本研究以原子力顯微鏡為例，以模型預測控制器來達成精密追跡的目標，並獲得最佳化輸入。透過控制原子力顯微鏡的 z 軸致動器來追蹤樣品形貌。此外，藉由Microsoft Foundation Class(MFC)軟體設計之圖形使用者介面(GUI)與原子力顯微鏡整合，並利用實時資料交換(Real Time Data eXchange,RTDX)實現主/從處理器間的資料傳輸，使系統的操作上更為簡便如直接。實驗結果顯示，設計之控制器可達到精確地追蹤樣品形貌，且
兼顧性能與輸入的最佳化控制。

This research utilizes model predictive control to achieve precision tracking with optimal input, and demonstrates this method with an atomic force microscope
example. By controlling the actuator of the atomic force microscope in z-axis, the sample topography can be tracked. Besides, a graphical user interface(GUI) constructed with Microsoft Foundation Class (MFC) is integrated with the atomic force microscope and the data exchange between the master and the slave processors
is implemented with real time data exchange technique. Therefore, the overall system becomes more convenient and intuitive for operation. Experimental results show that the proposed controller can track the sample topography precisely with the optimal consideration on both performance and input.

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