本研究主要聚二甲基矽烷氧為薄膜基材，混摻了不同型號的沸石(NaX、NaY、OMS、ZSM-5)和二氧化矽(Silica)製成複合薄膜，並改變添加物的含量，觀察在滲透蒸發中，其對滲透量和分離係數的影響。
其中利用傅立葉紅外線光譜儀、X光螢光分析儀、X光繞射儀及固態核磁共振儀來鑑定沸石的元素比例和複合薄膜的性質；熱重分析儀來記錄複合膜的熱裂解溫度以了解其熱穩定性；並進行膨潤實驗來比較不同添加物、不同含量複合膜，其之間的差異。
在XRD中可了解添加物和PDMS間沒有作用力，為混滲的方式；TGA中發現到了無機物可吸收熱能，提升熱穩定性；在複合膜膨潤實驗中，添加低矽沸石(NaX、NaY)對水有較大的膨潤性，添加高矽沸石ZSM-5對乙醇較具吸引力；而在Silica複合膜中，未明顯改變薄膜性質。
滲透蒸發中，沸石矽鋁比增加(如OMS及ZSM-5)有助於複合膜在分離係數和滲透量的提升；此外，在OMS複合膜及ZSM-5複合膜的比較中，增大沸石的孔洞並不會降低分離係數。另一方面，NaX/PDMS與NaY/PDMS複合膜在滲透蒸發的效能沒有明顯差異，推測為缺陷所致；添加二氧化矽顆粒到PDMS薄膜中，其對分離係數、選擇率和PSI的影響並不明顯。

In this thesis, silicon-containing fillers (NaX, NaY, ZSM-5, OMS and silica particles) were incorporated in PDMS (poly( dimethyl siloxane)) to prepare organic-inorganic hybrid membranes.
The fillers and/or membranes were characterized by Fourier transform-infrared spectrometry (FT-IR), X-ray diffractometer(XRD), X-ray fluorescence analysis(XRF). In addition, thermal properties of the membranes embedded with different amount of fillers were investigated by thermal gravimertric analysis (TGA). Furthermore, effects of the contents and types of filler in the hybrid membranes on pervaporation performances and swelling behaviors were also investigated.
It is found in XRD results that there was no interaction between PDMS and embedded filler particles. The thermal stabilities of membranes were enhanced by incorporating filler particles in PDMS membranes.
According to the swelling experiments conducted in this study, increasing in water swelling ratios was observed in NaX/PDMS and NaY/PDMS membranes; increasing in ethanol swelling ratios was observed in ZSM-5/PDMS membranes. On the other hand, neither water nor ethanol had significant effects on swelling in silica/PDMS membrane.
As to the pervaporation experiments, it was found that both the total permeabilities and the selectivities of the hybrid membranes increased with the increasing contents of zeolites with high Si/Al ratios (e.g., OMS and ZSM-5). Furthermore, by comparison between OMS/PDMS and ZSM-5/PDMS membranes, it was found that increasing in pore size of the zeolite particles did not decrease the EtOH/water selectivity. On the other hand, there was no difference in the pervaporation performances in NaX/PDMS and NaY/PDMS membranes. It might be contributed to the defects between interfaces between PDMS and NaX/NaY particles. In addition, the effects on selectivity, permeability and PSI values were quite slight by incorporating silica particles in PDMS membrane.

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