在過去的幾年中，金屬氧化物半導體以其卓越的性能（如高表面積，電子遷移率，熱穩定性和化學穩定性）而主導了商用傳感器。此外人們的注意力已經集中在新型奈米結構的獨特的性質上。這些獨特的性能對那些不斷追求提高光電元件性能的人們特別有吸引力。其中氧化鋅作為一種有前途的奈米材料，在其他奈米材料中脫穎而出，它具有各種優越的性能，並且在化學、氣體和生物分子的檢測方面具有出色的性能。本篇論文主要分為三部分，第一部分是“鉑奈米顆粒修飾氧化鋅奈米片之紫外光增強場發射特性”、第二部分是“鎵摻雜氧化鋅奈米柱之柔性金屬-半導體-金屬紫外線光感測器”、第三部分是“ 金奈米粒子修飾氧化鋅奈米柱之濕度感測器”。
研究的第一部分是通過水溶液法在室溫下1小時並於玻璃基板上成功的合成氧化鋅奈米片，並通過直流磁控濺射系統製備了一組樣品，分別為0和30秒沉積鉑奈米顆粒。純氧化鋅奈米片與鉑奈米顆粒修飾的氧化鋅奈米片其平均長度分別為1.08和1.25μm。純的與鉑奈米顆粒修飾的氧化鋅奈米片其平均直徑約為30 nm。掃描式電子顯微鏡圖像觀察到鉑奈米顆粒修飾的氧化鋅奈米片的結構表面邊緣光滑並且鋒利。氧化鋅奈米片的表面有效的吸附鉑奈米顆粒。眾所皆知，其尖銳形態的奈米結構是優異的場發射性能條件之一。能量色散X-ray光譜分析確定了鉑奈米顆粒修飾的氧化鋅奈米片其原子濃度分別為51.23、48.22和0.55 ％的鋅、氧和鉑。根據J-E曲線，純的與鉑奈米顆粒修飾的氧化鋅奈米片的起始電場在黑暗中分別為5.8 V /μm和3.8 V /μm，在紫外線照射下分別為3.9 V /μm和2.9 V /μm。經過計算，在紫外線照射下增強因子分別約為543和4651，在黑暗中則分別為4344和6341。結果表明鉑奈米顆粒修飾的氧化鋅奈米片是優良場發射器件的希望候補。
研究的第二部分是通過在80 °C下3小時通過化學浴沉積法在聚奈二甲酸二乙酯塑膠（PEN）柔性基板上合成鎵摻雜氧化鋅奈米柱，並將其用作為柔性紫外線感測器。 掃描式電子顯微鏡圖像顯示氧化鋅與鎵摻雜氧化鋅奈米柱表面形貌看起來幾乎相同，除了鎵摻雜氧化鋅奈米柱略有增厚（從50 nm到55 nm）和伸長（600 nm到670 nm）。能量色散X-ray光譜分析證實鎵摻雜氧化鋅奈米柱鋅、氧和鎵的原子含量分別為56.86、41.94和1.20 ％。氧化鋅與鎵摻雜氧化鋅奈米柱在1 V偏壓時的暗電流為1.07×10-9和8.60×10-9 A，光電流為8.30×10-8和3.92×10-6 A。氧化鋅與鎵摻雜氧化鋅奈米柱的光暗電流比為77.73和456.16。此外還測量了柔性鎵摻雜氧化鋅奈米柱紫外光感測器在彎曲和平坦狀態下的瞬態響應。施加彎曲變形後，與未彎曲相比，彎曲響應值的偏差較小。元件的瞬態響應一致且可重複。結果表明彎曲性能保持穩定，證明該元件具有優異的特性。
研究的第三部分，通過水熱法在玻璃基板上以90 °C成長6個小時，成功的合成氧化鋅米柱，並通過直流磁控濺射系統製備一組樣品，分別沉積於樣品上0和30 秒金奈米粒子。純的和金修飾氧化鋅奈米柱的平均長度分別為2.3 μm和100 nm。純的和金修飾氧化鋅奈米柱的表面形態幾乎相同。金奈米顆粒的平均直徑為6-8 nm。由於金奈米粒子的表面修飾，金修飾氧化鋅奈米柱具有較高的表面粗糙度。能量色散X-ray光譜分析表明金修飾氧化鋅奈米柱其原子濃度分別由52.55，43.29和4.16 ％的鋅、氧和金組成。與純氧化鋅奈米柱濕度感測器相比，金修飾氧化鋅奈米柱 濕度感測器具有更好的感測性能。在80 ％濕度下，光暗電流對比度增加9.82，響應時間和恢復時間降低192.44和122.42秒。結果表明，通過金奈米顆粒的吸附可以有效地提高濕度感測器的感測特性。

For the past few years, metal oxide semiconductors have dominated commercial sensors because of their superior performance, such as high surface area, high electron mobility, high thermal stability and high chemical stability. In addition, attention has paid to unique properties of novel nanostructures. Among these unique properties has particularly attractive to those who are ongoing for improved performance in optoelectronic elements. Among, ZnO as a promising nanomaterial for elements application to stands out from other nanomaterials, it has various superior performance and excellent sensing properties include the detection of chemicals, gas and biomolecules. The dissertation into three parts, the first part is "UV enhanced field emission properties based on ZnO nanosheets decorated with Pt nanoparticles", the second part is "flexible Metal-Semiconductor-Metal UV photodetectors based on Ga-doped ZnO nanorods", the third part is is "humidity sensor based on ZnO nanorods decorated with Au nanoparticles".
