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研究生: 林耕任
Lin, Keng-Ren
論文名稱: 陣列式積層陶瓷電容器力量感測系統於咬合力量測之應用
Novel Force Sensor Array System Built with Industrial Multilayer Ceramic Capacitors for Occlusal Force Measurement
指導教授: 張志涵
Chang, Chih-Han
共同指導教授: 林哲信
Lin, Che-Hsin
學位類別: 博士
Doctor
系所名稱: 工學院 - 生物醫學工程學系
Department of BioMedical Engineering
論文出版年: 2012
畢業學年度: 101
語文別: 英文
論文頁數: 85
中文關鍵詞: 基層陶瓷電容器力量感測器可饒式力量感測器陣列咬合力
外文關鍵詞: multilayer ceramic capacitors force sensor, flexible force sensor array, occlusal force
相關次數: 點閱:101下載:1
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  • 人體經由口腔牙齒進行食物咀嚼,以供給營養及能量,係維持生命系統的基本要素。然而對實際人體咬合咀嚼的力量,臨床上並未有足夠的資料;主要量化的資訊大多以最大咬合力的形式呈現,然而咀嚼力在牙冠表面分佈的狀態仍無法獲得。根據近年的牙科生物力學分析,牙齒受力時不僅力量大小重要,力量在齒冠面的分佈,更是齲齒窩洞補綴、牙根與牙冠重建及人工牙根植入等臨床治療,長期穩定度的重要參數,對咬合或咀嚼力的掌握不確實,就可能降低臨床咬合能力重建的長期成功率。近年由於牙科技術的發展,與人工牙根的應用,植入的假牙已經能夠提供接近正常的咬合與咀嚼狀態,故本研究以微機電製造的技術,發展適用於量測咬合力之新型力量感測器,以評估牙齒咬合及咀嚼力在齒冠面之分佈狀況。
    本研究第一部份為利用積層陶瓷電容器發展新型力量感測器。表面貼片式的積層陶瓷電容器具有極好的電容特性與穩定性,為目前使用最廣泛的電容元件之一。此電容是由極薄的介電層與電極層堆疊而成,其中,介電層的主要成分為具有高介電常數之鈦酸鋇,而鈦酸鋇也同時具有極佳的壓電特性,亦被作為壓電陶瓷材料使用。藉由介電層之壓電特性,配合各介電層上下皆塗佈電極的三明治結構,積層陶瓷電容器可被視為多層壓電感測器堆疊組合的結果。利用此堆疊結構與組成成分,本研究成功將積層陶瓷電容器轉變為力量感測器,而這也是第一個將積層陶瓷電容器作為力量感測元件的研究。
    研究首先測試積層陶瓷電容器力量感測元件(以下簡稱為MLCC感測器)之力學與壓電特性,結果顯示MLCC感測器於2.4 mm2 的面積上能承受高達600 N的力量,即250 Mpa之抗壓強度;壓電表現方面,MLCC感測器能提供穩定的壓電訊號,其平均壓電電荷常數約為19 pC/N,並且在高頻與低頻力量的量測下皆展現了穩定的再現性。然而,積層陶瓷電容器終究是被生產作為電容元件使用而非壓電感測元件,因此生產過程中並未經過一般製作壓電感測器必須的極化程序,對於未進一步處理的MLCC感測器而言,缺少的極化步驟便在各個感測元件之間產生了70%之壓電特性變異,無異是力量感測元件性能上的一大缺陷。
    為改善存在於MLCC感測器之間的壓電特性變異,研究的第二部份設計了一個再極化的程序,以改善原有缺點。有別於一般壓電材料極化過程所需的特定儀器,針對MLCC感測器的再極化程序僅需簡易直流電源供應器以及加熱板,將MLCC感測器加熱至120 °C (鈦酸鋇之居里溫度)並施加直流電壓即可提高其壓電特性至飽和狀態。經過再極化程序之MLCC感測器顯著地將變異性降低至6%;同時,藉此程序亦能提升壓電電荷常數至1,740 pC/N。最後由極化過後之MLCC感測器組成一8×10 的陣列式感測器,配合自行組裝之多通道電荷放大器即能準確地反應出施加於陣列式感測器上的施力圖形。
    最後本研究將兩層MLCC陣列式力量感測器包埋於臨時牙冠中,藉此評估此系統應用於量測牙冠面力量分布狀態之可行性。結果顯示此系統有足夠的能力測得咀嚼力分布,並可藉由有限元素法等輔助方式獲得更詳細之力參數。同時,此陣列式感測系統表現了傑出的力量感測能力,對於數牛頓至數百牛頓等級力量提供一簡易且低成本的量測方法,未來亦可藉由積層陶瓷電容器大小、排列方式的變更以及訊號放大與擷取系統的升級,將此量測架構運用於牙科、骨科臨床量測和醫療器械等實際應用。

