本研究旨在設計與製作新型掃描熱探針─載具式探針(Vehicle probe)。載具式探針由懸臂樑、金屬微加熱器及針頭所組成，針頭以夾取或黏附方式固定於懸臂樑。本實驗依其功能性選擇不同材料與設計，目標在於使各部件功能最佳化。
本實驗利用微機電系統製程製作單晶矽懸臂樑；金屬微加熱器利用lift-off製程製作，材料選擇有無電鍍鎳磷合金、電子束蒸鍍鋁及聚焦離子束沉積鎢；為改善一般熱探針空間解析度與熱解析度無法兼顧的情形，針頭材料選用單晶鑽石，單晶鑽石具有高熱傳導性與硬度，無論在量測或加熱加工應用上，都具有極佳的優勢。
對於製作成果進行分析，初鍍之無電鍍鎳磷鍍層並非為穩定相，其結構與電性會隨溫度改變，為使其在高溫下能穩定使用，需加入退火後處理製程。實驗發現，隨退火溫度上升，鎳磷合金會逐漸轉為fcc Ni及Ni3P兩種穩定相，而在400℃退火熱處理4小時之後，鎳磷鍍層能在200℃下保持穩定性。
整合金屬微加熱器之懸臂樑，經通電測試並透過高分子標定與紅外線量測，其結果顯示最高可到達溫度至少為300℃，且能保持穩定。最後，鑽石針頭成功地以黏附方式整合於懸臂樑，並獲得初步掃描成果。

The purpose of the project is to improve the design and fabrication of the novel “Vehicle probe” for scanning thermal microscope. The vehicle probe composes of a cantilever, a micro metal heater, and a tip base which is integrated into the cantilever by mechanical clamping or adhesive methods. In order to optimize each section of the probe, different materials were employed.
The cantilever is made of single crystal silicon and manufactured by MEMS process, while the resistive metal heater is made of either electroless nickel-phosphorus, E-beam evaporated Aluminum, or focus ion beam deposited tungsten, and defined via lift-off process. When using the thermal probe, users have to compromise between the resolution of topography and thermal image. Therefore, by virtues of its outstanding thermal conductivity and wear resistance against Si and any other materials, the single crystal diamond is the choicest tip material, as great potential lies not only in the field of thermal analysis but also in micro-thermal machining.
The analyses of my processed results show that as-deposited Ni-P is meta-stable. Its structure and electrical properties change according to the temperature. It is noted that the annealing process needs to be applied before the high temperature operations. This experiment results indicate that when the temperature is elevated, the deposits transformed into stable fcc Ni and Ni3P phases. Also, after four hours of annealing at 400℃, the Ni-P deposit will stabilize at below 200℃.
The cantilevers integrated with micro metal heater was heated, then calibrated by melting standard method and infrared thermometry. The maxima achievable and controllable temperature of the heater is to be at least 300℃. Finally, the diamond tip was successfully glued onto the cantilever and a preliminary scan result was obtained.

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