本研究以射頻RF非平衡磁控濺鍍，鍍製CrCx和CrAlxC鍍層在不銹鋼316L底材上，研究其鍍層的晶體結構、基本性質、機械性質、磨潤性質與燃料電池雙極板之性質分析，最後根據2020年美國能源部(DOE)之標準規範，進行商業化評測作為新的研究項目。本研究之實驗結果分為二個階段，第一階段為CrCx鍍層，經實驗分析後選擇最佳雙極板性質之鍍層添加Al元素，因此第二階段為CrAlxC鍍層，將比較鍍層添加Al前後之性質變化，另外將同樣條件的CrAlxC鍍層進行退火熱處理，比較熱處理前後之雙極板性質差異，代號就以CrAlxC-H表示。
CrCx鍍層隨著乙炔增加，硬度是逐漸降低但其附著性卻有明顯的改善。磨耗試驗以CrC35鍍層擁有最佳磨潤性質，其有最低的摩擦係數(0.07)、磨耗深度(0.64μm)和磨耗率(2.7×10-6 mm3/Nm)。在雙極板性質測試中，以CrC25鍍層顯示最低的電流密度(7×10-8 A/cm2)，具有最佳的耐腐蝕性；導電測試中也是CrC25鍍層具最高的導電率(2.5×104 S-cm-1)；而在接觸電阻測試中，CrC25鍍層與碳紙之間在140 N cm-2的壓力下的接觸電阻為7.2mΩ-cm2，因此CrC25鍍層的腐蝕電流密度(<1μA/cm2)、導電率(>100 S-cm-1)和接觸電阻(<10mΩ-cm2)皆滿足DOE的規範要求。
添加鋁的CrAlxC鍍層其硬度有些許的提升，但是附著性卻是明顯得下降，其中CrAl1C鍍層具有最佳的磨潤性質，其擁有最低的摩擦係數(0.12)、磨耗深度(0.57μm)和磨耗率(2.97×10-6 mm3/Nm)。在雙極板性質測試中，同樣是CrAl1C鍍層顯示最低的電流密度(2.31×10-5 A/cm2)；導電性測試也是CrAl1C鍍層顯示了最高的導電率(1.48×104 S-cm-1)；在接觸電阻測試中，CrAl1C鍍層的接觸電阻則為6.9mΩ-cm2，因此雖然CrAl1C鍍層的導電率和接觸電阻，皆有滿足DOE的規範要求，但是其腐蝕電流密度(<1μA/cm2)卻不滿足規範要求。而在經過熱處理之後的CrAlxC-H鍍層，僅有導電性質有些許的提升，其抗腐蝕性及接觸電阻皆因為熱處理後性質變差。

CrCx coatings (where x indicates the acetylene flux rate) were deposited on stainless steel 316L substrate with different carbon contents using radio frequency unbalanced magnetron sputtering. The X-ray diffraction results of CrCx coating exhibited Cr7C3 and metal Cr crystalline phase. The hardness of coating gradually decreased as the acetylene flow rate increased from 5 to 35 sccm. However, the adhesion of coating gradually promotes with acetylene increased. The CrC35 coating exhibited the lowest friction coefficient (0.07)、
wear depth (0.64μm) and wear rate (2.7×10−6 mm3/Nm). The CrC25 sample with the best anti-corrosion property displays the lowest current density (7×10−8 A/cm2) which is 36 times lower than uncoated substrate (2.52×10−6 A/cm2). The interfacial contact resistance (ICR) between CrC25 sample and carbon paper was measured 7.2 mΩ-cm2 under 140 N cm−2 compaction forces. The corrosion currents (<1μA/cm2) and ICR (<10 mΩ-cm2) of CrC25 coating satisfy the targets requirement of U.S. department of energy.
The hardness of the CrAlxC coating is slightly improved, but the adhesion is significantly reduced. Among them, the CrAl1C coating has the best wear properties, and it has the lowest friction coefficient (0.12), wear depth (0.57μm) and wear rate (2.97×10-6 mm3/Nm). In the bipolar plate property test, the CrAl1C coating showed the lowest current density (2.31×10−5 A/cm2) and the highest conductivity (1.48×104 S-cm-1). In the ICR test, the contact resistance of the CrAl1C coating is 6.9mΩ-cm2. Therefore, although the conductivity and contact resistance of the CrAl1C coating meet the (DOE) specifications. However, the corrosion current density (<1μA/cm2) of the CrAl1C coating doesn’t meet the specification requirements.

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