在當前社會發展趨勢中，綠色能源和可再生能源變得越來越重要。人們越來越重視由化石燃料對環境造成負面影響，且對可持續環保的替代能源的需求不斷增長。因此，許多研究開始利用環境中浪費的機械能並將其轉化為其他便於利用的能源。同時，隨著物聯網 (IoT) 的發展，製造工業對傳感器的需求上升，因此尋找自供電的傳感系統成為物聯網發展的重點。摩擦奈米發電機 (TENG) 具有將機械能轉化為電能、高輸出性能、高效率、重量輕、成本低、易於製造和材料選擇多樣性等特點。它不僅滿足了對綠色能源的需求，還可以應用於自供電的傳感器系統。在這項研究中，摩擦奈米發電機由PMMA、PDMS 和Al組成，並利用垂直接觸分離模式來發電。摩擦奈米發電機的表面結構主要採用CO2雷射燒蝕加工作為主要製造方法，通過模具翻摸技術開發PDMS微針陣列表面。與其它摩擦奈米發電機相比，我們開發的摩擦奈米發電機的製程具有環保、容易製作、製程時間短及成本低的特性，而其它TENG除製程不環保外、成本也較高且製程複雜。
本研究中提出的高深寬比 (High-AR) 微針陣列結構TENG的開路電壓為194.4 V，於1 MΩ負載電阻下的輸出電流為109.6 μA，分別為平面（無結構）PDMS-TENG 3.56和4.12倍。在瞬時功率方面，與平面PDMS-TENG相比，性能大幅提升了17.2倍，達到12.1 mW。 此外，我們將其應用於LED照明、耐用性和電容器充電的測試。具有最高的輸出性能的高深寬比微針陣列結構TENG，可以點亮595個綠色LED，這證明其適合應用於照明以及警示燈作用。本文還將討論不同深寬比的摩擦層微針陣列結構TENG的力靈敏度，並分析其適用範圍。在高壓區域低深寬比 (Low-AR) 微針陣列結構TENG具有較佳的力靈敏度達 0.4 V/kPa， R2 (判定係數)為0.99; 而在低壓區域高深寬比 (High-AR) 微針陣列結構TENG有最佳的力靈敏度16.868 V/kPa，判定係數R2 (判定係數)為0.97。不同深寬比的結構TENG可應用於不同壓力區域的壓力傳感器，如老年人跌倒的監測處理、自供電開關或人機界面控制器等健康和醫療的照護產業，未來可以發展為智能家居和工業4.0的壓力傳感器。

In the current social development trend, green energy and renewable energy sources have become increasingly important. As people become more aware of the negative impact of fossil fuels on the environment, there has been a growing demand for alternative sources of energy that are sustainable and environmentally friendly. So many people start to do research on mechanisms to utilize wasted ambient energy and convert it into another form of energy. At the same time, with the development of the Internet of Things (IoT), industrial production will rely more on sensors, so finding a self-powered sensing system will be the focus of IoT development. Triboelectric Nanogenerator (TENG) has the characteristics of converting mechanical energy into electricity, high output performance, high efficiency, low weight and cost, easy manufacture, and a variety of material options. It not only meets the demand for green energy but can also be used as a self-powered sensor system.
In this study, the TENG consists of PMMA, PDMS, and aluminum, and it will work with contact and separation modes. The TENG is made using a CO2 laser ablation process as the main fabrication method to develop a microneedle array surface of PDMS through mold forming. Compared with others, this TENG is an eco-friendly, easy, short-time fabrication, and low-cost, while others are not eco-friendly, high-cost, and complicated to fabricate. The open-circuit voltage of the high aspect ratio (AR) microneedle array structure TENG suggested in this work is 194.4 V, and the output current at 1MΩ load resistance is 109.6 μA, which are 3.56 and 4.12 times higher than that of flat surface (non-structure) PDMS-TENG. In terms of instantaneous power, the performance has been greatly improved by 17.2 times to 12.1 mW when compared to the flat surface (non-structure) PDMS-TENG. Also, it is utilized in the testing of LED lighting, durability, and capacitor charging. The fact that the high aspect ratio microneedle array structure TENG has the highest output performance, which can light 595 green-colored LEDs, demonstrates that it is suitable for use in emergency exit lights. This article will also discuss the mechanical sensitivity of different aspect ratios microneedle array structures in the triboelectric layer of TENG and analyze its range of applications. The low-AR MN-PDMS TENG exhibits high mechanical sensitivity of 0.4 V/kPa in the high-pressure range, with a coefficient determination (R2) value of 0.99. On the other hand, the high-AR MN-PDMS TENG has good mechanical sensitivity in the low-pressure range, reaching up to 16.868 V/kPa, with a coefficient determination (R2) value of 0.97. The different aspect ratio microneedle structures of TENG can be applied to pressure sensors in various suitable application fields, such as monitoring the falls event of elderly people which can support the health and medical care industry, and self-powered switches that can be developed in human-machine interface control. These applications also can be developed into smart homes and Industry 4.0 in the future.

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