The first part of the study, ZnO nanosheets (NSs) were synthesized successfully on a glass substrate at room temperature for 1 hour by aqueous solution method, a set of samples has been prepared via DC magnetron sputtering for different prerequisite with 0 and 30 sec Pt nanoparticles (NPs) deposition time. The average length of pure and Pt-decorated ZnO NSs was ~1.08 and ~1.25 μm, respectively. The average diameter of the pure and Pt-decorated ZnO NSs was ~30 and ~30 nm, respectively. The structure edge surface of pure and Pt-decorated ZnO NSs are smooth and sharp, respectively. The surface of ZnO NSs observed from the FESEM image was effectively decorated with Pt nanoparticles. Excellent field emission properties were shown for the sharp-tip morphology nanostructures. The SEM–EDX analysis confirm Pt-adsorbed ZnO NSs, which atomic consist of 51.23%, 48.22%, and 0.55% Zn, O, and Pt, respectively. From the J-E curves, the turn-on field was 5.8 V/μm and 3.8 V/μm in the dark and 3.9 V/μm and 2.9 V/μm under UV irradiation, respectively, for the pure and Pt-adsorbed ZnO samples. From the F-N plot of ZnO and the Pt-adsorbed ZnO samples, the field enhancement factors were estimated to be approximately 543 and 4651 under UV irradiation and 4344 and 6341 in the dark, respectively. The results indicate that the Pt-decorated ZnO NSs are a hopeful candidate for excellent field emission devices.
The second part of the study, the synthesis of Ga-doped ZnO (GZO) nanorods (NRs) on naphthalate (PEN) flexible substrate via chemical bath deposition method at 80°C for 3 h and its use as flexible UV PDs. The SEM shows ZnO and GZO NRs look almost identical, except GZO NRs for the slight thickening (from 50 nm to 55 nm) and elongation (600 nm to 670 nm). The SEM–EDX analysis confirm GZO NRs, which atomic contents of Zn, O and Ga were determined as 56.86, 41.94 and 1.20 %, respectively. The dark current was approximately 1.07 × 10-9 and 8.60 × 10-9 A of ZnO and GZO nanorod, and the photocurrent was approximately 8.30 × 10-8 and 3.92 × 10-6 A with a 1 V bias, respectively. The photo-current to dark current contrast ratios of ZnO and GZO nanorod-based PDs were approximately 77.73 and 456.16 with 1 V bias, respectively. Further, I–V curves and transient response of flexible GZO NR PDs in bending (bending up and down) and flat conditions were measured. After imposing bending deformation, the deviation in the response value was less significant for bending (bending up and down) compared with that for unbending. The peak photocurrent values for the devices were consistent and repeatable. The results showed that the bending properties remained stable, proving that the manufactured device has excellent characteristics.
The third part of the study, ZnO NRs were synthesized successfully on a glass substrate at 90 °C for 6 hours by hydrothermal method, a set of samples has been prepared via DC magnetron sputtering for different prerequisite with 0 and 30 sec Au NPs deposition time. The average length of pure and Au-decorated ZnO NRs was ~2.3 μm and ~100 nm, respectively. The morphologies of ZnO and Au-decorated ZnO NRs were almost identical. The average diameter of the Au NPs was 6–8 nm. The Au-decorated ZnO NRs exhibited high surface roughness because of the surface modification of the Au NPs. The SEM–EDX analysis confirm Au-adsorbed ZnO NRs, which atomic consist of 52.55, 43.29 and 4.16 % Zn, O, and Au, respectively. Compared to the pure ZnO NRs RH sensor, the Au-modified ZnO NRs RH sensor showed better humidity sensing performance. the photo-to-dark current contrast ratios addition 9.82, response time and recovery time lower 192.44 and 122.42 sec under 80 % RH. Results indicated that the RH sensing property can effectively improve by Au nanoparticle adsorption.

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