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研究生: 何方
Ho, Fang
論文名稱: 退火處理對Co/Pt多層膜結構和垂直異向性的影響
Annealing effect on the structure and perpendicular magnetic anisotropy of Co/Pt multilayers
指導教授: 黃榮俊
Huang, Jung-Chun-Andrew
學位類別: 碩士
Master
系所名稱: 理學院 - 物理學系
Department of Physics
論文出版年: 2003
畢業學年度: 91
語文別: 中文
論文頁數: 141
中文關鍵詞: 退火處理Co/Pt垂直異向性
外文關鍵詞: Co/Pt, perpendicular magnetic anisotropy, Annealing
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  • 本實驗乃是利用MBE系統成長高品質的[Co/Pt]多層膜,並選擇不同的種子層(Mo、Pt)與三種基板Al2O3 (0001、1-102、11-20)來成長出不同磊晶結構的[Co/Pt]多層膜,並觀察其在不同退火溫度下其磁性及結構的變化,藉由RHEED、x-ray繞射來探討其磊晶結構,PMOKE、VSM來量測其磁性,AFM、矯頑場分佈分析儀來觀察其原子表面型態及Hc分佈,觀察[Co/Pt]多層膜的結構與垂直異向性及磁光特性的關係。

    Different crystal structure of high-quality epitaxial [Co/Pt] multilayers have been grown using different seeding layers(Mo or Pt) and substrates Al2O3(0001、1-102、11-20) by Molecular Bean Epitaxy (MBE) system . It is also be annealing in different temperature in this experiment to observe what is the relation between the annealing temperature and the structure and perpendicular magnetic anisotropic of [Co/Pt] multilayers.

    The epitaxial structures of [Co/Pt] multilayers have been studied by Reflective High-Energy Electron (RHEED) and x-ray diffraction measurement. Perpendicular Magnetic-Optical Kerr Effect(PMOKE) and Vibrating Sample Magnetometry (VSM) measurement have been used to investigate the magnetic properties of [Co/Pt] multilayers .We also observed the atomic surface by using Atomic Force Microscope(AFM).

    第一章 簡介………………………………………………1 1-1 前言……………………………………………………1 1-2 垂直磁異向性…………………………………………4 1-3 Co/Pt多層膜系統………………………………………7 1-4 CoPt合金系統…………………………………………13 1-5 CoPt超薄膜系統………………………………………15 1-6 實驗動機………………………………………………17 1-7 磁異向性簡介…………………………………………18 第二章 實驗儀器介紹…………………………………………26 2-1 分子束磊晶系統 ………………………………26 2-2 X-ray 繞射儀 …………………………………32 2-3 原子力顯微鏡 …………………………………33 2-4 磁光柯爾效應儀 ………………………………37 2-5 磁力顯微術 ……………………………………43 2-6 VSM ( Vibrating Sample Magnetometer) …45 2-7 矯頑場分佈分析 ………………………………46 第三章 實驗步驟………………………………………………48 3-1 系統真空環境的準備……………………………48 3-2 基板的準備………………………………………49 3-3 樣品成長…………………………………………50 3-4 樣品量測…………………………………………51 第四章 實驗結果與討論………………………………………52 4-1 Co/Pt多層膜於不同基板及種子層對結構與垂直亦向性 的影響…………………54 4-2 退火處理對Co/Pt多層膜之磁性與磁光特性的影響…72 4-3 Co/Pt 多層膜矯頑場分佈分析……………………… 125 第五章 結論…………………………………………………… 134 參考文獻 ………………………………………………………136

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