本論文提出一種創新的製程技術，結合金屬轉印與曲面黃光微影製程，製作具次微米圖形結構之滾筒模仁，亦即將標準黃光微影之平面微結構製程應用至曲面金屬滾輪表面上，並將其特徵線寬推小到次微米的等級。過程中，首先利用氣環式光阻塗佈系統，將液態光阻均勻塗佈在直徑50 mm、長度150 mm之滾輪表面；接著建立滾筒式金屬轉印系統，將PDMS軟性模仁表面之平面金屬層圖案轉移至曲面滾筒上，作為UV曝光時的遮罩；再藉由準直平行UV曝光燈源、對準機構、以及精密的旋轉控制，對光阻層進行曝光與圖形轉移，再以顯影的方式在金屬滾筒上完成光阻微結構；最後利用電子束蒸鍍機 (E-beam) 以垂直旋轉蒸鍍的方式蒸鍍金屬滾筒，使金屬光罩圖形轉移至金屬滾筒表面上，之後再將光阻層與金屬遮罩舉離 (Lift-off)，即可完成次微米滾輪模仁的製作。本論文成功製作最小線寬 600 nm 的金屬滾筒模仁，並將用於後續的滾印製程。

This thesis develops a novel method which combines metal contact printing and curved surface photolithography to fabricate roller molds with sub-micrometer feature size. First of all, an air ring photo-resist (PR) coating system is developed which can successfully coat a uniform PR on roller surface. Secondly, the coated roller is then mounted on a rotation mechanism which can transfer a gold film from the surface of a planar PDMS mold to the PR layer coated on the roller surface. Thirdly, using the transferred gold film pattern as a shielding mask, the PR layer is UV exposed. After PR developing process, patterned PR structures are formed on the roller’s cylindrical surface. Finally, vertical E-beam evaporation and lift-off processes are applied so that metallic micro-structures are directly formed on the roller’s surface. In this work, roller mold with a micro-structures of 600 nm feature size are successfully achieved, which can be used for roller imprinting in the future.

[1] S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint
of sub-25 nm vias and trenches in polymers, ” Appl. Phys. Lett., Vol. 67 (21), pp.3114–3116, 1995.
[2] S. C. Tseng, W. Y. Peng, Y. F. Hsieh, P. J. Lee and W.
L. Lai, “Electron beam lithography on cylindrical roller,”
Microelectron Engineering, Vol. 87, pp.943–946, 2010.
[3] http://www.sipix.com/ (sipix comp.)
[4] M. D. Fagan, “A novel process for continuous thermal embossing of large-area nano-patterns onto polymer films,” Department of Microelectron Engineering, Vol. 87, pp.943–946, 2010.
[5] H. Ten, A. Giberston, and S. Y. Chou, “Roller nanoimprint lithography,” Jounal of Vacuum Science and Technology B, Vol. 16(6), pp.3926-3928 , 1998.
[6] N. Ishizawa, K. Idei, T. Kimura, D. Noda, and T. Hattori, “Resin micromachining by roller hot embossing,” icrosystemTechnologies, Vol. 14, pp.1381–1388, 2008.
[7] S. Y. Yang , F. S. Cheng, S. W. Xu, P. H. Huang and T. C. Huang,“Fabrication of microlens arrays using UV micro-stampingwith soft roller and gas-pressurized platform,” Microelectronic Engineering, Vol. 85, pp.603–609, 2008.
[8] S. J. Liu and Y. C. Chang, “A novel soft-mold roller embossing method for the rapid fabrication of micro-blocks onto glasssubstrates, Joural of Micromechanics and Microengineering, Vol. 17, pp.172–179, 2007.
[9] L. T. Jiang, T. C. Huang, C. Y. Chang, J. R. Ciou, S. Y. Yang and P.H Huang, “Direct fabrication of rigid microstructures on a metallic roller using a dry film resist,” Joural of Micromechanics and Microengineering, Vol. 18, 015004, 2008.
[10] 陳勇嘉，滾壓式製程於中尺寸導光板之模擬與製程研究，國立中興大學精密工程研究所碩士論文，中華民國九十五年六月。
[11] Y. Xia and G. M. Whitesides, “Soft lithography,” Angewandte Chemie International Edition, Vol. 37(5), pp.550–575, 1998.
[12] Y. Xia, D. Qin, and G. M. Whitesides, “Microcontact printing with a cylindrical rolling stamp: A practical step toward automatic manufacturing of patterns with submicrometer-size features.”Advanced Materials, Vol. 8, pp.837-840, 1996.
[13] A. Y. Yi and L. Li, “Design and fabrication of a micro-lens array by use of a slow tool servo,” Optics Letters, Vol. 30, pp.1707–1709, 2005.
[14] T. Kawai, K. Ebihara, and A. Yamamoto 精密工學會誌, Vol.72, 2006.
[15] 黃玉龍，微放電加工於微米圓盤刀具之製作及應用，雲林科技大學機械工程系碩士班碩士論文。
[16] T. Katoha, N. Nishib, M. Fukagawab, H. Uenob, S. Sugiyamab, “Direct writing for three-dimensional microfabrication using synchrotron radiation etching,” Sensors and Actuators A, Vol. 89, pp.10-15, 2001.
[17] http://www.che.ncku.edu.tw/FacultyWeb/HongCN/research/research.html (成功大學化學材料工程系)
[18] Wenjun Wang, Xuesong Mei, Gedong Jiang, “Control of
microstructure shape and morphology in femtosecond laser ablation of imprint rollers,” The International Journal of Advanced Manufacturing Technology, Vol. 41, pp.504–512, 2009.
[19] 陳泓瑋，旋轉步階式曲面黃光微影技術製程應用於製作無縫滾輪與微透鏡陣列光學膜，國立成功大學航空太空工程學系碩士班碩士論文