.6 鐵電高分子P(VDF-TrFE)遲滯曲線分析 67
4-3 元件電性分析 70
4-3.1 TFT I-V transfer curve、output curve和電流變化機制討論 70
4-4 元件施加電脈衝刺激反應 78
4-4.1 連續電脈衝刺激反應與短期可塑性到長期可塑性轉換 78
4-4.2 連續電脈衝刺激之增強與抑制行為 85
4-4.3 連續電脈衝調整通道電導行為應用於類神經網路(ANN) 91
4-4.4 成對脈衝行為模仿(Paired-Pulse Facilitation, PPF) 94
4-4.5 儲備池運算(Reservoir computing)時序訊號量測 98
4-5 各文獻比較 105
結論 106
參考文獻 108
                                    

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校內：2028-08-07公開
校外：2028-08-07公開電子論文尚未授權公開，紙本請查館藏目錄

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