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研究生: 翁銘彥
Weng, Ming-Yan
論文名稱: 砷化鎵長晶之模式分析
Modeling Analysis of GaAs Crystal Growth
指導教授: 趙隆山
Chao, Long-Sun
學位類別: 碩士
Master
系所名稱: 工學院 - 工程科學系
Department of Engineering Science
論文出版年: 2003
畢業學年度: 91
語文別: 中文
論文頁數: 124
中文關鍵詞: 布氏爐砷化鎵長晶
外文關鍵詞: crystal growth, Bridgman furnace, GaAs
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  • 砷化鎵於單晶成長的過程中,包含了溫度場、流場、濃度場的互相耦合、液固相變化時的潛熱釋放效應、液固界面的形狀變化、長晶時的濃度再分佈等,是一個很複雜的問題,其中濃度場中的溶質偏析現象,特別受到關注。
    本文藉由軸對稱的模式來模擬砷化鎵在布氏爐中的長晶過程。在數值方法上在採用SIMPLE演算法來求解速度場,再以等效比熱-熱焓法來處理凝固相變化時潛熱釋放的問題,並使用特殊增加格點的方式去處理濃度場在液固界面的效應。本文使用上述方法來探討砷化鎵在不同工作條件(潛熱、雷利數)下,溫度場、液固界面形狀、流場變化及濃度再分佈間的相互關係。
    從結果中發現,由於液、固態熱傳導係數的差異造成徑向的溫度梯度,而使得液固界面產生撓曲,進而產生自然對流。而自然對流對於溶質在分佈具有強烈的主導性。當考慮潛熱釋放效應後,會使俓向溫度梯度加大,形成更撓曲的液固界面的形狀及更強的流場分佈,本文藉由調整爐壁溫度分佈,得到較平坦的液固界面,進而提昇界面之溶質分佈均勻度,來改善長晶之偏析現象。

    The crystal growth of GaAs includes the coupling of temperature, flow and concentration fields, the releases latent heat, the shape variation of solid/liquid interface, and the solute redistribution. In this complicated problem of crystal growth, the solute segregation attracts great attention. In this paper, an axi-symmetric model was built to simulate the crystal growth of GaAs in a Bridgman furnace. The SIMPLE algorithm was used to solve the flow field and the specific heat/enthalpy method was applied to handle the latent heat. A special control-volume treatment of concentration field at the solid/liquid interface was utilized to formulate the solute release there. The proposed model was used to investigate the relationship among the flow and temperature fields, the shape of solid/liquid interface, and the solute redistribution under different working conditions (different thermal boundary conditions, Rayleigh numbers, and Stefan numbers). From the computing results, by the latent heat and ks ¹ kL, the radiant temperature gradients were induced, which lead to the curved solid/liquid interface. And the natural convection is caused by the curved interface. The natural convection has a great effect on the solute redistributions, but not on the temperature fields. Modifying the temperature distribution along the furnace wall could make the solid/liquid interface flatter (less curved), which could improve the condition of solute segregation in either radial or axial direction.

    摘要…………………………………………………………I 英文摘要……………………………………………………II 誌謝…………………………………………………………III 目錄…………………………………………………………IV 表目錄………………………………………………………VII 圖目錄………………………………………………………VIII 符號說明……………………………………………………XVI 第一章 緒論………………………………………………1 1-1研究動機………………………………………………1 1-1-1砷化鎵材料…………………………………………2 1-1-2半導體材料長晶之方法……………………………3 1-2文獻回顧………………………………………………5 1-3研究目的與方法………………………………………10 第二章 理論分析…………………………………………12 2-1問題描述………………………………………………12 2-2基本假設………………………………………………12 2-3統御方程式……………………………………………13 2-4起始條件與邊界條件…………………………………14 2-5無因次參數……………………………………………16 2-6無因次統御方程式……………………………………17 2-7無因次起始條件與邊界條件…………………………18 第三章 數值方法…………………………………………21 3-1交錯網格與控制體積…………………………………21 3-2差分方程式與解法……………………………………22 3-3流場數值分析…………………………………………23 3-4溫度場數值分析………………………………………27 3-5濃度場數值分析與液固界面效應……………………32 3-6收斂條件………………………………………………34 3-7求解的流程……………………………………………35 第四章 結果與討論………………………………………36 4-1潛熱效應的影響………………………………………36 4-1-1不考慮潛熱效應……………………………………36 4-1-2 考慮潛熱效應………………………………………39 4-2調整爐壁溫度分佈的影響……………………………41 第五章 結論………………………………………………44 參考文獻……………………………………………………45 附錄A………………………………………………………102 附錄B………………………………………………………106 附錄C………………………………………………………108 附錄D………………………………………………………110 自述

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