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研究生: 高銘良
Kao, Ming-liang
論文名稱: 氧化鎂/氧化鋅-殼/核奈米線電晶體製備與分析
The fabrication and study of ZnO/MgO core-shell nanowire transistors
指導教授: 洪昭南
Hong, Chau-Nan Franklin
學位類別: 碩士
Master
系所名稱: 工學院 - 化學工程學系
Department of Chemical Engineering
論文出版年: 2009
畢業學年度: 97
語文別: 中文
論文頁數: 108
中文關鍵詞: 化學溶液法氧化鋅奈米線奈米線電晶體核/殼奈米線
外文關鍵詞: chemical bath depositionin, nanowire, nanowire transistor
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  • 本研究以化學溶液法成長高順向性的氧化鋅奈米線陣列在熱蒸鍍的銀薄膜上,後續將包覆有氧化鎂的奈米線以高溫熱處理後,再進行奈米線電晶體的製作。溶液在經過適當的預熱時間後可以在銀薄膜上成長出長寬比較高的奈米線陣列。利用銀薄膜與奈米線的低附著力,滾壓法可以轉移高密度以及高順向性的奈米線至目標基板。研究以光激發光譜、化學特性分析、以及X光繞射等分析儀器,探討熱處理前、後氧化鋅/氧化鎂-核/殼奈米線的性質,可知此核/殼奈米線的光學性質有上升,且鎂原子有擴散進入氧化鋅奈米線內部的趨勢,此外熱處理後的氧化鎂有(200)的優選方向。在電性的部分,以滾壓法所製備的核/殼奈米線奈米線電晶體具有較大的電流,此電流與奈米線的表面缺陷無關,因此可歸因於奈米線內部的高載子傳輸速率。經由本研究的結果,在銀薄膜上成長的奈米線具有容易轉移至目標基板的特性,且經過氧化鎂包覆後可減少奈米線的表面缺陷。

    In this research, the highly-oriented nanowire array grown on silver film has been successfully fabricated by chemical bath deposition (CBD) method, following by rolling transferring and photolithography process, the nanowire transistor with high electron mobility can be obtained. Also, the synthesis of higher aspect ratio nanowires can be achieved by pre-heat process. The lower adhesion force between nanowires and the growth substrate facilitated the fabrication of nanowire transistor.
    A series of material measurements have been conducted from the aspects of morphological, structural, optical, and chemical properties. According to TEM and EDX analyses, heat treatment of nanowire coated with Mg(OAc)2 can reduce and smooth the thickness of the shell and PL analysis also showed that nanowire can perform better optical property after been coated with Mg(OAc)2. In ESCA analyses, besides, we demonstrated that Mg atoms can diffuse from the shell into the core of nanowires during the heat treatment.
    In the end, we also demonstrated a methodology to transfer vertically aligned nanowires from the growth substrate to target substrate via rolling process with the use of PDMS film as a transferring medium. By this unique method, dense and oriented assembly of nanowires can be obtained and high electron mobility nanowire transistor can be fabricated.

    第一章 緒論 1 1-1 前言 1 1-2 實驗動機 6 第二章 文獻回顧 7 2-1 ZnO的基本性質 7 2-2 ZnO發光機制 8 2-2-1 紫外光放射 9 2-2-2 綠光放射 9 2-2-3 黃光放射 10 2-3 一維奈米材料及其成長機制 10 2-4 製備氧化鋅奈米線的方法 13 2-4-1 鋅蒸氣氧化法 13 2-4-2 化學氣相沈積法 14 2-4-3 模板法 14 2-4-4 化學溶液法 15 2-5 ZnO/MgO 奈米線的結構 19 2-6 ZnO/MgO 奈米線的成長 20 2-7電晶體簡介 25 2-8 奈米線電晶體研究近況 27 2-9 奈米線自我組裝 29 2-9-1 電場作用力排列 29 2-9-2 微米孔道造成的單一方向流力 31 2-9-3 Langmuir-Blodgett (LB) 技術[87] 32 2-9-4 圖案轉移技術 34 2-9-5 Blown Film技術 36 第三章 實驗方法與步驟 38 3-1實驗流程 38 3-2實驗設備 39 3-2-1 滾輪機 39 3-2-2光罩對準機(Mask aligner) 40 3-2-3電子槍鍍膜系統(electron-gun thermal evaporation) 40 3-3 分析設備與方法 41 3-3-1 表面輪廓儀(Alpha-Step IQ) 41 3-3-2 掃瞄式電子顯微鏡(SEM) 42 3-3-3 穿透式電子顯微鏡(TEM) 43 3-3-4 X 光繞射儀(XRD) 43 3-3-5 光激螢光光譜儀(Photoluminescence) 45 3-3-6 化學分析電子儀分析(ESCA) 46 3-3-7半導體電性量測系統 48 3-4實驗材料 49 3-4-1 基板材料 49 3-4-2 有機材料 49 3-4-3 無機材料 49 3-4-4 金屬材料 50 3-4-5 靶材材料 50 3-4-6 基板清洗溶劑及實驗氣體 50 3-5實驗步驟 51 3-5-1 成長氧化鋅奈米線之基材之製備 51 3-5-1-1 利用塗佈方式製備氧化鋅成核層 51 3-5-1-2 熱蒸鍍銀在矽基板上作為觸媒 52 3-5-2 水溶液法製備氧化鋅奈米線 52 3-5-3製備氧化鋅/氧化鎂-核/殼奈米線 53 3-5-4 製備奈米線電晶體 54 第四章 結果與討論 57 4-1 以水熱法成長氧化鋅奈米線 57 4-1-1 以不同方法製備Ag薄膜成長氧化鋅奈米線 58 4-1-2 以不同濃度成長氧化鋅奈米線 63 4-1-4 比較ZnO成核層與Ag成核層對奈米線成長差異 69 4-2在ZnO外層包覆MgO 70 4-2-1奈米線在塗佈Mg(OAc)2後的材料分析 71 4-2-2轉換溫度對殼層Mg(OAc)2以及核層奈米線的影響 78 4-3以滾壓法製備氧化鋅奈米線電晶體 87 4-3-1以PDMS轉印奈米線 89 4-3-2將轉印的奈米線進行黃光製程 94 4-3-2 測試奈米線電晶體的特性 97 第五章 結論 102 參考文獻 104

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