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研究生: 張文彥
Jhang, Wen-Yan
論文名稱: 利用溶膠凝膠薄膜作為中間層改善類鑽碳與6061鋁合金基板兩者接合性
Sol-gel-derived interlayer for improving the adhesion between DLC and aluminum alloy substrate
指導教授: 丁志明
Ting, Jyh-Ming
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2019
畢業學年度: 107
語文別: 中文
論文頁數: 78
中文關鍵詞: 射頻濺鍍類鑽碳鍍膜溶膠凝膠薄膜6061鋁合金微創手術刀材料
外文關鍵詞: RF sputtering, DLC coating, sol gel, DLC/ SiO2-TiO2/Al, surgical instruments
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  • 鋁合金(6061 aluminum alloy)擁有相當良好的潛力做為生醫手術之材料,因為其良好的特性,例如:低比重、高強度以及價格便宜,適合做為目前手術刀之材料替代品,但唯一考量的問題是鋁合金的表面粗糙度過高,若用於醫療方面容易有細菌沾染等問題,因此,表面改質是解決此問題的辦法。在本實驗當中,我們利用濺鍍類鑽碳(DLC)薄膜於鋁合金上,考量類鑽碳其優異的特點,例如:高強度、低摩擦係數;良好的生物相容性及抗菌性,因此,披覆類鑽碳於鋁合金上可改善原本所提及的問題。然而,沉積類鑽碳於基板時所遭遇的問題為附著度不足,因薄膜在濺鍍過程中易產生殘留應力,以及薄膜與基板之間的熱膨脹係數差異,造成接合性不佳。為了解決此問題,我們在類鑽碳與鋁合金基板之間,利用旋轉塗佈SiO2/TiO2溶膠凝膠溶液,以一層薄膜作為中間層,期望此複合材料能夠改善附著度的問題。
    在本研究中,我們利用ATR-IR、SEM、Raman及XPS去分析此複合材料DLC/SiO2-TiO2/Al alloy之微觀結構及表面性質,以及利用奈米壓痕儀、表面粗度儀以及刮痕試驗儀去檢測其機械性質,最後利用JIS Z 2801-2000抗菌檢測法來測試其抗菌表現。透過以上之材料分析,冀望此複合材料能改善附著度問題外,在醫用抗菌方面也能達到標準,使其能夠成為微創手術器材之材料替代品。

    Due to a low specific gravity, good mechanically, and high strength, aluminum alloys are attractive for using in various surgical devices. However, the bio-compatibility is a concern. Also, a smooth surface and a low friction coefficient are often required. Hence, in this work, sputter deposited diamond-like carbon (DLC) coating on Al alloy has investigated to provide desirable surface characteristics for Al alloy. However, the adhesion between DLC and Al is not trivial. Therefore, a sol-gel process was used to deposit an interlayer of silicon oxide film to improve the adhesion and thus wear resistance performances of the Al alloy. Structural and mechanical properties of the DLC/SiO2-TiO2/Al were examined using of Raman spectroscopy, Fourier transforms infrared spectroscopy, scanning electron microscopy, scratch test, and nano-indentation methods. The results show that DLC film provides a low friction coefficient and a high resistance to improve the mechanical properties. Coating of the SiO2-TiO2 interlayer also shows a significant enhancement of adhesion between DLC film and the Al alloy. The research demonstrates a promising candidate DLC/ SiO2-TiO2/Al material for use in surgical devices.

    摘要 I SUMMRY II 誌謝 XII 總目錄 XIII 表目錄 XVI 圖目錄 XVII 第1章 緒論 1 1.1 前言 1 1.2 研究動機與目的 1 1.3 研究與實驗目標 2 第2章 理論背景與文獻回顧 3 2.1 類鑽碳(Diamond-Like Carbon) 3 2.1.1 類鑽碳簡介 3 2.1.2 類鑽碳之混層軌域及含氫量 3 2.1.3 類鑽碳製備方法 4 2.1.4 類鑽碳之應用 6 2.2 磁控濺鍍法介紹及原理 6 2.2.1 基本原理及文獻回顧 6 2.2.2 電漿理論 7 2.2.3 薄膜成長機制 8 2.3 溶膠凝膠法 10 2.4.1 溶膠凝膠法簡介 10 2.4.2 溶膠凝膠法之發展 12 2.4.3 水解與縮合反應 13 2.4.4 影響溶膠凝膠法反應之因素 14 2.4 抗菌鍍層 15 第3章 實驗方法與分析原理 17 3.1 實驗材料與設備 17 3.2 實驗流程與步驟 20 3.3 分析方法 24 3.3.1 衰減式全反射紅外線光譜儀(Attenuated Total Reflection Infared Spectroscopy, ATR-IR) 24 3.3.2 場發掃描式電子顯微鏡(Field-Emission Scanning Electron Microscope, FE-SEM) 26 3.3.3 拉曼散射光譜儀(Raman Spectroscopy) 26 3.3.4 X光光電子光譜儀(X-ray Photoelectron spectroscope, XPS) 28 3.3.5 奈米壓痕儀(Nanoindentation) 29 3.3.6 表面粗度儀(Alpha-Step Profilometer) 31 3.3.7 刮痕試驗儀(Scratch Tester) 32 3.3.8 抗菌測試(Antibacterial test) 33 第4章 結果與討論 34 4.1 以 ATR-IR分析溶膠凝膠薄膜之化學鍵結 34 4.2 溶膠凝膠薄膜與類鑽碳表面之形貌與分析 38 4.3 類鑽碳之拉曼光譜分析 42 4.4 以XPS分析類鑽碳sp2/sp3之百分比 50 4.5 溶膠凝膠薄膜與類鑽碳之硬度及摩擦係數分析 54 4.5.1 硬度及楊氏模數(Hardness and Young's Modulus) 54 4.5.2 摩擦係數(Friction Coefficient) 58 4.6 溶膠凝膠薄膜與類鑽碳之表面粗糙度分析 60 4.6.1 表面粗糙度(Surface Roughness) 60 4.6.2 薄膜厚度(Thickness of Thin Films) 62 4.7 溶膠凝膠薄膜與類鑽碳之附著度分析 65 4.8 類鑽碳之抗菌表現 69 第5章 結論 71 第6章 參考文獻 73

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