| 研究生: |
蕭澄宇 Hsiao, Cheng-Yu |
|---|---|
| 論文名稱: |
氧化鎳系氣體感測器 NiO-Based Gas Sensors |
| 指導教授: |
劉文超
Liu, Wen-Chau |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 微電子工程研究所 Institute of Microelectronics |
| 論文出版年: | 2016 |
| 畢業學年度: | 104 |
| 語文別: | 英文 |
| 論文頁數: | 144 |
| 中文關鍵詞: | 氣體感測器 、氧化鎳 、鈀 、鉑 、奈米顆粒 、溢出效應 |
| 外文關鍵詞: | gas sensor, nickel oxide, Pd, Pt, nanoparticles, spillover effect |
| 相關次數: | 點閱:133 下載:21 |
| 分享至: |
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近年來,科技的發達造成環境和健康的危害,也漸漸地成為人們關注的焦點,因此氣體感測器已被廣泛應用於化學工業、農業、漁業、食品工業和環境監控等領域,氧化鎳氣體感測器具有良好的化學穩定性、高靈敏度、環境因素影響低、體積小和製作過程簡單等優點。本論文將藉由掃描式電子顯微鏡分析氧化鎳薄膜之表面微觀、元素組成及表面粗糙度。
在元件製程方面,首先,吾人利用熱蒸鍍法製作鉻/鉑的指叉式電極於藍寶石基板上,接著以射頻磁控濺鍍法製備氧化鎳感測薄膜,最後以快速熱退火增加氧化鎳的結晶性,並針對各種不同濃度的氣體進行氣體感測分析。
其次,吾人以不同催化金屬結合氧化鎳感測薄膜,改善金屬氧化物系感測器之選擇性問題。吾人以鈀和鉑金屬薄膜催化氫氣與氨氣,實驗結果,經過修飾後的氧化鎳薄膜分別顯示對氫氣與氨氣均有良好的感測能力。
最後,吾人將鈀奈米顆粒塗佈於鈀/氧化鎳薄膜結構上,藉由鈀粒子對氫氣的良好催化反應及粗造的比表面積,可增加氫氣吸附座,進而增加感測靈敏度與減少反應時間,使得氫氣感測性能大幅提升。
In the recent year, the environment disaster and human safety were followed in the development of technology. However, gas sensors also were widely applied in chemical industry, cultivation, fisher, food industry, and environment monitor, etc. Metal oxide-based gas sensor had advantages, such as chemical stability, highly sensitivity, environmental sustainability, small component, and easy fabrication. In this study, surface morphology, element compose and surface roughness of nickel oxide (NiO) membrane was analyzed by scanning electron microscopy (SEM).
First, the Cr/Pt interdigitated electrodes were fabricated on a sapphire substrate by thermal evaporation. Then, the NiO sensing layer was deposited by radio-frequency (RF) sputtering. Finally, the crystalline of NiO was improved by rapid thermal annealing (RTA) and gas sensing properties were discussed.
However, the normal nickel oxide gas sensor had bad selectivity on the different gas concentration. So that, we utilized different catalytic metal which could induce selectivity to composite NiO film. Then, palladium and platinum catalytic metal film by thermal evaporation could effectively catalytic hydrogen and ammonia gas. The result, both hydrogen and ammonia gas had excessive sensing property.
Finally, palladium nanoparticles were deposited on the palladium film/NiO sensing film structure. Palladium nanoparticles had great catalytic to hydrogen. Because of high surface to volume ratios could increase sensitivity and shorten detect time, improved hydrogen sensing property.
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