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研究生: 劉信毅
Liu, Shin-Yi
論文名稱: IC封裝模具鏡面與霧面處理對EMC間黏著效應之研究
Adhesion Effects of EMC on Mirror and Matted Mold Surfaces during IC Packaging Process
指導教授: 李輝煌
Lee, Huei-Huang
學位類別: 碩士
Master
系所名稱: 工學院 - 工程科學系
Department of Engineering Science
論文出版年: 2014
畢業學年度: 102
語文別: 中文
論文頁數: 82
中文關鍵詞: IC封裝黏著效應霧面處理鏡面處理黏模力特性曲線
外文關鍵詞: IC package, Adhesion effects, Matted surface treatment, Mirror surface treatment, Characteristic curve
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  • 在半導體IC封裝產業中,封膠材料(Epoxy Molding Compound, EMC)在熟化(Curing)的過程中會包覆電子晶片,整個過程中會與封裝模具表面產生結合,造成黏著的情況,稱之為黏著效應(Adhesion effects);而黏著效應會影響整個產線的生產過程,如果黏著效應過大,則在IC成品脫模的時候產生表面破壞、成品缺角,進而導致封膠失敗、生產率降低、信賴度不佳等結果。所以如何在維持現有模具的設計下,藉由鍍層(Coating)以及表面處理(Surface treatment)來有效降低黏著效應的影響,是目前產業界及研究單位所重視的議題。
    本論文將利用實驗室自行研究完成的自動化電子封裝黏模力檢測設備與量測技術,配合一組與實際封裝產線相當接近的製程參數,進行一系列的黏模力量測,在以往的研究中,量測試片的表面處理皆是作霧面處理(Matted surface treatment)居多,並且搭配不同鍍層下去作探討,本實驗除了繼續進行霧面處理的探討之外,還會探討經過鏡面處理(Mirror surface treatment)的量測試片,將兩者皆搭配不同的鍍層,去研究其黏模效應,並觀察封膠材料在量測試片表面的情況。
    最後,本論文也將針對不同的鍍層以及表面處理進行400模次的長效性連續實驗,觀察其黏模力的趨勢,透過線性迴歸分析(Linear regression)將實驗數據擬合出一條黏模力特性曲線(Characteristic curve),將實驗所擬合出來的特性曲線進行比較,觀察不同鍍層以及表面處理對封膠材料的黏著影響程度,找出最佳的清模時機,並且判斷可以有效降低黏著效應的原因。

    In the IC packaging industry, epoxy molding compound (EMC) in the curing process covers electronic chips. It causes the adhesion phenomenon on the surface of packaging mold called adhesion effects. Adhesion effects influence the entire process in production line. If adhesion effect is too large, it destroys the surface of IC productions during mold release and lead to the failure of IC packaging, low productivity, poor reliability, etc. Therefore, the current issues which in industry and research department are how to maintain existing mold design and use coating and surface treatment to decrease adhesion effects. This thesis will use adhesion force equipment by automation electronic packaging and measurement techniques which complete by our laboratory. We work with a set of process parameters which is close to the actual packaging line, and do a series of adhesion force testing. In previous research, the surfaces of specimen are in the matted surface treatment majority and collocate different coating. In addition to research of matted surface treatment, this research will investigate mirror surface treatment, too. The both specimens are collocated with different coating to do research and observe the surface condition of specimens. In the end, this thesis also carries out the continuous experiments on different coatings and surface treatment and observes the trend of adhesion force. Through the analysis of linear regression, the experiment results will be adapted a characteristic curve of adhesion force and then we will compare it to observe the degree which different coating and surface treatment on adhesion effect. According to experiment results, we find the best clean time on mold and judge the reasons which can reduce adhesion effects.

    摘要 I Abstract II 致謝 IX 目錄 XI 表目錄 XIV 圖目錄 XV 第一章 緒論 1 1-1 研究背景 1 1-2 封裝模具的黏著問題 4 1-3 研究目的 6 1-4 文獻回顧 7 1-4-1 封膠材料的固化理論 7 1-4-2 封膠材料的黏著性質 7 1-4-3 IC封裝模具表面的鍍層處理 8 1-4-4 IC封裝模具表面的鍍層處理 9 1-4-5 黏著強度的量測規範 11 第二章 量測原理與實驗設備說明 16 2-1 黏著強度量測原理 16 2-2 量測試片與封膠材料的使用準則 17 2-2-1 量測試片之製作 17 2-2-2 封膠材料使用準則 18 2-3 正向與剪向複合機台介紹 21 2-3-1 模壓機單元 23 2-3-2 模具單元 25 2-3-3 灌膠伺服單元 30 2-3-4 黏模力檢測裝置 31 2-4 機台控制系統 33 2-5 數據資料擷取系統 34 2-6 量測過程與結果 37 第三章 不同鍍層實驗之正向黏模力實驗 41 3-1 實驗目的 41 3-2 實驗規劃與實驗製程參數 42 3-2-1 封膠材料使用 42 3-2-2 試片鍍層及表面處理選用 43 3-3 實驗結果及比較 44 3-3-1 鏡面處理之實驗結果 44 3-3-2 霧面處理之實驗結果 48 3-3-3 實驗結果之比較 52 第四章 不同鍍層試片之長效性黏模力實驗 54 4-1 實驗目的 54 4-2 實驗規劃與實驗製程參數 54 4-2-1 鍍層試片選用 54 4-2-2試片與封膠材料接觸面積 54 4-2-3 實驗製程參數 55 4-3 長效性黏模力實驗 56 4-3-1 霧面處理之electroplating-Cr試片長效性黏模力實驗 56 4-3-2 霧面處理之single-layer CrN coating試片長效性黏模力實驗 62 4-4 實驗結果比較 68 第五章 結論與未來展望 73 5-1 結論 73 5-2 未來展望 74 參考文獻 75 References 75 索引 79 Index 79 自敘 82

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