    Chewing is the most important function of the teeth to provide essential nutrition and energy for life maintain. It has been showed that the loading force on the dental crown plays a vital role in long-term success of many dental treatments. However, the quantification of the force regarding human occlusion and mastication is still not well recognized, especially in how these forces are distributed over the dental crown. Improper distribution of the occlusal force may cause temporomandibular joint disorder, crown fracture, restoration damage, or loss of osseointegration in dental implants. A comprehensive measurement of the occlusion and mastication forces is therefore vital. This study aimed to evaluate the feasibility of developing a miniature force sensing array to measure the complicated occlusal force condition, force size, load site and direction.
    The multilayer ceramic capacitor (MLCC) is employed as the sensing element in this study. An MLCC element is composed of a stack of piezoelectric ceramic materials, typically using barium titanate (BaTiO3) as the dielectric layer and nickel as the conducting layer. The BaTiO3 is a general piezoelectric material providing great piezoelectric properties. A piezoelectric dielectric layer, with its top and bottom internal electrodes, can be viewed as a thin piezoelectric transducer unit. However, industrial-grade MLCC is used as capacitor rather than as force sensing components. The force sensitivity among different MLCCs can varied by 70%. A simple re-poling process was developed to pole the sensor to a saturation situation for normalization each MLCC. A force sensing array is then developed to evaluate the possibility of measuring the complete occlusal force information.
    Measurement results showed that a single MLCC force sensor with a cross section area of 2.4 mm2 can withstand load up to 600 N, suitable to bear the large occlusion force. The piezoelectric constant could be increased from 19 pC/N to 1,740 pC/N after re-poling while the variation could be reduced down to 6%. This indicated that the normalized MLCC provides good force response and excellent repeatability. More importantly, there was no time lag for dynamic force measurements.
    Two sheets of force sensor array, each composed of 4x4 re-poled MLCC elements soldered on a flexible circuit sheet, were embedded into a temporary crown to measure, in-vitro, the occlusion force. The first sensor array was integrated with the crown near the occlusal surface to identify the loaded site. The second sheet was placed under the bottom surface of the crown to measure the total force size as well as the distribution. The directions of each occlusal force could then be obtained from the simulation of a finite element analysis. This indirect measurement approach confirms that a simple and inexpensive MLCC-based force sensor system is feasible to investigate the complicated occlusal loading. This system has great potential to be developed for applications in both clinical and biomedical engineering.

    中文摘要 I Abstract III 誌謝 V Table of Contents VIII List of Figures X List of Tables XV Chapter 1. Introduction 1 1.1 Motivation 2 1.1.1 Purpose and specific aims 3 1.1.2 Significance 3 1.2 Thesis organization 4 Chapter 2. Background Information and Literature Review 6 2.1 Functional occlusion 6 2.2 Occlusal force measurement 10 2.2.1 Experimental measurement 10 2.2.2 The finite element method 15 2.2.3 Summary 18 2.3 Force sensing systems 19 2.3.1 Piezoelectric force sensor array 20 2.3.2 Resistive-metal-based force sensor array 22 2.3.3 Capacitive force sensor array 24 2.3.4 Optical force sensor array 26 2.4 Summary 27 Chapter 3. Multilayer Ceramic Capacitors Force Sensing Element 29 3.1 Multilayer ceramic capacitor (MLCC) 29 3.2 Design of MLCC force sensor 30 3.3 Characteristic of MLCC sensing element 32 3.4 Property improvement of MLCC sensing element 35 3.5 Summary 43 Chapter 4. Mlcc Sneosr Array 45 4.1 MLCC sensor array design and fabrication 45 4.2 Experimental setup 47 4.3 Results of the MLCC force sensor array testing 50 4.4 Summary 51 Chapter 5. Numerical and Experimental Estimations for Occlusal Force 53 5.1 Primary evaluation 53 5.1.1 Experimental evaluation 53 5.1.2 Numerical validation 56 5.2 Occlusal force measurement 60 5.2.1 Sensor arrays embedded artificial tooth 60 5.2.2 Results and discussion 65 Chapter 6. Conclusions 70 6.1 Summary 70 6.2 Remarks and future works 72 References 74 Biography 83

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